MY168569A - Method of manufacturing a substrate, method of manufacturing a magnetic disk glass substrate and method of manufacturing a magnetic disk - Google Patents

Method of manufacturing a substrate, method of manufacturing a magnetic disk glass substrate and method of manufacturing a magnetic disk

Info

Publication number
MY168569A
MY168569A MYPI2012701288A MYPI2012701288A MY168569A MY 168569 A MY168569 A MY 168569A MY PI2012701288 A MYPI2012701288 A MY PI2012701288A MY PI2012701288 A MYPI2012701288 A MY PI2012701288A MY 168569 A MY168569 A MY 168569A
Authority
MY
Malaysia
Prior art keywords
substrate
manufacturing
magnetic disk
polishing
slurry
Prior art date
Application number
MYPI2012701288A
Inventor
Shimada Takashi
Kurata Noboru
ISHIKAWA Nami
YAMASHIRO Yuji
Original Assignee
Hoya Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hoya Corp filed Critical Hoya Corp
Publication of MY168569A publication Critical patent/MY168569A/en

Links

Landscapes

  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

Provided is a substrate manufacturing method which is simple and can manufacture, at a low cost, a high-quality substrate with high cleanliness and few defects that can be suitably used as a next-generation substrate (7) for a magnetic disk of which the requirement for the substrate surface quality is still stricter than the current requirement. The substrate manufacturing method is a method of manufacturing a substrate (7) suitable, for example, as a glass substrate for a magnetic disk and includes a polishing treatment of using a slurry (9) containing polishing abrasive particles and a surface plate (1, 3) with a pair of polishing pads (2), supplying the slurry (9) between each of the polishing pads (2) and the substrate (7), and polishing the main surfaces of the substrate (7) sandwiched between the polishing pads (2); and a rinsing treatment of, after the polishing treatment, treating the main surfaces of the substrate (7) under the conditions that a processing pressure is 2kPa to 6kPa, an abrasive particle concentration in a slurry (9) is more than 0 (zero) and not more than 5wt%, and a slurry flow rate is 0.25ml/min/cm2 to 5ml/min/cm2. (Fig. 1)
MYPI2012701288A 2011-12-30 2012-12-27 Method of manufacturing a substrate, method of manufacturing a magnetic disk glass substrate and method of manufacturing a magnetic disk MY168569A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011290472 2011-12-30

Publications (1)

Publication Number Publication Date
MY168569A true MY168569A (en) 2018-11-13

Family

ID=48926784

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI2012701288A MY168569A (en) 2011-12-30 2012-12-27 Method of manufacturing a substrate, method of manufacturing a magnetic disk glass substrate and method of manufacturing a magnetic disk

Country Status (3)

Country Link
JP (1) JP6141636B2 (en)
CN (1) CN103247304B (en)
MY (1) MY168569A (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SG10201901283XA (en) * 2013-09-28 2019-03-28 Hoya Corp Method for manufacturing magnetic-disk glass substrate, methodfor manufacturing magnetic disk, and grinding tool
JP6280561B2 (en) * 2013-11-15 2018-02-14 Hoya株式会社 Manufacturing method of glass substrate for magnetic disk and manufacturing method of magnetic disk
CN104536165B (en) * 2014-12-05 2017-09-01 深圳市华星光电技术有限公司 The machine table of display device and the processing method of glass substrate
WO2016129215A1 (en) * 2015-02-12 2016-08-18 株式会社フジミインコーポレーテッド Method for polishing silicon wafer and surface treatment composition
US10748778B2 (en) 2015-02-12 2020-08-18 Fujimi Incorporated Method for polishing silicon wafer and surface treatment composition
US11471993B2 (en) * 2018-03-09 2022-10-18 Hoya Corporation Spacer, laminate of substrates, method for manufacturing substrate, and method for manufacturing substrate for magnetic disk

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0778874B2 (en) * 1990-12-12 1995-08-23 株式会社神戸製鋼所 Texture processing method for amorphous carbon substrate for magnetic disk
JPH05314474A (en) * 1992-05-08 1993-11-26 Hitachi Ltd Magnetic disk and surface processing thereof and magnetic disk apparatus
JPH10143858A (en) * 1996-11-07 1998-05-29 Mitsubishi Chem Corp Method for texturing substrate for magnetic disk
US5902172A (en) * 1997-08-22 1999-05-11 Showa Aluminum Corporation Method of polishing memory disk substrate
JP2000343390A (en) * 1999-06-04 2000-12-12 Nippon Sheet Glass Co Ltd Processing method for glass substrate
CN101010737A (en) * 2004-08-30 2007-08-01 昭和电工株式会社 Magnetic disk substrate and production method of magnetic disk
JP4560789B2 (en) * 2005-06-14 2010-10-13 富士電機デバイステクノロジー株式会社 Polishing method of magnetic disk substrate
JP5008350B2 (en) * 2006-07-05 2012-08-22 花王株式会社 Polishing liquid composition for glass substrate
JP2009289300A (en) * 2008-05-27 2009-12-10 Fuji Electric Device Technology Co Ltd Method for cleaning substrate for information recording medium, and method for manufacturing information recording medium
US9053736B2 (en) * 2010-04-20 2015-06-09 Kao Corporation Method for manufacturing an aluminosilicate glass substrate for hard disks

Also Published As

Publication number Publication date
JP6141636B2 (en) 2017-06-07
JP2013152775A (en) 2013-08-08
CN103247304B (en) 2017-08-01
CN103247304A (en) 2013-08-14

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