DE602006002448D1 - Vorrichtung zur Interferenzmessung - Google Patents
Vorrichtung zur InterferenzmessungInfo
- Publication number
- DE602006002448D1 DE602006002448D1 DE602006002448T DE602006002448T DE602006002448D1 DE 602006002448 D1 DE602006002448 D1 DE 602006002448D1 DE 602006002448 T DE602006002448 T DE 602006002448T DE 602006002448 T DE602006002448 T DE 602006002448T DE 602006002448 D1 DE602006002448 D1 DE 602006002448D1
- Authority
- DE
- Germany
- Prior art keywords
- interference measurement
- interference
- measurement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000005259 measurement Methods 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
- G01B9/02012—Interferometers characterised by controlling or generating intrinsic radiation properties using temporal intensity variation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
- G01B9/02007—Two or more frequencies or sources used for interferometric measurement
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
- G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
- G01B9/02018—Multipass interferometers, e.g. double-pass
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/0209—Low-coherence interferometers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/45—Multiple detectors for detecting interferometer signals
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/70—Using polarization in the interferometer
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005218981A JP4804058B2 (ja) | 2005-07-28 | 2005-07-28 | 干渉測定装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE602006002448D1 true DE602006002448D1 (de) | 2008-10-09 |
Family
ID=37193822
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE602006002448T Active DE602006002448D1 (de) | 2005-07-28 | 2006-07-21 | Vorrichtung zur Interferenzmessung |
Country Status (4)
Country | Link |
---|---|
US (1) | US7554671B2 (de) |
EP (1) | EP1748276B1 (de) |
JP (1) | JP4804058B2 (de) |
DE (1) | DE602006002448D1 (de) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4914040B2 (ja) * | 2005-07-28 | 2012-04-11 | キヤノン株式会社 | 干渉測定装置 |
ITMI20061792A1 (it) * | 2006-09-21 | 2008-03-22 | Milano Politecnico | Apparato di interferometria a bassa coerenza sensibile alla fase |
JP5188127B2 (ja) * | 2007-09-14 | 2013-04-24 | キヤノン株式会社 | 絶対位置の計測装置および計測方法 |
JP4995016B2 (ja) | 2007-09-14 | 2012-08-08 | キヤノン株式会社 | 絶対位置の計測装置及び計測方法 |
JP2009115486A (ja) * | 2007-11-02 | 2009-05-28 | National Institute Of Advanced Industrial & Technology | 低コヒーレンス干渉の合致法による長さ測定方法 |
JP5222954B2 (ja) * | 2007-11-13 | 2013-06-26 | ザイゴ コーポレーション | 偏光スキャンを利用した干渉計 |
JP4898639B2 (ja) * | 2007-11-22 | 2012-03-21 | キヤノン株式会社 | 絶対位置の計測装置及び計測方法 |
TWI384195B (zh) * | 2008-10-08 | 2013-02-01 | Ind Tech Res Inst | 振動位移與振動頻率決定方法與其裝置 |
JP5213730B2 (ja) * | 2009-01-14 | 2013-06-19 | キヤノン株式会社 | 調整方法 |
DE102009039703A1 (de) * | 2009-08-31 | 2011-03-17 | Siemens Aktiengesellschaft | Lichtsignal |
US9194694B2 (en) * | 2012-01-31 | 2015-11-24 | Nikon Corporation | Interferometer devices for determining initial position of a stage or the like |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63309804A (ja) * | 1987-06-11 | 1988-12-16 | Tokyo Seimitsu Co Ltd | レ−ザ干渉測定方法 |
US5127731A (en) * | 1991-02-08 | 1992-07-07 | Hughes Aircraft Company | Stabilized two-color laser diode interferometer |
