WO2015046543A8 - Method for manufacturing glass substrate for magnetic disk, method for manufacturing magnetic disk, and grinding tool - Google Patents

Method for manufacturing glass substrate for magnetic disk, method for manufacturing magnetic disk, and grinding tool Download PDF

Info

Publication number
WO2015046543A8
WO2015046543A8 PCT/JP2014/075966 JP2014075966W WO2015046543A8 WO 2015046543 A8 WO2015046543 A8 WO 2015046543A8 JP 2014075966 W JP2014075966 W JP 2014075966W WO 2015046543 A8 WO2015046543 A8 WO 2015046543A8
Authority
WO
WIPO (PCT)
Prior art keywords
grinding
magnetic disk
manufacturing
glass substrate
grinding tool
Prior art date
Application number
PCT/JP2014/075966
Other languages
French (fr)
Japanese (ja)
Other versions
WO2015046543A1 (en
Inventor
博則 吉川
Original Assignee
Hoya株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hoya株式会社 filed Critical Hoya株式会社
Priority to CN201480053014.8A priority Critical patent/CN105579198B/en
Priority to JP2015539444A priority patent/JP6313314B2/en
Priority to SG11201602379QA priority patent/SG11201602379QA/en
Publication of WO2015046543A1 publication Critical patent/WO2015046543A1/en
Publication of WO2015046543A8 publication Critical patent/WO2015046543A8/en

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/8404—Processes or apparatus specially adapted for manufacturing record carriers manufacturing base layers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
    • B24B37/245—Pads with fixed abrasives
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
    • B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
    • B24B7/228—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding thin, brittle parts, e.g. semiconductors, wafers

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Surface Treatment Of Glass (AREA)
  • Grinding Of Cylindrical And Plane Surfaces (AREA)

Abstract

The present invention provides a method whereby not only the machining speed can be improved during a grinding process utilizing a stationary grinding wheel, but stable grinding can also be enabled. In the present invention, during a grinding process for grinding a main surface of a glass substrate, the main surface of the glass substrate is ground by using a grinding tool that has grinding abrasive grains, a binding material for binding the grinding abrasive grains together, and dispersed grains that are harder than the binding material yet softer than the grinding abrasive grains, wherein the grinding abrasive grains and the dispersed grains are bound together in a dispersed state in the binding material.
PCT/JP2014/075966 2013-09-28 2014-09-29 Method for manufacturing glass substrate for magnetic disk and method for manufacturing magnetic disk WO2015046543A1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CN201480053014.8A CN105579198B (en) 2013-09-28 2014-09-29 The manufacture method of glass substrate for disc and the manufacture method of disk and grinding tool
JP2015539444A JP6313314B2 (en) 2013-09-28 2014-09-29 Manufacturing method of glass substrate for magnetic disk, manufacturing method of glass substrate, manufacturing method of magnetic disk, and grinding tool
SG11201602379QA SG11201602379QA (en) 2013-09-28 2014-09-29 Method for manufacturing magnetic-disk glass substrate, methodfor manufacturing magnetic disk, and grinding tool

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2013202843 2013-09-28
JP2013-202843 2013-09-28

Publications (2)

Publication Number Publication Date
WO2015046543A1 WO2015046543A1 (en) 2015-04-02
WO2015046543A8 true WO2015046543A8 (en) 2016-04-21

Family

ID=52743664

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2014/075966 WO2015046543A1 (en) 2013-09-28 2014-09-29 Method for manufacturing glass substrate for magnetic disk and method for manufacturing magnetic disk

Country Status (5)

Country Link
JP (2) JP6313314B2 (en)
CN (2) CN108447507B (en)
MY (1) MY176672A (en)
SG (2) SG10202006113YA (en)
WO (1) WO2015046543A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108447507B (en) * 2013-09-28 2020-07-28 Hoya株式会社 Method for manufacturing glass substrate for magnetic disk, method for manufacturing magnetic disk, and grinding tool
JP6046865B1 (en) * 2015-05-13 2016-12-21 バンドー化学株式会社 Polishing pad and polishing pad manufacturing method
KR102039587B1 (en) * 2016-01-06 2019-11-01 반도 카가쿠 가부시키가이샤 Abrasive
CN113808627B (en) 2017-09-29 2023-03-17 Hoya株式会社 Glass spacer and hard disk drive device
JP7023829B2 (en) * 2018-12-20 2022-02-22 本田技研工業株式会社 Vitrified grindstone and its manufacturing method

