NL1006378C2 - Werkwijze en inrichting voor het inspecteren van een voorwerp met betrekking tot verstoringen. - Google Patents

Werkwijze en inrichting voor het inspecteren van een voorwerp met betrekking tot verstoringen. Download PDF

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Publication number
NL1006378C2
NL1006378C2 NL1006378A NL1006378A NL1006378C2 NL 1006378 C2 NL1006378 C2 NL 1006378C2 NL 1006378 A NL1006378 A NL 1006378A NL 1006378 A NL1006378 A NL 1006378A NL 1006378 C2 NL1006378 C2 NL 1006378C2
Authority
NL
Netherlands
Prior art keywords
scanning
disturbance
light
light beam
response signals
Prior art date
Application number
NL1006378A
Other languages
English (en)
Dutch (nl)
Inventor
Antonius Ludovicus Valkenburg
Original Assignee
Tno
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tno filed Critical Tno
Priority to NL1006378A priority Critical patent/NL1006378C2/nl
Priority to PCT/NL1998/000356 priority patent/WO1998059236A1/fr
Priority to JP50421199A priority patent/JP2002506526A/ja
Priority to EP98931128A priority patent/EP0991935A1/fr
Priority to AU81328/98A priority patent/AU8132898A/en
Priority to US09/446,305 priority patent/US6346713B1/en
Application granted granted Critical
Publication of NL1006378C2 publication Critical patent/NL1006378C2/nl

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8854—Grading and classifying of flaws
    • G01N2021/8861—Determining coordinates of flaws
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N2021/8925—Inclusions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/065—Integrating spheres

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
NL1006378A 1997-06-23 1997-06-23 Werkwijze en inrichting voor het inspecteren van een voorwerp met betrekking tot verstoringen. NL1006378C2 (nl)

Priority Applications (6)

Application Number Priority Date Filing Date Title
NL1006378A NL1006378C2 (nl) 1997-06-23 1997-06-23 Werkwijze en inrichting voor het inspecteren van een voorwerp met betrekking tot verstoringen.
PCT/NL1998/000356 WO1998059236A1 (fr) 1997-06-23 1998-06-22 Procede et dispositif servant a inspecter un article afin de rechercher des defauts
JP50421199A JP2002506526A (ja) 1997-06-23 1998-06-22 欠陥に関して品物を検査するための方法および装置
EP98931128A EP0991935A1 (fr) 1997-06-23 1998-06-22 Procede et dispositif servant a inspecter un article afin de rechercher des defauts
AU81328/98A AU8132898A (en) 1997-06-23 1998-06-22 Method and installation for inspecting an article for defects
US09/446,305 US6346713B1 (en) 1997-06-23 1998-06-22 Method and installation for inspecting an article for defects

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL1006378 1997-06-23
NL1006378A NL1006378C2 (nl) 1997-06-23 1997-06-23 Werkwijze en inrichting voor het inspecteren van een voorwerp met betrekking tot verstoringen.

Publications (1)

Publication Number Publication Date
NL1006378C2 true NL1006378C2 (nl) 1998-12-24

Family

ID=19765209

Family Applications (1)

Application Number Title Priority Date Filing Date
NL1006378A NL1006378C2 (nl) 1997-06-23 1997-06-23 Werkwijze en inrichting voor het inspecteren van een voorwerp met betrekking tot verstoringen.

Country Status (6)

Country Link
US (1) US6346713B1 (fr)
EP (1) EP0991935A1 (fr)
JP (1) JP2002506526A (fr)
AU (1) AU8132898A (fr)
NL (1) NL1006378C2 (fr)
WO (1) WO1998059236A1 (fr)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AUPQ262299A0 (en) * 1999-09-02 1999-09-23 Resolve Engineering Pty Ltd Detection of inclusions in glass
JP4752160B2 (ja) * 2001-09-13 2011-08-17 パナソニック株式会社 プラズマディスプレイパネルの製造方法
DE10316707B4 (de) * 2003-04-04 2006-04-27 Schott Ag Verfahren und Vorrichtung zur Erkennung von Fehlern in transparentem Material
US20080212086A1 (en) * 2005-12-06 2008-09-04 I. C. Technologies, Inc. Packaging Material Inspection Machine
US7652755B2 (en) * 2007-02-23 2010-01-26 Yan Liu Apparatus and method for color measurement and color grading of diamonds, gemstones and the like
US8374398B2 (en) * 2008-10-14 2013-02-12 Bell and Howell, LLC. Linear image lift array for transported material
JP2010122145A (ja) * 2008-11-21 2010-06-03 Takano Co Ltd シリコンウェハ欠陥検査装置
JP5938981B2 (ja) * 2011-12-22 2016-06-22 岩崎電気株式会社 投射システム
JP2017523312A (ja) * 2014-05-16 2017-08-17 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 基板上の材料を処理するための装置、及び基板上で処理される材料の光学特性を測定するための方法
ES2895108T3 (es) * 2015-07-28 2022-02-17 Antares Vision S P A Máquina y método para inspeccionar la conformidad de productos
JP2019082496A (ja) * 2019-03-11 2019-05-30 列真株式会社 欠陥検査装置
JP7451227B2 (ja) * 2020-02-28 2024-03-18 日東電工株式会社 光透過性積層体の検査方法
JP2023031371A (ja) * 2021-08-25 2023-03-09 日東電工株式会社 光透過性積層体の検査方法および検査装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0146005A2 (fr) * 1983-11-26 1985-06-26 Kabushiki Kaisha Toshiba Appareil pour la détection de défauts de surface
EP0327425A1 (fr) * 1988-01-27 1989-08-09 Commissariat A L'energie Atomique Procédé de microscopie optique confocale à balayage et en profondeur de champ étendue et dispositifs pour la mise en oeuvre du procédé
DE3926349A1 (de) * 1989-08-09 1991-02-14 Sick Optik Elektronik Erwin Optische fehlerinspektionsvorrichtung

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4378159A (en) * 1981-03-30 1983-03-29 Tencor Instruments Scanning contaminant and defect detector
DE19511287B4 (de) 1994-07-21 2004-05-06 Continental Teves Ag & Co. Ohg Elektromechanische betätigbare Scheibenbremse

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0146005A2 (fr) * 1983-11-26 1985-06-26 Kabushiki Kaisha Toshiba Appareil pour la détection de défauts de surface
EP0327425A1 (fr) * 1988-01-27 1989-08-09 Commissariat A L'energie Atomique Procédé de microscopie optique confocale à balayage et en profondeur de champ étendue et dispositifs pour la mise en oeuvre du procédé
DE3926349A1 (de) * 1989-08-09 1991-02-14 Sick Optik Elektronik Erwin Optische fehlerinspektionsvorrichtung

Also Published As

Publication number Publication date
JP2002506526A (ja) 2002-02-26
US6346713B1 (en) 2002-02-12
AU8132898A (en) 1999-01-04
EP0991935A1 (fr) 2000-04-12
WO1998059236A1 (fr) 1998-12-30

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PD2B A search report has been drawn up
VD1 Lapsed due to non-payment of the annual fee

Effective date: 20050101