NL1008665C1 - Mediumstroommeter. - Google Patents

Mediumstroommeter. Download PDF

Info

Publication number
NL1008665C1
NL1008665C1 NL1008665A NL1008665A NL1008665C1 NL 1008665 C1 NL1008665 C1 NL 1008665C1 NL 1008665 A NL1008665 A NL 1008665A NL 1008665 A NL1008665 A NL 1008665A NL 1008665 C1 NL1008665 C1 NL 1008665C1
Authority
NL
Netherlands
Prior art keywords
temperature
objects
medium
flow
zero
Prior art date
Application number
NL1008665A
Other languages
English (en)
Dutch (nl)
Inventor
Theodorus Simon Josp Lammerink
Original Assignee
Berkin Bv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Berkin Bv filed Critical Berkin Bv
Priority to NL1008665A priority Critical patent/NL1008665C1/nl
Priority to DK99200709T priority patent/DK0943900T3/da
Priority to AT99200709T priority patent/ATE377184T1/de
Priority to DE69937421T priority patent/DE69937421T2/de
Priority to EP99200709A priority patent/EP0943900B1/en
Priority to ES99200709T priority patent/ES2296365T3/es
Priority to JP11069946A priority patent/JPH11326003A/ja
Priority to US09/272,575 priority patent/US6370950B1/en
Application granted granted Critical
Publication of NL1008665C1 publication Critical patent/NL1008665C1/nl

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G01F1/698—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters
    • G01F1/699—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters by control of a separate heating or cooling element

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
  • Paper (AREA)
NL1008665A 1998-03-20 1998-03-20 Mediumstroommeter. NL1008665C1 (nl)

Priority Applications (8)

Application Number Priority Date Filing Date Title
NL1008665A NL1008665C1 (nl) 1998-03-20 1998-03-20 Mediumstroommeter.
DK99200709T DK0943900T3 (da) 1998-03-20 1999-03-10 Indretning til måling af en strömning af et medium
AT99200709T ATE377184T1 (de) 1998-03-20 1999-03-10 Vorrichtung zur messung eines mediumflusses
DE69937421T DE69937421T2 (de) 1998-03-20 1999-03-10 Vorrichtung zur Messung eines Mediumflusses
EP99200709A EP0943900B1 (en) 1998-03-20 1999-03-10 Medium flow meter
ES99200709T ES2296365T3 (es) 1998-03-20 1999-03-10 Dispositivo medidor del flujo de un medio.
JP11069946A JPH11326003A (ja) 1998-03-20 1999-03-16 媒体流量計
US09/272,575 US6370950B1 (en) 1998-03-20 1999-03-19 Medium flow meter

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
NL1008665 1998-03-20
NL1008665A NL1008665C1 (nl) 1998-03-20 1998-03-20 Mediumstroommeter.
US27257599 1999-03-19
US09/272,575 US6370950B1 (en) 1998-03-20 1999-03-19 Medium flow meter

Publications (1)

Publication Number Publication Date
NL1008665C1 true NL1008665C1 (nl) 1999-09-21

Family

ID=26642782

Family Applications (1)

Application Number Title Priority Date Filing Date
NL1008665A NL1008665C1 (nl) 1998-03-20 1998-03-20 Mediumstroommeter.

Country Status (8)

Country Link
US (1) US6370950B1 (ja)
EP (1) EP0943900B1 (ja)
JP (1) JPH11326003A (ja)
AT (1) ATE377184T1 (ja)
DE (1) DE69937421T2 (ja)
DK (1) DK0943900T3 (ja)
ES (1) ES2296365T3 (ja)
NL (1) NL1008665C1 (ja)

