NL6910105A - - Google Patents

Info

Publication number
NL6910105A
NL6910105A NL6910105A NL6910105A NL6910105A NL 6910105 A NL6910105 A NL 6910105A NL 6910105 A NL6910105 A NL 6910105A NL 6910105 A NL6910105 A NL 6910105A NL 6910105 A NL6910105 A NL 6910105A
Authority
NL
Netherlands
Application number
NL6910105A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of NL6910105A publication Critical patent/NL6910105A/xx

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/611Insulating or insulated package substrates; Interposers; Redistribution layers for connecting multiple chips together
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00Interconnections in chips, wafers or substrates
    • H10W20/20Interconnections within wafers or substrates, e.g. through-silicon vias [TSV]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/62Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their interconnections
    • H10W70/63Vias, e.g. via plugs
    • H10W70/635Through-vias
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/67Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their insulating layers or insulating parts
    • H10W70/69Insulating materials thereof
    • H10W70/698Semiconductor materials that are electrically insulating, e.g. undoped silicon
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W99/00Subject matter not provided for in other groups of this subclass
NL6910105A 1968-07-05 1969-07-02 NL6910105A (https=)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US74288668A 1968-07-05 1968-07-05

Publications (1)

Publication Number Publication Date
NL6910105A true NL6910105A (https=) 1970-01-07

Family

ID=24986644

Family Applications (1)

Application Number Title Priority Date Filing Date
NL6910105A NL6910105A (https=) 1968-07-05 1969-07-02

Country Status (6)

Country Link
US (1) US3577037A (https=)
CH (1) CH499202A (https=)
DE (1) DE1933547B2 (https=)
FR (1) FR2012333A1 (https=)
GB (1) GB1254795A (https=)
NL (1) NL6910105A (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2308202A1 (fr) * 1975-04-14 1976-11-12 Ibm Procede de realisation de trous dans des corps semiconducteurs et dispositifs en resultant

