MY170704A - Method of manufacturing glass substrate for magnetic disk - Google Patents
Method of manufacturing glass substrate for magnetic diskInfo
- Publication number
- MY170704A MY170704A MYPI2012700125A MYPI2012700125A MY170704A MY 170704 A MY170704 A MY 170704A MY PI2012700125 A MYPI2012700125 A MY PI2012700125A MY PI2012700125 A MYPI2012700125 A MY PI2012700125A MY 170704 A MY170704 A MY 170704A
- Authority
- MY
- Malaysia
- Prior art keywords
- glass substrate
- face
- contact portions
- slide contact
- polisher
- Prior art date
Links
Landscapes
- Manufacturing Of Magnetic Record Carriers (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Surface Treatment Of Glass (AREA)
Abstract
It is an object of the present invention to reliably achieve a high polishing rate with respect to a glass surface without largely depending on the chemical polishing action of an abrasive agent in a method of manufacturing a glass substrate (G) for a magnetic disk. The present method includes a step of polishing a principal face of a glass substrate (G) by causing a polisher pad (10) to slide in contact with the principal face of the glass substrate (G), and simultaneously, by supplying a polisher liquid containing loose abrasive grain onto the principal face of the glass substrate (G). The polisher pad (10) includes a plurality of slide contact portions (11) and at least a groove (12) on a face thereof. The slide contact portions (11) are slid in contact with the principal face of the glass substrate (G). Each groove (12) is disposed between adjacent two of the slide contact portions (11). Further, the total edge length of the slide contact portions (11) formed on the face of the polisher pad (10) per square meter is set to be equal to 200 meters, while a filling ratio is set to be greater than or equal to 80 % where the filling ratio is defined as a ratio of the area of the slide contact portions (11) with respect to that of the entire face of the polisher pad (10).
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011079212 | 2011-03-31 |
Publications (1)
Publication Number | Publication Date |
---|---|
MY170704A true MY170704A (en) | 2019-08-26 |
Family
ID=46985805
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
MYPI2012700125A MY170704A (en) | 2011-03-31 | 2012-03-28 | Method of manufacturing glass substrate for magnetic disk |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP5967999B2 (en) |
CN (1) | CN102729141B (en) |
MY (1) | MY170704A (en) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014130673A (en) * | 2012-11-30 | 2014-07-10 | Hoya Corp | Manufacturing method of glass substrate for magnetic disk |
CN104884399B (en) * | 2012-12-27 | 2017-12-29 | 旭硝子株式会社 | The manufacture method and glass plate of the glass plate of warpage when can reduce chemical enhanced |
CN104884398B (en) | 2012-12-27 | 2017-05-31 | 旭硝子株式会社 | It is chemical enhanced to use float glass |
KR101455919B1 (en) * | 2013-01-18 | 2014-11-03 | 주식회사 엘지실트론 | Structure of Lapping Plate in Double Side Lapping Apparatus For Silicon Wafer |
WO2015152278A1 (en) * | 2014-03-31 | 2015-10-08 | Hoya株式会社 | Method for manufacturing magnetic disk-use substrate |
CN115816237B (en) * | 2023-02-14 | 2023-05-05 | 辽宁拓邦鸿基半导体材料有限公司 | Multi-dimensional adjusting polishing equipment for quartz crucible processing |
CN116372781B (en) * | 2023-04-20 | 2023-11-07 | 山东欣立得光电科技有限公司 | Automatic cleaning and polishing system for LED screen substrate |
CN117583522B (en) * | 2023-12-07 | 2024-05-10 | 台州市承跃机械有限公司 | Aluminum forging device for motorcycle production |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2783329B2 (en) * | 1989-11-01 | 1998-08-06 | 株式会社フジミインコーポレーテッド | Abrasive for glass polishing |
JPH08197434A (en) * | 1995-01-23 | 1996-08-06 | Sony Corp | Pad for grinding |
US6390891B1 (en) * | 2000-04-26 | 2002-05-21 | Speedfam-Ipec Corporation | Method and apparatus for improved stability chemical mechanical polishing |
US6709981B2 (en) * | 2000-08-16 | 2004-03-23 | Memc Electronic Materials, Inc. | Method and apparatus for processing a semiconductor wafer using novel final polishing method |
JP2002086346A (en) * | 2000-09-12 | 2002-03-26 | Teijin Meton Kk | Polishing pad |
JP2003145412A (en) * | 2001-08-27 | 2003-05-20 | Nippon Sheet Glass Co Ltd | Glass substrate for information recording medium, and polishing method for the same |
JP3867629B2 (en) * | 2002-06-28 | 2007-01-10 | Jsr株式会社 | Polishing pad and multilayer polishing pad |
JP2006018922A (en) * | 2004-07-01 | 2006-01-19 | Hoya Corp | Manufacturing method of glass substrate for magnetic disk, and manufacturing method of magnetic disk |
JP2006095675A (en) * | 2004-08-30 | 2006-04-13 | Showa Denko Kk | Magnetic disk substrate, and method of producing magnetic disk |
JP5311731B2 (en) * | 2005-09-26 | 2013-10-09 | Hoya株式会社 | Manufacturing method of glass substrate for magnetic disk, manufacturing method of magnetic disk, and polishing cloth |
JPWO2009157306A1 (en) * | 2008-06-25 | 2011-12-08 | 旭硝子株式会社 | Double-side polishing apparatus, polishing method and manufacturing method for glass substrate for magnetic disk |
JP2010029996A (en) * | 2008-07-30 | 2010-02-12 | Toray Ind Inc | Polishing pad |
WO2010038617A1 (en) * | 2008-10-01 | 2010-04-08 | 旭硝子株式会社 | Polishing slurry, process for producing same, method of polishing, and process for producing glass substrate for magnetic disk |
JP2010257561A (en) * | 2009-03-30 | 2010-11-11 | Hoya Corp | Method for manufacturing substrate for magnetic disk |
JP2010250893A (en) * | 2009-04-15 | 2010-11-04 | Hoya Corp | Manufacturing method of magnetic disk glass substrate, and surface correction method of bonded abrasive tool |
-
2012
- 2012-03-26 JP JP2012069370A patent/JP5967999B2/en active Active
- 2012-03-28 MY MYPI2012700125A patent/MY170704A/en unknown
- 2012-03-30 CN CN201210089282.8A patent/CN102729141B/en active Active
Also Published As
Publication number | Publication date |
---|---|
CN102729141A (en) | 2012-10-17 |
JP2012216276A (en) | 2012-11-08 |
JP5967999B2 (en) | 2016-08-10 |
CN102729141B (en) | 2016-08-10 |
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