Families Citing this family (41)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003052355A1 (fr) * 2001-12-14 2003-06-26 Mitsubishi Denki Kabushiki Kaisha Debitmetre
JP3969167B2 (ja) * 2002-04-22 2007-09-05 三菱電機株式会社 流体流量測定装置
US6617175B1 (en) * 2002-05-08 2003-09-09 Advanced Technology Materials, Inc. Infrared thermopile detector system for semiconductor process monitoring and control
US7129519B2 (en) * 2002-05-08 2006-10-31 Advanced Technology Materials, Inc. Monitoring system comprising infrared thermopile detector
US6736005B2 (en) * 2002-05-28 2004-05-18 Mcmillan Company High accuracy measuring and control of low fluid flow rates
JP3650384B2 (ja) 2002-08-29 2005-05-18 三菱電機株式会社 熱式流量検出装置
US7080545B2 (en) * 2002-10-17 2006-07-25 Advanced Technology Materials, Inc. Apparatus and process for sensing fluoro species in semiconductor processing systems
WO2004088415A2 (en) * 2003-03-28 2004-10-14 Advanced Technology Materials Inc. Photometrically modulated delivery of reagents
US7063097B2 (en) * 2003-03-28 2006-06-20 Advanced Technology Materials, Inc. In-situ gas blending and dilution system for delivery of dilute gas at a predetermined concentration
NL1023405C2 (nl) * 2003-05-13 2004-11-18 Berkin Bv Massadebietmeter.
US20060211253A1 (en) * 2005-03-16 2006-09-21 Ing-Shin Chen Method and apparatus for monitoring plasma conditions in an etching plasma processing facility
US20100224264A1 (en) * 2005-06-22 2010-09-09 Advanced Technology Materials, Inc. Apparatus and process for integrated gas blending
DE102005057687A1 (de) * 2005-12-01 2007-06-06 Endress + Hauser Flowtec Ag Vorrichtung zur Bestimmung und/oder Überwachung des Massedurchflusses eines fluiden Mediums
DE602006019688D1 (de) * 2006-03-31 2011-03-03 Sensirion Holding Ag Durchflusssensor mit durchflussanpassbarem Analog-Digital-Wandler
DE602006019548D1 (de) * 2006-03-31 2011-02-24 Sensirion Holding Ag Durchflusssensor mit Thermoelementen
US20080006775A1 (en) * 2006-06-22 2008-01-10 Arno Jose I Infrared gas detection systems and methods
EP1965179B1 (en) * 2007-02-28 2017-04-12 Sensirion Holding AG Flow detector device with self check
DE202007003027U1 (de) * 2007-03-01 2007-06-21 Sensirion Ag Vorrichtung zur Handhabung von Fluiden mit einem Flußsensor
US7874208B2 (en) * 2007-10-10 2011-01-25 Brooks Instrument, Llc System for and method of providing a wide-range flow controller
EP2187182B1 (en) * 2008-11-12 2015-08-05 Sensirion AG Method for operating a flow sensor being repetitively subjected to a thermal and/or chemical cleaning treatment, and flow measuring device
JP5282584B2 (ja) * 2009-01-20 2013-09-04 いすゞ自動車株式会社 エンジン排気管内に燃料を噴射する装置及び噴射量の測定方法
US9340878B2 (en) 2009-05-29 2016-05-17 Entegris, Inc. TPIR apparatus for monitoring tungsten hexafluoride processing to detect gas phase nucleation, and method and system utilizing same
DE102009060302A1 (de) * 2009-12-23 2011-06-30 Truma Gerätetechnik GmbH & Co. KG, 85640 Gaszuführungsvorrichtung mit Massendurchflusssensor
US11608618B2 (en) 2011-01-03 2023-03-21 Sentinel Hydrosolutions, Llc Thermal dispersion flow meter with fluid leak detection and freeze burst prevention
US9146172B2 (en) * 2011-01-03 2015-09-29 Sentinel Hydrosolutions, Llc Non-invasive thermal dispersion flow meter with chronometric monitor for fluid leak detection
US11814821B2 (en) 2011-01-03 2023-11-14 Sentinel Hydrosolutions, Llc Non-invasive thermal dispersion flow meter with fluid leak detection and geo-fencing control
NL2006895C2 (nl) 2011-06-03 2012-12-04 Berkin Bv Stromingsmeetapparaat en gebruik daarvan voor het bepalen van een stroming van een medium, alsmede werkwijze daarvoor.
DE102012001060A1 (de) * 2011-10-24 2013-04-25 Hydrometer Gmbh Verfahren zur Korrektur von Offset-Drift-Effekten einer thermischen Messeinrichtung, thermische Messeinrichtung und Gasdurchflussmessgerät
CA2899850A1 (en) * 2013-02-08 2014-08-14 Provtagaren Ab Enhanced differential thermal mass flow meter assembly and methods for measuring a mass flow using said mass flow meter assembly
DE102013106863A1 (de) 2013-07-01 2015-01-08 Aixtron Se Vorrichtung zum Bestimmen des Massenflusses eines in einem Trägergas transportierten Dampfs
DE102013114486A1 (de) * 2013-12-19 2015-06-25 Innovative Sensor Technology Ist Ag Vorrichtung und Verfahren zum Bestimmen des Durchflusses eines Mediums
JP5680178B1 (ja) * 2013-12-26 2015-03-04 三菱電機株式会社 流量センサおよび内燃機関の制御システム
DE102014101792A1 (de) 2014-02-13 2015-08-13 Aixtron Se Vorrichtung zum Bestimmen des Massenflusses eines Gases beziehungsweise Gasgemisches mit ineinandergeschachtelten rohrförmigen Filamentanordnungen
JP6225766B2 (ja) * 2014-03-13 2017-11-08 オムロン株式会社 内部温度測定方法及び内部温度測定装置
DE102014119223B3 (de) * 2014-12-19 2016-03-31 Endress + Hauser Flowtec Ag Thermisches Durchflussmessgerät mit Diagnosefunktion
EP2930475B1 (en) 2014-12-22 2017-11-15 Sensirion AG Flow sensor arrangement
US10151772B2 (en) * 2015-01-23 2018-12-11 Embry-Riddle Aeronautical Univeristy, Inc. Hot wire anemometer
WO2018047836A1 (ja) * 2016-09-08 2018-03-15 株式会社村田製作所 風速測定装置および風量測定装置
WO2018047385A1 (ja) * 2016-09-08 2018-03-15 株式会社村田製作所 風速測定装置および風量測定装置
DE102018208140B3 (de) 2018-05-24 2019-06-13 Continental Automotive Gmbh Pumpenvorrichtung und Verfahren zum Ermitteln eines Kühlmittelmassenstroms durch eine Pumpenvorrichtung einer Brennkraftmaschine
EP3933352A1 (de) 2020-07-01 2022-01-05 Sick Ag Thermische durchflussmessung

