MY168569A - Method of manufacturing a substrate, method of manufacturing a magnetic disk glass substrate and method of manufacturing a magnetic disk - Google Patents
Method of manufacturing a substrate, method of manufacturing a magnetic disk glass substrate and method of manufacturing a magnetic diskInfo
- Publication number
- MY168569A MY168569A MYPI2012701288A MYPI2012701288A MY168569A MY 168569 A MY168569 A MY 168569A MY PI2012701288 A MYPI2012701288 A MY PI2012701288A MY PI2012701288 A MYPI2012701288 A MY PI2012701288A MY 168569 A MY168569 A MY 168569A
- Authority
- MY
- Malaysia
- Prior art keywords
- substrate
- manufacturing
- magnetic disk
- polishing
- slurry
- Prior art date
Links
Landscapes
- Manufacturing Of Magnetic Record Carriers (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
Provided is a substrate manufacturing method which is simple and can manufacture, at a low cost, a high-quality substrate with high cleanliness and few defects that can be suitably used as a next-generation substrate (7) for a magnetic disk of which the requirement for the substrate surface quality is still stricter than the current requirement. The substrate manufacturing method is a method of manufacturing a substrate (7) suitable, for example, as a glass substrate for a magnetic disk and includes a polishing treatment of using a slurry (9) containing polishing abrasive particles and a surface plate (1, 3) with a pair of polishing pads (2), supplying the slurry (9) between each of the polishing pads (2) and the substrate (7), and polishing the main surfaces of the substrate (7) sandwiched between the polishing pads (2); and a rinsing treatment of, after the polishing treatment, treating the main surfaces of the substrate (7) under the conditions that a processing pressure is 2kPa to 6kPa, an abrasive particle concentration in a slurry (9) is more than 0 (zero) and not more than 5wt%, and a slurry flow rate is 0.25ml/min/cm2 to 5ml/min/cm2. (Fig. 1)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011290472 | 2011-12-30 |
Publications (1)
Publication Number | Publication Date |
---|---|
MY168569A true MY168569A (en) | 2018-11-13 |
Family
ID=48926784
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
MYPI2012701288A MY168569A (en) | 2011-12-30 | 2012-12-27 | Method of manufacturing a substrate, method of manufacturing a magnetic disk glass substrate and method of manufacturing a magnetic disk |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP6141636B2 (en) |
CN (1) | CN103247304B (en) |
MY (1) | MY168569A (en) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SG10201901283XA (en) * | 2013-09-28 | 2019-03-28 | Hoya Corp | Method for manufacturing magnetic-disk glass substrate, methodfor manufacturing magnetic disk, and grinding tool |
JP6280561B2 (en) * | 2013-11-15 | 2018-02-14 | Hoya株式会社 | Manufacturing method of glass substrate for magnetic disk and manufacturing method of magnetic disk |
CN104536165B (en) * | 2014-12-05 | 2017-09-01 | 深圳市华星光电技术有限公司 | The machine table of display device and the processing method of glass substrate |
WO2016129215A1 (en) * | 2015-02-12 | 2016-08-18 | 株式会社フジミインコーポレーテッド | Method for polishing silicon wafer and surface treatment composition |
US10748778B2 (en) | 2015-02-12 | 2020-08-18 | Fujimi Incorporated | Method for polishing silicon wafer and surface treatment composition |
US11471993B2 (en) * | 2018-03-09 | 2022-10-18 | Hoya Corporation | Spacer, laminate of substrates, method for manufacturing substrate, and method for manufacturing substrate for magnetic disk |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0778874B2 (en) * | 1990-12-12 | 1995-08-23 | 株式会社神戸製鋼所 | Texture processing method for amorphous carbon substrate for magnetic disk |
JPH05314474A (en) * | 1992-05-08 | 1993-11-26 | Hitachi Ltd | Magnetic disk and surface processing thereof and magnetic disk apparatus |
JPH10143858A (en) * | 1996-11-07 | 1998-05-29 | Mitsubishi Chem Corp | Method for texturing substrate for magnetic disk |
US5902172A (en) * | 1997-08-22 | 1999-05-11 | Showa Aluminum Corporation | Method of polishing memory disk substrate |
JP2000343390A (en) * | 1999-06-04 | 2000-12-12 | Nippon Sheet Glass Co Ltd | Processing method for glass substrate |
CN101010737A (en) * | 2004-08-30 | 2007-08-01 | 昭和电工株式会社 | Magnetic disk substrate and production method of magnetic disk |
JP4560789B2 (en) * | 2005-06-14 | 2010-10-13 | 富士電機デバイステクノロジー株式会社 | Polishing method of magnetic disk substrate |
JP5008350B2 (en) * | 2006-07-05 | 2012-08-22 | 花王株式会社 | Polishing liquid composition for glass substrate |
JP2009289300A (en) * | 2008-05-27 | 2009-12-10 | Fuji Electric Device Technology Co Ltd | Method for cleaning substrate for information recording medium, and method for manufacturing information recording medium |
US9053736B2 (en) * | 2010-04-20 | 2015-06-09 | Kao Corporation | Method for manufacturing an aluminosilicate glass substrate for hard disks |
-
2012
- 2012-12-27 MY MYPI2012701288A patent/MY168569A/en unknown
- 2012-12-28 JP JP2012289140A patent/JP6141636B2/en active Active
- 2012-12-28 CN CN201210583685.8A patent/CN103247304B/en active Active
Also Published As
Publication number | Publication date |
---|---|
JP6141636B2 (en) | 2017-06-07 |
JP2013152775A (en) | 2013-08-08 |
CN103247304B (en) | 2017-08-01 |
CN103247304A (en) | 2013-08-14 |
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