NL186886B - Halfgeleiderinrichting. - Google Patents

Halfgeleiderinrichting.

Info

Publication number
NL186886B
NL186886B NLAANVRAGE8006482,A NL8006482A NL186886B NL 186886 B NL186886 B NL 186886B NL 8006482 A NL8006482 A NL 8006482A NL 186886 B NL186886 B NL 186886B
Authority
NL
Netherlands
Prior art keywords
semiconductor device
semiconductor
Prior art date
Application number
NLAANVRAGE8006482,A
Other languages
English (en)
Other versions
NL186886C (nl
NL8006482A (nl
Original Assignee
Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Nv filed Critical Philips Nv
Priority to NLAANVRAGE8006482,A priority Critical patent/NL186886C/nl
Priority to US06/319,166 priority patent/US4489338A/en
Priority to FR8121781A priority patent/FR2495380B1/fr
Priority to DE19813146352 priority patent/DE3146352A1/de
Priority to IT25287/81A priority patent/IT1139848B/it
Priority to GB8135571A priority patent/GB2088633B/en
Priority to CA000391004A priority patent/CA1171554A/en
Priority to JP56189366A priority patent/JPS57117272A/ja
Publication of NL8006482A publication Critical patent/NL8006482A/nl
Publication of NL186886B publication Critical patent/NL186886B/nl
Application granted granted Critical
Publication of NL186886C publication Critical patent/NL186886C/nl

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/21—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
    • G11C11/34—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices
    • G11C11/40—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors
    • G11C11/401—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors forming cells needing refreshing or charge regeneration, i.e. dynamic cells
    • G11C11/403—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors forming cells needing refreshing or charge regeneration, i.e. dynamic cells with charge regeneration common to a multiplicity of memory cells, i.e. external refresh
    • G11C11/404—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors forming cells needing refreshing or charge regeneration, i.e. dynamic cells with charge regeneration common to a multiplicity of memory cells, i.e. external refresh with one charge-transfer gate, e.g. MOS transistor, per cell
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/76202—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using a local oxidation of silicon, e.g. LOCOS, SWAMI, SILO
    • H01L21/76221—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using a local oxidation of silicon, e.g. LOCOS, SWAMI, SILO with a plurality of successive local oxidation steps

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • Semiconductor Memories (AREA)
NLAANVRAGE8006482,A 1980-11-28 1980-11-28 Halfgeleiderinrichting. NL186886C (nl)

Priority Applications (8)

Application Number Priority Date Filing Date Title
NLAANVRAGE8006482,A NL186886C (nl) 1980-11-28 1980-11-28 Halfgeleiderinrichting.
US06/319,166 US4489338A (en) 1980-11-28 1981-11-09 Memory cell with thick oxide at least as deep as channel stop
FR8121781A FR2495380B1 (fr) 1980-11-28 1981-11-20 Dispositif de memoire a semiconducteur
DE19813146352 DE3146352A1 (de) 1980-11-28 1981-11-23 Halbleiteranordnung
IT25287/81A IT1139848B (it) 1980-11-28 1981-11-25 Dispositivo semiconduttore
GB8135571A GB2088633B (en) 1980-11-28 1981-11-25 Capacitor memory cell
CA000391004A CA1171554A (en) 1980-11-28 1981-11-26 Semiconductor memory cell device
JP56189366A JPS57117272A (en) 1980-11-28 1981-11-27 Semiconductor device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NLAANVRAGE8006482,A NL186886C (nl) 1980-11-28 1980-11-28 Halfgeleiderinrichting.
NL8006482 1980-11-28

Publications (3)

Publication Number Publication Date
NL8006482A NL8006482A (nl) 1982-06-16
NL186886B true NL186886B (nl) 1990-10-16
NL186886C NL186886C (nl) 1992-03-16

Family

ID=19836255

Family Applications (1)

Application Number Title Priority Date Filing Date
NLAANVRAGE8006482,A NL186886C (nl) 1980-11-28 1980-11-28 Halfgeleiderinrichting.

