MY168267A - Method for manufacturing magnetic-disk substrate, and polishing pad used in manufacture of magnetic-disk substrate - Google Patents
Method for manufacturing magnetic-disk substrate, and polishing pad used in manufacture of magnetic-disk substrateInfo
- Publication number
- MY168267A MY168267A MYPI2015702569A MYPI2015702569A MY168267A MY 168267 A MY168267 A MY 168267A MY PI2015702569 A MYPI2015702569 A MY PI2015702569A MY PI2015702569 A MYPI2015702569 A MY PI2015702569A MY 168267 A MY168267 A MY 168267A
- Authority
- MY
- Malaysia
- Prior art keywords
- magnetic
- substrate
- disk substrate
- polishing pads
- polishing
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
- G11B5/8404—Processes or apparatus specially adapted for manufacturing record carriers manufacturing base layers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
- B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
Abstract
METHOD FOR MANUFACTURING MAGNETIC-DISK SUBSTRATE, AND POLISHING PAD USED IN MANUFACTURE OF MAGNETIC-DISK SUBSTRATE In order to reduce a root mean square roughness Rq of microwaviness having a wavelength from 50 to 200 μm on a main surface of a glass substrate, a method for manufacturing a magnetic-disk substrate includes polishing both main surfaces of a substrate by sandwiching the substrate with a pair of polishing pads, supplying a slurry containing polishing abrasive particles between the polishing pads and the substrate, and sliding the polishing pads and the substrate relative to each other. The polishing pads respectively have a resin foam layer having a plurality of openings in a surface. When information on a three-dimensional shape of a surface of the polishing pads is obtained from captured images of the surface of the polishing pads, and an arithmetic mean roughness Ra of the surface of the polishing pads is derived from the information on the three-dimensional shape, the Ra is 0.5 μm or less. (FIG. 4)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013023575 | 2013-02-08 |
Publications (1)
Publication Number | Publication Date |
---|---|
MY168267A true MY168267A (en) | 2018-10-17 |
Family
ID=51299826
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
MYPI2018000692A MY195662A (en) | 2013-02-08 | 2014-02-07 | Method for Manufacturing Magnetic-Disk Substrate, and Polishing Pad |
MYPI2015702569A MY168267A (en) | 2013-02-08 | 2014-02-07 | Method for manufacturing magnetic-disk substrate, and polishing pad used in manufacture of magnetic-disk substrate |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
MYPI2018000692A MY195662A (en) | 2013-02-08 | 2014-02-07 | Method for Manufacturing Magnetic-Disk Substrate, and Polishing Pad |
Country Status (5)
Country | Link |
---|---|
JP (2) | JP6039698B2 (en) |
CN (2) | CN108564969B (en) |
MY (2) | MY195662A (en) |
SG (2) | SG10201708325TA (en) |
WO (1) | WO2014123236A1 (en) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
MY182511A (en) * | 2014-10-14 | 2021-01-25 | Hoya Corp | Method for manufacturing magnetic-disk substrate, method for manufacturing magnetic disk, raw material for polishing pad, and method for manufacturing substrate |
JP6809779B2 (en) * | 2015-08-25 | 2021-01-06 | 株式会社フジミインコーポレーテッド | Polishing pads, polishing pad conditioning methods, pad conditioning agents, their use |
KR101674539B1 (en) * | 2015-10-15 | 2016-11-09 | 주식회사 이오테크닉스 | Laser processing system, picker apparatus and method for transporting workpieces using the same |
JP6236191B1 (en) * | 2016-03-31 | 2017-11-22 | Hoya株式会社 | Carrier and method of manufacturing substrate using the carrier |
CN109108763A (en) * | 2018-09-26 | 2019-01-01 | 湖州练市飞迪电器塑料有限公司 | A kind of ironware edging device that accuracy is high |