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US3795845A (en) * 1972-12-26 1974-03-05 Ibm Semiconductor chip having connecting pads arranged in a non-orthogonal array
GB1477544A (en) * 1974-08-19 1977-06-22 Ibm Semiconductor assemblies
US4074342A (en) * 1974-12-20 1978-02-14 International Business Machines Corporation Electrical package for lsi devices and assembly process therefor
US3984620A (en) * 1975-06-04 1976-10-05 Raytheon Company Integrated circuit chip test and assembly package
FR2320633A1 (fr) * 1975-08-04 1977-03-04 Itt Boitier de circuit integre
US4126879A (en) * 1977-09-14 1978-11-21 Rca Corporation Semiconductor device with ballast resistor adapted for a transcalent device
CA1115852A (en) * 1980-01-09 1982-01-05 Jacques R. St. Louis Mounting and packaging of silicon devices on ceramic substrates, and assemblies containing silicon devices
US4322778A (en) * 1980-01-25 1982-03-30 International Business Machines Corp. High performance semiconductor package assembly
JPS609349B2 (ja) * 1980-10-20 1985-03-09 三菱電機株式会社 ダイナミック・ランダム・アクセス半導体メモリ装置
JPS5843554A (ja) * 1981-09-08 1983-03-14 Mitsubishi Electric Corp 半導体装置
FR2516311B1 (fr) * 1981-11-06 1985-10-11 Thomson Csf Socle pour le montage d'une pastille semi-conductrice sur l'embase d'un boitier d'encapsulation, et procede de realisation de ce socle
NL8202470A (nl) * 1982-06-18 1984-01-16 Philips Nv Hoogfrequentschakelinrichting en halfgeleiderinrichting voor toepassing in een dergelijke inrichting.
US4761681A (en) * 1982-09-08 1988-08-02 Texas Instruments Incorporated Method for fabricating a semiconductor contact and interconnect structure using orientation dependent etching and thermomigration
JPS5987893A (ja) * 1982-11-12 1984-05-21 株式会社日立製作所 配線基板とその製造方法およびそれを用いた半導体装置
GB2136203B (en) * 1983-03-02 1986-10-15 Standard Telephones Cables Ltd Through-wafer integrated circuit connections
US4954875A (en) * 1986-07-17 1990-09-04 Laser Dynamics, Inc. Semiconductor wafer array with electrically conductive compliant material
US5138438A (en) 1987-06-24 1992-08-11 Akita Electronics Co. Ltd. Lead connections means for stacked tab packaged IC chips
US5166097A (en) * 1990-11-26 1992-11-24 The Boeing Company Silicon wafers containing conductive feedthroughs
US5614766A (en) * 1991-09-30 1997-03-25 Rohm Co., Ltd. Semiconductor device with stacked alternate-facing chips
JP3077316B2 (ja) * 1991-10-30 2000-08-14 富士電機株式会社 集積回路装置
US5438224A (en) * 1992-04-23 1995-08-01 Motorola, Inc. Integrated circuit package having a face-to-face IC chip arrangement
US5625209A (en) * 1992-08-26 1997-04-29 Texas Instruments Incorporated Silicon based sensor apparatus
US5411400A (en) * 1992-09-28 1995-05-02 Motorola, Inc. Interconnect system for a semiconductor chip and a substrate
US5343071A (en) * 1993-04-28 1994-08-30 Raytheon Company Semiconductor structures having dual surface via holes
CA2179052C (en) * 1993-12-13 2001-02-13 Robert E. Higashi Integrated silicon vacuum micropackage for infrared devices
US6848173B2 (en) * 1994-07-07 2005-02-01 Tessera, Inc. Microelectric packages having deformed bonded leads and methods therefor
US6429112B1 (en) * 1994-07-07 2002-08-06 Tessera, Inc. Multi-layer substrates and fabrication processes
US5688716A (en) 1994-07-07 1997-11-18 Tessera, Inc. Fan-out semiconductor chip assembly
FR2738395B1 (fr) * 1995-08-31 1997-10-10 Commissariat Energie Atomique Dispositif autoporte pour la propagation d'ondes hyperfrequences et procedes de realisation d'un tel dispositif
US5739067A (en) * 1995-12-07 1998-04-14 Advanced Micro Devices, Inc. Method for forming active devices on and in exposed surfaces of both sides of a silicon wafer
US5817530A (en) * 1996-05-20 1998-10-06 Micron Technology, Inc. Use of conductive lines on the back side of wafers and dice for semiconductor interconnects
US5815427A (en) * 1997-04-02 1998-09-29 Micron Technology, Inc. Modular memory circuit and method for forming same
IL123207A0 (en) 1998-02-06 1998-09-24 Shellcase Ltd Integrated circuit device
US6137164A (en) * 1998-03-16 2000-10-24 Texas Instruments Incorporated Thin stacked integrated circuit device
US6036872A (en) 1998-03-31 2000-03-14 Honeywell Inc. Method for making a wafer-pair having sealed chambers
FR2782840B1 (fr) * 1998-08-25 2003-09-05 Commissariat Energie Atomique Circuit electronique et procede de realisation d'un circuit electronique integre comprenant au moins un composant electronique de puissance dans une plaque de substrat
SG82591A1 (en) * 1998-12-17 2001-08-21 Eriston Technologies Pte Ltd Bumpless flip chip assembly with solder via
US7179740B1 (en) * 1999-05-03 2007-02-20 United Microelectronics Corporation Integrated circuit with improved interconnect structure and process for making same
US6617681B1 (en) 1999-06-28 2003-09-09 Intel Corporation Interposer and method of making same
JP3735526B2 (ja) * 2000-10-04 2006-01-18 日本電気株式会社 半導体装置及びその製造方法
JP4468609B2 (ja) * 2001-05-21 2010-05-26 株式会社ルネサステクノロジ 半導体装置
US6696320B2 (en) * 2001-09-30 2004-02-24 Intel Corporation Low profile stacked multi-chip package and method of forming same
US7088074B2 (en) * 2002-01-02 2006-08-08 International Business Machines Corporation System level device for battery and integrated circuit integration
DE10313047B3 (de) * 2003-03-24 2004-08-12 Infineon Technologies Ag Verfahren zur Herstellung von Chipstapeln
KR100541393B1 (ko) * 2003-04-26 2006-01-10 삼성전자주식회사 멀티칩 bga 패키지
JP4263953B2 (ja) * 2003-06-23 2009-05-13 三洋電機株式会社 半導体装置及びその製造方法
US7183653B2 (en) * 2003-12-17 2007-02-27 Intel Corporation Via including multiple electrical paths
US20060038272A1 (en) * 2004-08-17 2006-02-23 Texas Instruments Incorporated Stacked wafer scale package
US7276794B2 (en) * 2005-03-02 2007-10-02 Endevco Corporation Junction-isolated vias
JPWO2008142764A1 (ja) * 2007-05-18 2010-08-05 株式会社日本マイクロニクス 積層型パッケージ、及び、積層型パッケージの形成方法
KR100929464B1 (ko) * 2007-12-21 2009-12-02 주식회사 동부하이텍 반도체칩, 이의 제조 방법 및 반도체칩 적층 패키지
KR20100023641A (ko) * 2008-08-22 2010-03-04 삼성전자주식회사 회로 기판을 관통하는 비아 플러그를 포함하는 반도체 칩, 반도체 칩 적층 구조 및 반도체 패키지
US8115292B2 (en) * 2008-10-23 2012-02-14 United Test And Assembly Center Ltd. Interposer for semiconductor package
US7939926B2 (en) * 2008-12-12 2011-05-10 Qualcomm Incorporated Via first plus via last technique for IC interconnects
SG183648A1 (en) * 2011-02-28 2012-09-27 Agency Science Tech & Res A wafer level package and a method of forming the same
US8580675B2 (en) 2011-03-02 2013-11-12 Texas Instruments Incorporated Two-track cross-connect in double-patterned structure using rectangular via
US10199274B2 (en) * 2016-04-08 2019-02-05 X-Fab Semiconductor Foundries Gmbh Electrically conductive via(s) in a semiconductor substrate and associated production method

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Publication number Priority date Publication date Assignee Title
US3150299A (en) * 1959-09-11 1964-09-22 Fairchild Camera Instr Co Semiconductor circuit complex having isolation means
US3256465A (en) * 1962-06-08 1966-06-14 Signetics Corp Semiconductor device assembly with true metallurgical bonds
US3388301A (en) * 1964-12-09 1968-06-11 Signetics Corp Multichip integrated circuit assembly with interconnection structure
US3343256A (en) * 1964-12-28 1967-09-26 Ibm Methods of making thru-connections in semiconductor wafers

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2308202A1 (fr) * 1975-04-14 1976-11-12 Ibm Procede de realisation de trous dans des corps semiconducteurs et dispositifs en resultant

Also Published As

Publication number Publication date
GB1254795A (en) 1971-11-24
US3577037A (en) 1971-05-04
FR2012333A1 (https=) 1970-03-20
DE1933547A1 (de) 1970-01-08
CH499202A (de) 1970-11-15
DE1933547B2 (de) 1972-03-02

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