MY183298A - Method for manufacturing magnetic-disk substrate and method for manufacturing magnetic disk - Google Patents
Method for manufacturing magnetic-disk substrate and method for manufacturing magnetic diskInfo
- Publication number
- MY183298A MY183298A MYPI2017701168A MYPI2017701168A MY183298A MY 183298 A MY183298 A MY 183298A MY PI2017701168 A MYPI2017701168 A MY PI2017701168A MY PI2017701168 A MYPI2017701168 A MY PI2017701168A MY 183298 A MY183298 A MY 183298A
- Authority
- MY
- Malaysia
- Prior art keywords
- substrate
- polishing pads
- polishing
- coolant
- manufacturing magnetic
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
Abstract
A method for manufacturing a magnetic-disk substrate includes polishing processing in which a substrate is sandwiched between a pair of suede polishing pads, a slurry containing polishing abrasive particles is supplied between the polishing pads and the substrate, and both main surfaces of the substrate are polished by sliding the polishing pads and the substrate relative to each other. Before the polishing processing is performed on the substrate, dressing treatment for removing surfaces of the polishing pads is performed on the polishing pads by sliding a dresser and the polishing pads relative to each other while a coolant is supplied to the surfaces of the polishing pads provided on surface plates. In the dressing treatment, a temperature of the coolant or a coolant supply amount per unit time is controlled such that an amount of heat that the coolant draws from the polishing pads is made larger at the time at which the dressing treatment ends than at the time at which the dressing treatment starts.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014229717 | 2014-11-12 | ||
PCT/JP2015/081903 WO2016076404A1 (en) | 2014-11-12 | 2015-11-12 | Method for manufacturing magnetic disk substrate and method for manufacturing magnetic disk |
Publications (1)
Publication Number | Publication Date |
---|---|
MY183298A true MY183298A (en) | 2021-02-18 |
Family
ID=55954481
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
MYPI2017701168A MY183298A (en) | 2014-11-12 | 2015-11-12 | Method for manufacturing magnetic-disk substrate and method for manufacturing magnetic disk |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP6181325B2 (en) |
CN (1) | CN107077865B (en) |
MY (1) | MY183298A (en) |
SG (1) | SG11201702803SA (en) |
WO (1) | WO2016076404A1 (en) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI834812B (en) * | 2019-02-15 | 2024-03-11 | 日商東洋鋼鈑股份有限公司 | Method for manufacturing substrate for hard disk |
JP7306234B2 (en) * | 2019-11-19 | 2023-07-11 | 株式会社Sumco | Wafer polishing method and silicon wafer |
CN111367169A (en) * | 2020-02-07 | 2020-07-03 | 大连富士冰山智控系统有限公司 | Control system, control device, and control method |
CN115284161B (en) * | 2022-07-04 | 2024-03-01 | 上海中欣晶圆半导体科技有限公司 | Abrasive disc processing method for reducing TTV of wafer |
CN115256233A (en) * | 2022-08-18 | 2022-11-01 | 福建晶安光电有限公司 | Disc surface finishing process of double-sided grinding machine table |
CN116749080B (en) * | 2023-08-18 | 2023-11-14 | 浙江求是半导体设备有限公司 | Dressing method |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007144564A (en) * | 2005-11-28 | 2007-06-14 | Ebara Corp | Polishing device |
US8613206B2 (en) * | 2006-03-24 | 2013-12-24 | Hoya Corporation | Method for manufacturing glass substrate for magnetic disk and method for manufacturing magnetic disk |
JP2009154232A (en) * | 2007-12-26 | 2009-07-16 | Hoya Corp | Method of manufacturing glass substrate for magnetic disk |
JP5056961B2 (en) * | 2010-02-01 | 2012-10-24 | 旭硝子株式会社 | Glass substrate for magnetic recording medium and method for manufacturing the same |
DE102011003006B4 (en) * | 2011-01-21 | 2013-02-07 | Siltronic Ag | A method for providing each a level working layer on each of the two working wheels of a double-sided processing device |
JP2012033265A (en) * | 2011-11-14 | 2012-02-16 | Asahi Glass Co Ltd | Glass substrate for magnetic recording medium and manufacturing method thereof |
-
2015
- 2015-11-12 WO PCT/JP2015/081903 patent/WO2016076404A1/en active Application Filing
- 2015-11-12 SG SG11201702803SA patent/SG11201702803SA/en unknown
- 2015-11-12 MY MYPI2017701168A patent/MY183298A/en unknown
- 2015-11-12 JP JP2016559110A patent/JP6181325B2/en active Active
- 2015-11-12 CN CN201580055296.XA patent/CN107077865B/en active Active
Also Published As
Publication number | Publication date |
---|---|
CN107077865A (en) | 2017-08-18 |
CN107077865B (en) | 2018-10-02 |
JPWO2016076404A1 (en) | 2017-08-31 |
SG11201702803SA (en) | 2017-06-29 |
JP6181325B2 (en) | 2017-08-16 |
WO2016076404A1 (en) | 2016-05-19 |
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