US20210323115A1 (en) * | 2020-04-18 | 2021-10-21 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Leveraged poromeric polishing pad |
JP7003178B2 (en) * | 2020-04-21 | 2022-01-20 | Hoya株式会社 | Manufacturing method of disk-shaped glass substrate, manufacturing method of thin glass substrate, manufacturing method of light guide plate and disk-shaped glass substrate |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5708633A (en) * | 1995-06-07 | 1998-01-13 | Discovision Associates | Method and apparatus for manufacturing information storage devices |
JP2002092867A (en) * | 2000-09-21 | 2002-03-29 | Hoya Corp | Method of manufacturing glass substrate for information recording medium and method of manufacturing information recording medium |
US6790509B2 (en) * | 2000-10-19 | 2004-09-14 | Hoya Corporation | Substrate for information recording medium, information recording medium, and method for controlling surface of substrate for information recording medium |
JP4659338B2 (en) * | 2003-02-12 | 2011-03-30 | Hoya株式会社 | Manufacturing method of glass substrate for information recording medium and polishing pad used therefor |
JP4199645B2 (en) * | 2003-11-07 | 2008-12-17 | Hoya株式会社 | Method for manufacturing glass substrate for magnetic disk and method for manufacturing magnetic disk |
JP4190398B2 (en) * | 2003-11-19 | 2008-12-03 | Hoya株式会社 | Manufacturing method of glass substrate for magnetic disk and manufacturing method of magnetic disk |
JP5008350B2 (en) * | 2006-07-05 | 2012-08-22 | 花王株式会社 | Polishing liquid composition for glass substrate |
DE112007002066B4 (en) * | 2006-09-06 | 2019-10-17 | Nitta Haas Inc. | polishing pad |
JP5332249B2 (en) * | 2007-06-05 | 2013-11-06 | 旭硝子株式会社 | Glass substrate polishing method |
US7841069B2 (en) * | 2007-08-30 | 2010-11-30 | International Business Machines Corporation | Method for manufacturing a thin closure magnetic head |
WO2009084534A1 (en) * | 2007-12-28 | 2009-07-09 | Hoya Corporation | Magnetic disk glass substrate, magnetic disk, and magnetic disk manufacturing method |
US8895165B2 (en) * | 2008-09-10 | 2014-11-25 | Hoya Corporation | Method of manufacturing a glass substrate for a magnetic disk, glass substrate for a magnetic disk, method of manufacturing a magnetic disk, and magnetic disk |
JP5544131B2 (en) * | 2009-09-03 | 2014-07-09 | 富士紡ホールディングス株式会社 | Polishing pad |
JP5853408B2 (en) * | 2011-05-09 | 2016-02-09 | 旭硝子株式会社 | Manufacturing method of glass substrate for magnetic recording medium and glass substrate for magnetic recording medium |
-
2014
- 2014-02-07 CN CN201810357734.3A patent/CN108564969B/en active Active
- 2014-02-07 SG SG10201708325TA patent/SG10201708325TA/en unknown
- 2014-02-07 CN CN201480007088.8A patent/CN104969292B/en active Active
- 2014-02-07 MY MYPI2018000692A patent/MY195662A/en unknown
- 2014-02-07 MY MYPI2015702569A patent/MY168267A/en unknown
- 2014-02-07 WO PCT/JP2014/052970 patent/WO2014123236A1/en active Application Filing
- 2014-02-07 JP JP2014560829A patent/JP6039698B2/en active Active
- 2014-02-07 SG SG11201506222QA patent/SG11201506222QA/en unknown
-
2016
- 2016-11-04 JP JP2016215880A patent/JP6184577B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
SG10201708325TA (en) | 2017-11-29 |
JPWO2014123236A1 (en) | 2017-02-02 |
JP6184577B2 (en) | 2017-08-23 |
MY195662A (en) | 2023-02-03 |
CN104969292A (en) | 2015-10-07 |
JP6039698B2 (en) | 2016-12-07 |
CN104969292B (en) | 2018-06-05 |
JP2017037701A (en) | 2017-02-16 |
WO2014123236A1 (en) | 2014-08-14 |
CN108564969B (en) | 2019-08-23 |
SG11201506222QA (en) | 2015-09-29 |
CN108564969A (en) | 2018-09-21 |
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