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4319483A (en) * 1980-02-25 1982-03-16 Texas Instruments Incorporated Method of automated fluid flow measurement
US4332157A (en) * 1980-08-29 1982-06-01 Trustees Of The University Of Pennsylvania Pyroelectric anemometer
US4480467A (en) * 1982-11-29 1984-11-06 Hyperion, Inc. Flow monitoring device
DE3248603A1 (de) * 1982-12-30 1984-07-12 Robert Bosch Gmbh, 7000 Stuttgart Einrichtung zur messung des massendurchsatzes eines stroemenden mediums
US4527427A (en) * 1983-02-12 1985-07-09 Robert Bosch Gmbh Device for determining the flow rate of a flowing medium
EP0134859A1 (en) * 1983-09-21 1985-03-27 Honeywell Inc. Fluid flow sensors
DE3444347A1 (de) * 1984-12-05 1986-06-12 Robert Bosch Gmbh, 7000 Stuttgart Vorrichtung zur luftmengenmessung
JP2631481B2 (ja) * 1987-12-08 1997-07-16 株式会社 リンテック 質量流量計とその計測方法
US5187674A (en) * 1989-12-28 1993-02-16 Honeywell Inc. Versatile, overpressure proof, absolute pressure sensor
US5218866A (en) * 1991-02-19 1993-06-15 The United States Of America As Represented By The Secretary Of The Army Method and device for measuring fluid velocities
JPH07111367B2 (ja) * 1991-02-26 1995-11-29 ディーエクスエル・インターナショナル・インコーポレーテッド 流量センサおよびその検査方法
JP3310430B2 (ja) * 1993-11-26 2002-08-05 株式会社半導体エネルギー研究所 計測装置および計測方法
JP3226715B2 (ja) * 1994-04-28 2001-11-05 株式会社半導体エネルギー研究所 計測装置
US5515714A (en) * 1994-11-17 1996-05-14 General Motors Corporation Vapor composition and flow sensor
JPH0989619A (ja) * 1995-07-19 1997-04-04 Ricoh Co Ltd 感熱式流量計
KR970059713A (ko) * 1996-01-17 1997-08-12 가나이 쯔도무 발열 저항체 타입 공기 유속 측정 장치
US5852239A (en) * 1996-06-12 1998-12-22 Ricoh Company, Ltd. Flow sensor having an intermediate heater between two temperature-sensing heating portions

