CN115256233A - Disc surface finishing process of double-sided grinding machine table - Google Patents
Disc surface finishing process of double-sided grinding machine table Download PDFInfo
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- CN115256233A CN115256233A CN202210990159.7A CN202210990159A CN115256233A CN 115256233 A CN115256233 A CN 115256233A CN 202210990159 A CN202210990159 A CN 202210990159A CN 115256233 A CN115256233 A CN 115256233A
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- Prior art keywords
- double
- disc surface
- disc
- trimming
- dressing
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- 238000007730 finishing process Methods 0.000 title claims abstract description 11
- 238000000034 method Methods 0.000 claims abstract description 12
- 238000009966 trimming Methods 0.000 claims description 36
- 230000008569 process Effects 0.000 claims description 8
- 239000000758 substrate Substances 0.000 claims description 8
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 claims description 3
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 claims description 3
- 230000008439 repair process Effects 0.000 abstract description 7
- 229910001651 emery Inorganic materials 0.000 abstract description 3
- 238000005498 polishing Methods 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 5
- 230000008859 change Effects 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000006467 substitution reaction Methods 0.000 description 2
- 229910001018 Cast iron Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 239000003082 abrasive agent Substances 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000010897 surface acoustic wave method Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools
Abstract
The application provides a quotation finishing process of double-sided grinding board, confirms the quotation scope of maintaining according to the position and the movement track that the wandering star wheel put, adjusts the degree of maintaining the quotation according to the repairment emery wheel quantity in the wandering star wheel work piece inslot to make the dish type reach the purpose of predetermineeing unsmooth degree. The method can effectively repair the disc surface, and can also repair different concave-convex degrees of the upper disc surface and the lower disc surface, and is flexible and simple to operate.
Description
Technical Field
The application relates to the technical field of surface acoustic wave filter substrate processing and manufacturing, in particular to a disc surface finishing process of a double-sided grinding machine table.
Background
In the production process of the filter substrate, thinning process treatment is required, the mainstream thinning technology at present is a double-sided grinding technology, the technology rotates in opposite directions through an upper grinding disc and a lower grinding disc, the substrate does revolution and autorotation planetary motion in a carrier, and the wafer is thinned under the pressure action of an abrasive material and the grinding discs. The substrate grinds the back for a long time, can cause the abrasive disc surface unevenness, traditional copper disc or tin dish generally use the lathe tool to carry out the quotation to be maintained, or equip the lathe tool on the attenuate board, or directly change the quotation, the quotation of changing is sent out and commissions outward and is maintained, and cast iron dish or stainless steel dish adopt the parallel grinding ring in two sides (generally use 4 or 6) to maintain the quotation, the purpose of maintaining is to guarantee that the quotation is parallel to each other, but to the disc type of special appearance, if want the quotation to be interior convex (quotation central height is greater than the edge height) or indent (quotation central height is less than the edge height), can't utilize traditional approach to maintain.
Disclosure of Invention
In order to solve the problems in the background art, the application provides a disk surface finishing process of a double-side grinding machine, which can meet the special appearance requirements that the central height of a disk surface is greater than the edge height, the central height of the disk surface is less than the edge height and the like.
The technical scheme adopted by the application is as follows:
a disk surface finishing process of a double-sided grinding machine table comprises the following steps:
s1: two or more pairs of planetary wheels are averagely and symmetrically placed on preset positions of a lower disc surface of a double-sided grinding machine table, and the radiuses r of each pair of planetary wheels from the center of the lower disc surface are different;
s2: placing a dressing grinding wheel in a workpiece groove of the planetary wheel, wherein when a double-sided grinding machine operates, the motion tracks of each pair of planetary wheels are different, so that different positions of the disk surface are dressed;
s3: adjusting the number of the trimming grinding wheels according to the concave-convex degree of the preset disc surface;
s4: and performing rough trimming and fine trimming on the disk surface according to preset parameters.
In a possible embodiment, the number of the free-star wheels is 2, a group of free-star wheels closer to the center of the lower disc is set, the placing position is A1, the radius between the A1 and the center of the lower disc is r1, the placing position of the other pair of the free-star wheels is A2, the radius between the A2 and the center of the lower disc is r2, the lower disc is set to be sequentially divided into a first part, a second part and a third part from the center to the edge according to an annular shape, the motion trail of the free-star wheel at the A1 position is mainly distributed in the first part and the third part, and the motion trail of the free-star wheel at the A2 position is mainly distributed in the second part.
In one possible embodiment, r2: r1 is 5.
In a possible embodiment, when the disk surface trimming target is that the edge height is greater than the middle height, the number of trimming grinding wheels at the A1 position is greater than that at the A2 position; on the contrary, when the disk surface trimming target is that the middle height is larger than the edge height, the number of the trimming grinding wheels at the A1 position is smaller than that at the A2 position.
In one possible embodiment, the disk surface is dried by using an air gun after finishing each trimming in step S4, and the disk shape is confirmed by using a gauge.
In one possible embodiment, a 400# wheel is used for rough dressing and a 1000# wheel is used for finish dressing.