JPH05149708A (ja) * | 1991-11-27 | 1993-06-15 | Jasco Corp | 二光束干渉計の基準位置決め方法及び装置 |
JPH07190712A (ja) * | 1993-12-27 | 1995-07-28 | Nikon Corp | 干渉計 |
JPH085314A (ja) * | 1994-06-20 | 1996-01-12 | Canon Inc | 変位測定方法及び変位測定装置 |
US5953124A (en) * | 1998-01-19 | 1999-09-14 | Zygo Corporation | Interferometric methods and systems using low coherence illumination |
JP3310945B2 (ja) * | 1999-03-11 | 2002-08-05 | 株式会社東京精密 | 非接触表面形状測定方法 |
JP2001076325A (ja) * | 1999-09-07 | 2001-03-23 | Canon Inc | 変位検出装置及び情報記録装置 |
DE10249409B4 (de) * | 2001-10-25 | 2007-09-20 | Canon K.K. | Interferometer und Positionsmessvorrichtung |
US6934035B2 (en) * | 2001-12-18 | 2005-08-23 | Massachusetts Institute Of Technology | System and method for measuring optical distance |
JP3921129B2 (ja) * | 2002-05-27 | 2007-05-30 | 富士通株式会社 | プリズムアレイ形状の計測方法および計測装置 |
JP4062606B2 (ja) * | 2003-01-20 | 2008-03-19 | フジノン株式会社 | 低可干渉測定/高可干渉測定共用干渉計装置およびその測定方法 |
JP4914040B2 (ja) * | 2005-07-28 | 2012-04-11 | キヤノン株式会社 | 干渉測定装置 |
JP2007225392A (ja) * | 2006-02-22 | 2007-09-06 | Spectratech Inc | 光干渉装置 |
-
2005
- 2005-07-28 JP JP2005218981A patent/JP4804058B2/ja active Active
-
2006
- 2006-07-21 EP EP06253842A patent/EP1748276B1/de not_active Expired - Fee Related
- 2006-07-21 DE DE602006002448T patent/DE602006002448D1/de active Active
- 2006-07-25 US US11/459,861 patent/US7554671B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US7554671B2 (en) | 2009-06-30 |
EP1748276A1 (de) | 2007-01-31 |
US20070024863A1 (en) | 2007-02-01 |
JP4804058B2 (ja) | 2011-10-26 |
JP2007033318A (ja) | 2007-02-08 |
EP1748276B1 (de) | 2008-08-27 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE602006003924D1 (de) | Vorrichtung zur Probenentnahme | |
DE602006011071D1 (de) | Vorrichtung zur Probenentnahme | |
DE602006002448D1 (de) | Vorrichtung zur Interferenzmessung | |
DE602006007950D1 (de) | Vorrichtung zur körperfettmessung | |
DE602005014902D1 (de) | Vorrichtung zur Kalibrierung des Werkzeugbezugspunktes | |
AT502901A3 (de) | Vorrichtung zur wasserstoffherstellung | |
DE602006007402D1 (de) | Vorrichtung zur Radzustandsbestimmung | |
DE602006007816D1 (de) | Vorrichtung zum depalletieren | |
DE602006019478D1 (de) | Lithografische vorrichtung | |
DE602007007219D1 (de) | Selements zur zeitmessung | |
DE602006016506D1 (de) | Vorrichtung zur elektrostatischen Beschichtung | |
DE602006000314D1 (de) | Vorrichtung zur Geräuschverstärkung | |
BRPI0615288A2 (pt) | dispositivo e método de medida de distância | |
EP1884756A4 (de) | Motor-messeinrichtung | |
DE602006006520D1 (de) | Vorrichtung zur Überwachung von Fahrzeugfehlern | |
DE602005015052D1 (de) | Vorrichtung zur Entwicklungsunterstützung | |
DE602006010131D1 (de) | Elektrochemische Vorrichtung | |
DE602006019024D1 (de) | Vorrichtung zur Messung von Magnetsignalen | |
DE602006001618D1 (de) | Vorrichtung zur optischen Tomographie | |
DE602005005604D1 (de) | Vorrichtung zur Aufprallerkennung | |
DE602006006359D1 (de) | Vorrichtung zur Erkennung von Antennenfehlern | |
DE502006007755D1 (de) | Vorrichtung zur Zwischenkühlung | |
DE602006002289D1 (de) | Vorrichtung zur Messung der Körperzusammensetzung | |
DE502005011174D1 (de) | Vorrichtung zur mukosaresektion | |
DE602006011633D1 (de) | Vorrichtung zur werkzeugausspannung |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |