NL1036322A1 - Systems and methods for lithographic illuminator beam deviation measurement and calibration using grating sensors. - Google Patents

Systems and methods for lithographic illuminator beam deviation measurement and calibration using grating sensors. Download PDF

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Publication number
NL1036322A1
NL1036322A1 NL1036322A NL1036322A NL1036322A1 NL 1036322 A1 NL1036322 A1 NL 1036322A1 NL 1036322 A NL1036322 A NL 1036322A NL 1036322 A NL1036322 A NL 1036322A NL 1036322 A1 NL1036322 A1 NL 1036322A1
Authority
NL
Netherlands
Prior art keywords
lithographic
calibration
systems
methods
deviation measurement
Prior art date
Application number
NL1036322A
Other languages
English (en)
Inventor
Todd R Downey
Original Assignee
Asml Holding Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asml Holding Nv filed Critical Asml Holding Nv
Publication of NL1036322A1 publication Critical patent/NL1036322A1/nl

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/70141—Illumination system adjustment, e.g. adjustments during exposure or alignment during assembly of illumination system

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
NL1036322A 2007-12-21 2008-12-17 Systems and methods for lithographic illuminator beam deviation measurement and calibration using grating sensors. NL1036322A1 (nl)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US1628707P 2007-12-21 2007-12-21

Publications (1)

Publication Number Publication Date
NL1036322A1 true NL1036322A1 (nl) 2009-06-23

Family

ID=40788211

Family Applications (1)

Application Number Title Priority Date Filing Date
NL1036322A NL1036322A1 (nl) 2007-12-21 2008-12-17 Systems and methods for lithographic illuminator beam deviation measurement and calibration using grating sensors.

Country Status (3)

Country Link
US (1) US7821625B2 (nl)
JP (1) JP4814301B2 (nl)
NL (1) NL1036322A1 (nl)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8111387B2 (en) * 2008-05-08 2012-02-07 Hunter Engineering Company Methods and systems for wheel profile measurement
US9001172B2 (en) * 2008-09-04 2015-04-07 Vardex Laser Solutions, Inc. System for laser-based digital marking of objects with images or digital image projection with the laser beam shaped and amplified to have uniform irradiance distribution over the beam cross-section
KR101929906B1 (ko) * 2010-12-28 2018-12-18 엘지디스플레이 주식회사 노광장치 및 노광장치의 정렬 방법
DE102012204674B4 (de) * 2012-03-23 2014-11-27 Carl Zeiss Smt Gmbh Strahlregelungsvorrichtung für einen EUV-Beleuchtungsstrahl
US10126560B2 (en) 2016-02-18 2018-11-13 National Engineering Research Center for Optical Instrumentation Spectrum-generation system based on multiple-diffraction optical phasometry
US11662669B2 (en) * 2019-07-11 2023-05-30 Asml Netherlands B.V. Apparatus and method for measuring substrate height

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4874245A (en) * 1988-02-26 1989-10-17 Simmonds Precision Products, Inc. Optical shaft angular and torsional displacement and speed sensing system
GB8916764D0 (en) * 1989-07-21 1989-09-06 Sambles John R Surface plasmon optical sensor
US8111401B2 (en) * 1999-11-05 2012-02-07 Robert Magnusson Guided-mode resonance sensors employing angular, spectral, modal, and polarization diversity for high-precision sensing in compact formats
NZ523939A (en) * 2000-07-21 2003-05-30 Vir As Holographic interference developed diffraction grating coupling elements for surface plasmon resonance sensors
JP3844688B2 (ja) * 2000-12-25 2006-11-15 富士写真フイルム株式会社 全反射減衰を利用したセンサー
US20030002043A1 (en) * 2001-04-10 2003-01-02 Kla-Tencor Corporation Periodic patterns and technique to control misalignment
US7057720B2 (en) * 2003-06-24 2006-06-06 Corning Incorporated Optical interrogation system and method for using same
JP2005172704A (ja) * 2003-12-12 2005-06-30 Olympus Corp 光検出装置および光学システム
US7177012B2 (en) * 2004-10-18 2007-02-13 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
JP2007071615A (ja) * 2005-09-06 2007-03-22 Tohoku Univ 表面プラズモン共鳴角スペクトル測定装置
US7473916B2 (en) * 2005-12-16 2009-01-06 Asml Netherlands B.V. Apparatus and method for detecting contamination within a lithographic apparatus
JP5164822B2 (ja) * 2007-12-21 2013-03-21 エーエスエムエル ホールディング エヌ．ブイ． 光ビームの特性を検出するためのビーム特性モニタ

Also Published As

Publication number Publication date
US7821625B2 (en) 2010-10-26
JP2009152606A (ja) 2009-07-09
US20090161093A1 (en) 2009-06-25
JP4814301B2 (ja) 2011-11-16

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AD1A A request for search or an international type search has been filed