DE602006002916D1 - Interferometer und Kalibrierverfahren dafür - Google Patents

Interferometer und Kalibrierverfahren dafür

Info

Publication number
DE602006002916D1
DE602006002916D1 DE602006002916T DE602006002916T DE602006002916D1 DE 602006002916 D1 DE602006002916 D1 DE 602006002916D1 DE 602006002916 T DE602006002916 T DE 602006002916T DE 602006002916 T DE602006002916 T DE 602006002916T DE 602006002916 D1 DE602006002916 D1 DE 602006002916D1
Authority
DE
Germany
Prior art keywords
interferometer
calibration method
calibration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602006002916T
Other languages
English (en)
Inventor
Kazuhiko Kawasaki
Yoshimasa Suzuki
David W Sesko
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Corp
Original Assignee
Mitutoyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Corp filed Critical Mitutoyo Corp
Publication of DE602006002916D1 publication Critical patent/DE602006002916D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/0201—Interferometers characterised by controlling or generating intrinsic radiation properties using temporal phase variation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G01B9/02004—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using frequency scans
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/0207—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer
    • G01B9/02072—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer by calibration or testing of interferometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
DE602006002916T 2005-04-27 2006-04-27 Interferometer und Kalibrierverfahren dafür Active DE602006002916D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005128872 2005-04-27

Publications (1)

Publication Number Publication Date
DE602006002916D1 true DE602006002916D1 (de) 2008-11-13

Family

ID=36653580

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602006002916T Active DE602006002916D1 (de) 2005-04-27 2006-04-27 Interferometer und Kalibrierverfahren dafür

Country Status (3)

Country Link
US (1) US7511827B2 (de)
EP (1) EP1717546B1 (de)
DE (1) DE602006002916D1 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006035022A1 (de) * 2006-07-28 2008-01-31 Carl Zeiss Smt Ag Verfahren zum Herstellen einer optischen Komponente, Interferometeranordnung und Beugungsgitter
TWI326354B (en) * 2007-05-18 2010-06-21 Univ Nat Taipei Technology Method and apparatus for simultaneously acquiring interferograms and method for solving the phase
JP5558768B2 (ja) * 2008-10-24 2014-07-23 キヤノン株式会社 測定装置、光源装置、干渉測定装置、露光装置、及びデバイス製造方法
TWI470184B (zh) * 2011-08-20 2015-01-21 Tonta Electro Optical Co Ltd 表面輪廓偵測裝置及其對位方法以及全口徑量測資料的擷取方法
JP5988643B2 (ja) * 2012-03-26 2016-09-07 キヤノン株式会社 計測装置、計測方法及び光学部品の製造方法
WO2014165414A1 (en) * 2013-03-31 2014-10-09 Kla-Tencor Corporation Reducing registration error of front and back wafer surfaces utilizing a see-through calibration wafer
US20150077759A1 (en) * 2013-07-30 2015-03-19 University Of Rochester Compact, Slope Sensitive Optical Probe
US9222810B1 (en) 2013-09-19 2015-12-29 Sandia Corporation In situ calibration of a light source in a sensor device
JP6246875B1 (ja) * 2016-08-24 2017-12-13 Ckd株式会社 計測装置
CN110243289A (zh) * 2018-12-27 2019-09-17 桂林电子科技大学 一种实时云纹干涉图高速相位提取系统及提取方法
JP7296844B2 (ja) * 2019-10-08 2023-06-23 株式会社ミツトヨ 解析装置、解析方法、干渉測定システム、およびプログラム
DE102019215707A1 (de) * 2019-10-14 2021-04-15 Carl Zeiss Smt Gmbh Verfahren und Vorrichtung zur Charakterisierung der Oberflächenform eines optischen Elements
CN114235023B (zh) * 2021-11-18 2024-05-03 北京卫星制造厂有限公司 相移器在线标定方法及装置
CN117030207B (zh) * 2023-08-25 2024-03-08 茂莱（南京）仪器有限公司 一种激光干涉仪自动质评方法、装置、设备及介质

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2821685B2 (ja) 1989-04-27 1998-11-05 理化学研究所 ２次元情報取得装置
EP0561015A1 (de) * 1992-03-17 1993-09-22 International Business Machines Corporation Interferometrische Phasenmessung
JP2000329535A (ja) 1999-05-18 2000-11-30 Mitsutoyo Corp 位相シフト干渉縞の同時計測装置
US6304330B1 (en) 1999-10-06 2001-10-16 Metrolaser, Inc. Methods and apparatus for splitting, imaging, and measuring wavefronts in interferometry
JP3426552B2 (ja) * 2000-02-18 2003-07-14 株式会社ミツトヨ 形状計測装置
JP2002340538A (ja) * 2001-05-14 2002-11-27 Matsushita Electric Ind Co Ltd 薄板材の平坦度測定装置および方法
DE10249409B4 (de) * 2001-10-25 2007-09-20 Canon K.K. Interferometer und Positionsmessvorrichtung
AU2002364544A1 (en) 2001-12-10 2003-07-09 Zygo Corporation Method and apparatus for calibrating a wavelength-tuning interferometer
EP1411321B1 (de) * 2002-10-15 2017-04-19 Mitutoyo Corporation Interferometer mit integrierter Bildaufnahmematrix, Polarisator hoher dichte und Phasenverschiebungsmatrix
GB2401937B (en) * 2003-05-23 2006-07-19 Taylor Hobson Ltd Surface profiling apparatus
US6992778B2 (en) * 2003-08-08 2006-01-31 Mitutoyo Corporation Method and apparatus for self-calibration of a tunable-source phase shifting interferometer
US7212290B2 (en) * 2004-07-28 2007-05-01 Agilent Technologies, Inc. Differential interferometers creating desired beam patterns

Also Published As

Publication number Publication date
EP1717546B1 (de) 2008-10-01
EP1717546A1 (de) 2006-11-02
US20060250618A1 (en) 2006-11-09
US7511827B2 (en) 2009-03-31

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Legal Events

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