In a possible implementation scheme, in the rough trimming process, when the height drop between the center of the disk surface and the edge is less than or equal to 5 μm, the trimming time is 20-30min; when the height drop between the center of the disk surface and the edge is larger than 5 mu m, the trimming time is within 30 to 60min.
In a possible embodiment, the object to be processed by the double-sided grinding machine is a filter substrate comprising lithium tantalate or lithium niobate.
The application provides a quotation finishing process of two-sided grinding board, confirms the quotation scope of repairing according to the position and the movement track that the wandering star wheel was put, and the degree of repairing the quotation is adjusted according to the trimming wheel quantity in the wandering star wheel hole site to make the dish type reach the purpose of predetermineeing unsmooth degree. The method can effectively repair the disc surface, and can also repair different concave-convex degrees of the upper disc surface and the lower disc surface, and is flexible and simple to operate.
Additional advantages, objects, and features of the application will be set forth in part in the description which follows and in part will become apparent to those having ordinary skill in the art upon examination of the following or may be learned from practice of the application. The objectives and other advantages of the application may be realized and attained by the structure particularly pointed out in the written description and claims hereof as well as the appended drawings.
It will be appreciated by those skilled in the art that the objects and advantages that can be achieved with the present application are not limited to the specific details set forth above, and that these and other objects that can be achieved with the present application will be more clearly understood from the detailed description that follows.
Drawings
The accompanying drawings, which are included to provide a further understanding of the application, are incorporated in and constitute a part of this application, and are not intended to limit the application. The components in the figures are not necessarily to scale, emphasis instead being placed upon illustrating the principles of the application. In the drawings:
FIG. 1 is a schematic longitudinal cross-sectional view of a double-side polishing apparatus according to an embodiment of the present invention;
FIG. 2 is a top view of a lower polishing surface of a double-side polishing platen according to an embodiment of the present invention;
FIG. 3 isbase:Sub>A cross-sectional view A-A of FIG. 2;
FIG. 4 is a schematic view of the placement position of the planetary wheel;
FIG. 5 is a schematic structural diagram of the lower disc surface divided from the center to the edge according to a ring shape;
FIG. 6 is a schematic view of the general structure of a lower grinding disk surface;
list of reference numerals:
1: the grinding wheel is dressed up,
2: the surface of the disc is ground downwards,
3: a wandering star wheel;
4: a sun gear;
5: an upper grinding disc surface;
6: and the inner gear ring.
Detailed Description
To make the objects, technical solutions and advantages of the embodiments of the present application more apparent, the embodiments of the present application are further described in detail below with reference to the accompanying drawings. The exemplary embodiments and descriptions of the present application are provided herein to explain the present application and not to limit the present application.
It should be pre-specified that the term "comprises/comprising" when used herein is taken to specify the presence of stated features, elements, steps or components, but does not preclude the presence or addition of one or more other features, elements, steps or components.
Referring to fig. 2, which isbase:Sub>A top view ofbase:Sub>A lower grinding disc surface ofbase:Sub>A double-side grinding machine, fig. 3 isbase:Sub>A cross-sectional view ofbase:Sub>A-base:Sub>A in fig. 2, forbase:Sub>A disc shape withbase:Sub>A special shape as shown in fig. 3, the disc surface center height is greater than the edge height or less than the edge height, which cannot be finished by usingbase:Sub>A conventional disc finishing method.
First, as shown in fig. 1, a longitudinal cross-sectional view of a double-side grinder platform in this embodiment is shown, the double-side grinder platform includes an upper grinding plate surface 5, a lower grinding plate surface 2, a sun gear 4, an inner gear ring 6, and planetary gears 3, and the number of the planetary gears 3 may be set according to actual needs.
The upper grinding disc surface 5 and the lower grinding disc surface 1 are matched up and down, the sun gear 4 is arranged at the center of the upper grinding disc surface 5 and the center of the lower grinding disc surface 2, the inner gear ring 6 is arranged at the outer sides of the upper grinding disc surface 5 and the grinding disc, and the upper grinding disc surface 5, the lower grinding disc surface 2, the sun gear 4 and the inner gear ring 6 are coaxially arranged; the planetary wheel 3 is engaged between the sun wheel 4 and the inner gear ring 6; the wandering gear 3 is used for carrying the dressing wheel 1.
In one possible embodiment, the upper grinding disk surface 5, the lower grinding disk surface 2, the sun wheel 4 and the ring gear 6 can be driven by different drives, so that the rotational speed of the upper grinding disk surface 5, the lower grinding disk surface 2, the sun wheel 4 and the ring gear 6 can be adjusted.
In a possible embodiment, the upper grinding disc surface 5, the lower grinding disc surface 2, the sun wheel 4 and the inner gear ring 6 all rotate around the central axis of the sun wheel 4.
The application provides a quotation of double-sided lapping board is repaiied technology, specifically includes the following step:
s1: two or more pairs of the planetary wheels 3 are averagely and symmetrically placed on the preset positions of the lower grinding disc surface 2 of the double-sided grinding machine, and the radius r of each pair of the planetary wheels 3 from the center of the lower grinding disc surface 2 is different.