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0403592A1 (en) * 1988-06-30 1990-12-27 MITCHELL, Richard, J Abrasive product with reduced particle concentration
JPH0761615B2 (en) * 1992-09-28 1995-07-05 東芝タンガロイ株式会社 Coated high hardness powder and method for producing the same
US6458018B1 (en) * 1999-04-23 2002-10-01 3M Innovative Properties Company Abrasive article suitable for abrading glass and glass ceramic workpieces
JP4099291B2 (en) * 1999-06-23 2008-06-11 Ｈｏｙａ株式会社 Manufacturing method of glass substrate for magnetic disk
JP2001138244A (en) * 1999-08-17 2001-05-22 Mitsubishi Materials Corp Resin bond type grinding wheel
EP1276593B1 (en) * 2000-04-28 2005-08-17 3M Innovative Properties Company Abrasive article and methods for grinding glass
JP4198607B2 (en) * 2004-01-13 2008-12-17 Ｈｏｙａ株式会社 Manufacturing method of glass substrate for magnetic disk and manufacturing method of magnetic disk
TW200734120A (en) * 2005-12-06 2007-09-16 Disco Corp Polishing grindstone and method for producing same
JP2009072832A (en) * 2007-09-18 2009-04-09 Bando Chem Ind Ltd Polishing sheet and method for production thereof
JP2012064295A (en) * 2009-11-10 2012-03-29 Showa Denko Kk Method for manufacturing glass substrate for magnetic recording medium
MY158938A (en) * 2009-12-29 2016-11-30 Hoya Corp Manufacturing method of glass substrate for magnetic disk
JP5585269B2 (en) * 2010-07-22 2014-09-10 旭硝子株式会社 Method for manufacturing glass substrate for magnetic recording medium
JP2012169024A (en) * 2011-02-16 2012-09-06 Showa Denko Kk Method for manufacturing glass substrate for magnetic recording medium
JP5906823B2 (en) * 2011-03-15 2016-04-20 旭硝子株式会社 Method for manufacturing glass substrate for magnetic recording medium
JP2013012280A (en) * 2011-06-30 2013-01-17 Konica Minolta Advanced Layers Inc Method for manufacturing glass substrate for hdd
JP5814719B2 (en) * 2011-09-28 2015-11-17 Hoya株式会社 Substrate manufacturing method, mask blank manufacturing method, transfer mask manufacturing method, and correction carrier
CN103182659A (en) * 2011-12-30 2013-07-03 财团法人金属工业研究发展中心 Grinding tool and manufacturing method thereof
CN108447507B (en) * 2013-09-28 2020-07-28 Hoya株式会社 Method for manufacturing glass substrate for magnetic disk, method for manufacturing magnetic disk, and grinding tool

Also Published As

Publication number Publication date
JP2018092697A (en) 2018-06-14
JP6313314B2 (en) 2018-04-18
SG11201602379QA (en) 2016-05-30
CN105579198B (en) 2018-04-27
WO2015046543A1 (en) 2015-04-02
CN105579198A (en) 2016-05-11
JPWO2015046543A1 (en) 2017-03-09
CN108447507B (en) 2020-07-28
MY176672A (en) 2020-08-19
JP6490842B2 (en) 2019-03-27
SG10202006113YA (en) 2020-07-29
CN108447507A (en) 2018-08-24

Similar Documents

Publication Publication Date Title
WO2014020068A8 (en) Abrasive particle with at most three surfaces and one corner
WO2015046543A8 (en) Method for manufacturing glass substrate for magnetic disk, method for manufacturing magnetic disk, and grinding tool
WO2011139562A3 (en) Ceramic shaped abrasive particles, methods of making the same, and abrasive articles containing the same
MY187526A (en) Chemical-mechanical processing slurry and methods for processing a nickel substrate surface
EP3120379A4 (en) Abrasive pad and glass substrate abrading method
MX2014002620A (en) Bonded abrasive article.
MX350058B (en) Method of abrading a workpiece.
MY170361A (en) Sapphire polishing slurry and sapphire polishing method
WO2009132003A3 (en) Methods and apparatus for low cost and high performance polishing tape for substrate bevel and edge polishing in semiconductor manufacturing
WO2010141464A3 (en) Corrosion-resistant cmp conditioning tools and methods for making and using same
WO2014020075A8 (en) Abrasive grain containing a first face without vertices and a second face with vertices
JP2014528846A5 (en)
EP3103851A4 (en) Polishing abrasive particle, production method therefor, polishing method, polishing device, and slurry
WO2012031251A3 (en) Bonded abrasive articles, method of forming such articles, and grinding performance of such articles
WO2014179419A8 (en) Chemical mechanical planarization slurry composition comprising composite particles, process for removing material using said composition, cmp polishing pad and process for preparing said composition
JP2016523724A5 (en)
WO2018081594A3 (en) Core drill bit and methods of forming
MY169090A (en) Polishing composition for magnetic disk substrate
WO2013154236A8 (en) Polishing slurry and method of polishing using the same
EP3632848A4 (en) Ceria-based composite fine particle dispersion, production method therefor, and polishing abrasive grain dispersion including ceria-based composite fine particle dispersion
WO2013003699A3 (en) Coated abrasive aggregates and products containing same
WO2013160825A3 (en) Method and device for grinding coffee beans
WO2012005939A3 (en) Closed-loop control of cmp slurry flow
EP3441185A4 (en) Polishing pad and method for manufacturing same, and method for manufacturing abrasive
SG2013065842A (en) Carrier apparatus of thin disk-shaped workpiece, method of manufacturing the same, and both-side grinding machine

Legal Events

Date Code Title Description
WWE Wipo information: entry into national phase

Ref document number: 201480053014.8

Country of ref document: CN

121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 14847578

Country of ref document: EP

Kind code of ref document: A1

ENP Entry into the national phase

Ref document number: 2015539444

Country of ref document: JP

Kind code of ref document: A

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 14847578

Country of ref document: EP

Kind code of ref document: A1