Also Published As

Publication number Publication date
ES2296365T3 (es) 2008-04-16
DE69937421D1 (de) 2007-12-13
DE69937421T2 (de) 2008-08-21
ATE377184T1 (de) 2007-11-15
EP0943900A1 (en) 1999-09-22
JPH11326003A (ja) 1999-11-26
DK0943900T3 (da) 2008-02-18
US20020043104A1 (en) 2002-04-18
EP0943900B1 (en) 2007-10-31
US6370950B1 (en) 2002-04-16

Similar Documents

Publication Publication Date Title
NL1008665C1 (nl) Mediumstroommeter.
Sosna et al. A temperature compensation circuit for thermal flow sensors operated in constant-temperature-difference mode
NL1014797C2 (nl) Massadebietmeter.
US8302471B2 (en) Calorimetric flow meter having high heat conductivity strips
US7140263B2 (en) Anemometer circuit
NL1025617C2 (nl) Massadebietmeter.
JP2002500346A (ja) 自励発振流体センサ
NL2006895C2 (nl) Stromingsmeetapparaat en gebruik daarvan voor het bepalen van een stroming van een medium, alsmede werkwijze daarvoor.
Lammerink et al. A new class of thermal flow sensors using/spl Delta/T= 0 as a control signal
US4566320A (en) Fluid flow sensing means with ambient temperature compensation
US4107991A (en) Resistance bridge-type flowmeter
GB2297164A (en) Arrangement for measuring the through-flow in a fluid channel
US6539791B1 (en) Method and apparatus for measuring flow based on heat transfer from a flowing medium
SE433007B (sv) Anordning for detektering av forekomsten av en oblandbar fremmande vetska pa ytan av en annan vetska
Arifuzzman et al. A low-power thermal-based sensor system for low air flow detection
JP3381831B2 (ja) 流速センサ及び流速計測方法
JPH09318412A (ja) 熱式流速センサ
JP2879256B2 (ja) 熱式流量計
Clocker et al. A fully-integrated, single-element CMOS anemometer
Pawlowski Thermal heat-balance mode Flow-to-Frequency Converter
Wijngaards et al. Study on temperature stability improvement of on-chip reference elements using integrated Peltier coolers
JPH11148945A (ja) 流速センサ及び流速測定装置
JPS628019A (ja) 低温液化ガス液面検出センサ
JPH11118567A (ja) フローセンサ
JPH09257821A (ja) 流速センサ

Legal Events

Date Code Title Description
VD2 Discontinued due to expiration of the term of protection

Effective date: 20040320