Country Status (8)

Country Link
US (1) US4489338A (nl)
JP (1) JPS57117272A (nl)
CA (1) CA1171554A (nl)
DE (1) DE3146352A1 (nl)
FR (1) FR2495380B1 (nl)
GB (1) GB2088633B (nl)
IT (1) IT1139848B (nl)
NL (1) NL186886C (nl)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4511911A (en) * 1981-07-22 1985-04-16 International Business Machines Corporation Dense dynamic memory cell structure and process
US4590504A (en) * 1982-12-28 1986-05-20 Thomson Components - Mostek Corporation Nonvolatile MOS memory cell with tunneling element
JPS59223807A (ja) * 1983-06-01 1984-12-15 Mitsubishi Electric Corp 数値制御装置の結合方式
JPS6018948A (ja) * 1983-07-12 1985-01-31 Nec Corp 半導体集積回路装置
US4891747A (en) * 1984-06-25 1990-01-02 Texas Instruments Incorporated Lightly-doped drain transistor structure in contactless DRAM cell with buried source/drain
US4700461A (en) * 1986-09-29 1987-10-20 Massachusetts Institute Of Technology Process for making junction field-effect transistors
US5212111A (en) * 1992-04-22 1993-05-18 Micron Technology, Inc. Local-oxidation of silicon (LOCOS) process using ceramic barrier layer

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL170348C (nl) * 1970-07-10 1982-10-18 Philips Nv Werkwijze voor het vervaardigen van een halfgeleiderinrichting, waarbij op een oppervlak van een halfgeleiderlichaam een tegen dotering en tegen thermische oxydatie maskerend masker wordt aangebracht, de door de vensters in het masker vrijgelaten delen van het oppervlak worden onderworpen aan een etsbehandeling voor het vormen van verdiepingen en het halfgeleiderlichaam met het masker wordt onderworpen aan een thermische oxydatiebehandeling voor het vormen van een oxydepatroon dat de verdiepingen althans ten dele opvult.
CA1001771A (en) * 1973-01-15 1976-12-14 Fairchild Camera And Instrument Corporation Method of mos transistor manufacture and resulting structure
NL7510586A (nl) * 1975-09-09 1977-03-11 Philips Nv Werkwijze voor het vervaardigen van een la- dingsoverdrachtinrichting en ladingsoverdracht- inrichting vervaardigd met behulp van de werk- wijze.
US3997799A (en) * 1975-09-15 1976-12-14 Baker Roger T Semiconductor-device for the storage of binary data
US4240092A (en) * 1976-09-13 1980-12-16 Texas Instruments Incorporated Random access memory cell with different capacitor and transistor oxide thickness
NL185376C (nl) * 1976-10-25 1990-03-16 Philips Nv Werkwijze ter vervaardiging van een halfgeleiderinrichting.
JPS5376687A (en) * 1976-12-17 1978-07-07 Nec Corp Semiconductor memory device
US4112575A (en) * 1976-12-20 1978-09-12 Texas Instruments Incorporated Fabrication methods for the high capacity ram cell
US4135289A (en) * 1977-08-23 1979-01-23 Bell Telephone Laboratories, Incorporated Method for producing a buried junction memory device
US4152779A (en) * 1978-04-06 1979-05-01 Texas Instruments Incorporated MOS ram cell having improved refresh time
US4251571A (en) * 1978-05-02 1981-02-17 International Business Machines Corporation Method for forming semiconductor structure with improved isolation between two layers of polycrystalline silicon
US4373248A (en) * 1978-07-12 1983-02-15 Texas Instruments Incorporated Method of making high density semiconductor device such as floating gate electrically programmable ROM or the like
US4392210A (en) * 1978-08-28 1983-07-05 Mostek Corporation One transistor-one capacitor memory cell
JPS5572074A (en) * 1978-11-25 1980-05-30 Chiyou Lsi Gijutsu Kenkyu Kumiai Production of semiconductor device

Also Published As

Publication number Publication date
NL186886C (nl) 1992-03-16
FR2495380A1 (fr) 1982-06-04
US4489338A (en) 1984-12-18
GB2088633A (en) 1982-06-09
CA1171554A (en) 1984-07-24
DE3146352A1 (de) 1982-09-02
GB2088633B (en) 1984-08-22
IT8125287A0 (it) 1981-11-25
IT1139848B (it) 1986-09-24
JPS57117272A (en) 1982-07-21
FR2495380B1 (fr) 1986-05-09
NL8006482A (nl) 1982-06-16

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Legal Events

Date Code Title Description
A1B A search report has been drawn up
A85 Still pending on 85-01-01
BC A request for examination has been filed
R1VN Request for mentioning name(s) of the inventor(s) in the patent or request for changing the name(s) of inventor(s) with respec
NP1 Patent granted (not automatically)
V2 Lapsed due to non-payment of the last due maintenance fee for the patent application