NL7609420A - Werkwijze voor de vervaardiging van een half-geleiderinrichting. - Google Patents
Werkwijze voor de vervaardiging van een half-geleiderinrichting.Info
- Publication number
- NL7609420A NL7609420A NL7609420A NL7609420A NL7609420A NL 7609420 A NL7609420 A NL 7609420A NL 7609420 A NL7609420 A NL 7609420A NL 7609420 A NL7609420 A NL 7609420A NL 7609420 A NL7609420 A NL 7609420A
- Authority
- NL
- Netherlands
- Prior art keywords
- semi
- procedure
- manufacture
- conductor device
- conductor
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
- H01L21/76224—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using trench refilling with dielectric materials
- H01L21/76232—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using trench refilling with dielectric materials of trenches having a shape other than rectangular or V-shape, e.g. rounded corners, oblique or rounded trench walls
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/31051—Planarisation of the insulating layers
- H01L21/31053—Planarisation of the insulating layers involving a dielectric removal step
- H01L21/31055—Planarisation of the insulating layers involving a dielectric removal step the removal being a chemical etching step, e.g. dry etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31105—Etching inorganic layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
- H01L29/0642—Isolation within the component, i.e. internal isolation
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/05—Etch and refill
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/051—Etching
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/085—Isolated-integrated
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/118—Oxide films
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50102181A JPS5226182A (en) | 1975-08-25 | 1975-08-25 | Manufacturing method of semi-conductor unit |
Publications (1)
Publication Number | Publication Date |
---|---|
NL7609420A true NL7609420A (nl) | 1977-03-01 |
Family
ID=14320497
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NL7609420A NL7609420A (nl) | 1975-08-25 | 1976-08-24 | Werkwijze voor de vervaardiging van een half-geleiderinrichting. |
Country Status (3)
Country | Link |
---|---|
US (1) | US4073054A (nl) |
JP (1) | JPS5226182A (nl) |
NL (1) | NL7609420A (nl) |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53148988A (en) * | 1977-05-31 | 1978-12-26 | Matsushita Electric Ind Co Ltd | Manufacture of semiconductor substrate |
JPS5541715A (en) * | 1978-09-19 | 1980-03-24 | Oki Electric Ind Co Ltd | Production of semiconductor device |
DE3072040D1 (en) * | 1979-07-23 | 1987-11-05 | Fujitsu Ltd | Method of manufacturing a semiconductor device wherein first and second layers are formed |
JPS5630737A (en) * | 1979-08-21 | 1981-03-27 | Seiko Epson Corp | Semiconductor ic circuit |
US4307180A (en) * | 1980-08-22 | 1981-12-22 | International Business Machines Corp. | Process of forming recessed dielectric regions in a monocrystalline silicon substrate |
EP0049400B1 (en) * | 1980-09-22 | 1984-07-11 | Kabushiki Kaisha Toshiba | Method of smoothing an insulating layer formed on a semiconductor body |
JPS57204135A (en) * | 1981-06-10 | 1982-12-14 | Toshiba Corp | Manufacture of semiconductor device |
US4389294A (en) * | 1981-06-30 | 1983-06-21 | International Business Machines Corporation | Method for avoiding residue on a vertical walled mesa |
US4385975A (en) * | 1981-12-30 | 1983-05-31 | International Business Machines Corp. | Method of forming wide, deep dielectric filled isolation trenches in the surface of a silicon semiconductor substrate |
JPS58210634A (ja) * | 1982-05-31 | 1983-12-07 | Toshiba Corp | 半導体装置の製造方法 |
JPS58216436A (ja) * | 1982-06-09 | 1983-12-16 | Nec Corp | 半導体装置の製造方法 |
JPS589337A (ja) * | 1982-06-25 | 1983-01-19 | Hitachi Ltd | 半導体装置の製造方法 |
JPS598353A (ja) * | 1982-07-07 | 1984-01-17 | Nec Corp | 半導体集積回路装置 |
JPS59124723A (ja) * | 1982-12-29 | 1984-07-18 | Fujitsu Ltd | 半導体装置の製造方法 |
US4539744A (en) * | 1984-02-03 | 1985-09-10 | Fairchild Camera & Instrument Corporation | Semiconductor planarization process and structures made thereby |
US4708767A (en) * | 1984-10-05 | 1987-11-24 | Signetics Corporation | Method for providing a semiconductor device with planarized contacts |
JPS61234046A (ja) * | 1986-04-25 | 1986-10-18 | Toshiba Corp | 半導体装置の製造方法 |
US5049522A (en) * | 1990-02-09 | 1991-09-17 | Hughes Aircraft Company | Semiconductive arrangement having dissimilar, laterally spaced layer structures, and process for fabricating the same |
JPH07106412A (ja) * | 1993-10-07 | 1995-04-21 | Toshiba Corp | 半導体装置およびその製造方法 |
US5719085A (en) * | 1995-09-29 | 1998-02-17 | Intel Corporation | Shallow trench isolation technique |
FR2829288A1 (fr) * | 2001-09-06 | 2003-03-07 | St Microelectronics Sa | Structure de contact sur une region profonde formee dans un substrat semiconducteur |
CN103855070A (zh) * | 2012-11-29 | 2014-06-11 | 上海华虹宏力半导体制造有限公司 | 超低密度有源区的浅沟槽隔离平坦化的方法 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3400309A (en) * | 1965-10-18 | 1968-09-03 | Ibm | Monolithic silicon device containing dielectrically isolatng film of silicon carbide |
US3892608A (en) * | 1974-02-28 | 1975-07-01 | Motorola Inc | Method for filling grooves and moats used on semiconductor devices |
US3998673A (en) * | 1974-08-16 | 1976-12-21 | Pel Chow | Method for forming electrically-isolated regions in integrated circuits utilizing selective epitaxial growth |
-
1975
- 1975-08-25 JP JP50102181A patent/JPS5226182A/ja active Pending
-
1976
- 1976-08-13 US US05/714,197 patent/US4073054A/en not_active Expired - Lifetime
- 1976-08-24 NL NL7609420A patent/NL7609420A/nl not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
US4073054A (en) | 1978-02-14 |
JPS5226182A (en) | 1977-02-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
BV | The patent application has lapsed |