S2: will maintain emery wheel 1 and place in the work piece groove of wandering star wheel 3, when the operation of two-sided lapping machine, the movement track of every wandering star wheel 3 is inequality to different positions to the quotation are maintained.
Referring to fig. 4, as an example, 2 pairs of the planetary gears are provided, a set of planetary gears 3 closer to the center of the lower polishing disk surface 2 is provided, the set position is A1, the radius between A1 and the center of the lower polishing disk surface 2 is r1, the other pair of planetary gears 3 is provided at A2, and the radius between A2 and the center of the lower polishing disk surface 2 is r2. Referring to fig. 5, the lower disc surface is divided into a first portion W1, a second portion W2 and a third portion W3 from the center to the edge in sequence according to a ring, so that the movement locus of the free-wheel 3 at the position A1 is mainly distributed in the first portion W1 and the third portion W3, and the movement locus of the free-wheel 3 at the position A2 is mainly distributed in the second portion W2.
Alternatively, r2: r1 is 5.
The 3 rotation principles of wandering star wheel of two-sided grinding board are as follows in this application:
the sun wheel 4 and the ring gear 6 are each driven by a drive mechanism to rotate about its own axis, i.e. about the central axis of the sun wheel 4.
Since the planetary wheel 3 is respectively engaged with the sun gear 4 and the ring gear 6, and the planetary wheel 3 rotates around the axis thereof and revolves around the central axis of the sun gear 4, the rotation direction and the revolution speed of the planetary wheel 3 can be changed by adjusting the rotation speeds of the sun gear 4 and the ring gear 6.
The upper grinding disk 5 and the lower grinding disk 2 are driven by a driving mechanism to rotate in opposite directions respectively, so that the dressing grinding wheel 1 and the upper grinding disk 5 and the lower grinding disk 2 generate relative movement, and the upper grinding disk 5 and the lower grinding disk 2 grind two surfaces of the dressing grinding wheel 1 respectively.
S3: and adjusting the number of the grinding wheels according to the concave-convex degree of the preset disc surface.
When the disk surface trimming target is that the edge height is greater than the middle height, the number of the trimming grinding wheels at the A1 position is greater than that at the A2 position; on the contrary, when the disk surface trimming target is that the middle height is larger than the edge height, the number of the trimming grinding wheels at the A1 position is smaller than that at the A2 position.
S4: and performing rough trimming and fine trimming on the disk surface according to preset parameters.
Roughly repairing a 400# grinding wheel, applying 80kg to 120kg of pressure on the disc surface, and setting the repairing time according to the actual disc shape of the disc surface, wherein the repairing time is 20 to 30min when the height drop between the center of the disc surface and the edge is less than or equal to 5 mu m; when the height drop between the center of the disk surface and the edge is more than 5 mu m, the trimming time is between 30 and 60min.
And (3) a 1000# grinding wheel is used for fine trimming, the pressure of 40-60kg is applied to the surface of the upper disc, the surface of the disc is finely trimmed, and the scratch of the surface of the disc caused by rough trimming is removed.
And (4) drying the disc surface by using an air gun after finishing each time, and confirming the disc shape by using a measuring meter.
Optionally, the processing object of the double-sided grinding machine is a filter substrate, and the filter substrate comprises lithium tantalate or lithium niobate.
Example 1
The disk shape of the initial disk surface is measured to be 7um, 4 planetary wheels are arranged on the machine in total, 8 400# dressing grinding wheels are arranged at two positions A1, 4 dressing grinding wheels are arranged at each position, only 6 400# dressing grinding wheels are arranged at two positions A2, 3 dressing grinding wheels are arranged at each position, and the purpose is to enable the middle dressing amount of the disk surface to be larger than the edge dressing amount. The pressure of the upper disc surface is selected from 80kg for trimming for 25min, an air gun is used for drying the disc surface, and the disc shape of the disc surface is measured by a scale and is found to be concave 3um, which is in line with the expectation. Change 1000# emery wheel and carry out meticulous maintenance to the quotation, place quantity wandering star wheel A1 and A2 and all be unanimous, use hanging wall pressure 40kg to maintain 10min, use the air gun to weather the quotation to remeasure the dish type with the scale and still be recessed 3um, and the quotation is comparatively smooth, no obvious scratch, and the repair dish is accomplished.
Referring to fig. 6, the general structure of the lower grinding disk is shown. When the disc surface is trimmed, a trimming grinding wheel can be positioned on the planetary wheel through a workpiece groove on the planetary wheel, then the planetary wheel positioned with the trimming grinding wheel is placed on a lower grinding disc, the planetary wheel is positioned between a sun wheel and an inner gear ring, the planetary wheel is respectively meshed with the sun wheel and the inner gear ring, a plurality of planetary wheels can be placed between the sun wheel and the inner gear ring, an upper grinding disc is driven to be downwards close to the lower grinding disc, the upper grinding disc is made to be in contact with the upper end surface of the trimming grinding wheel, and then specific pressure, rotation speed and time are set to start trimming.
Because the relative motion speed of the planetary gear positioned with the dressing grinding wheel and the upper grinding disc influences the material removal uniformity of the upper surface of the dressing grinding wheel, and the relative motion speed of the planetary gear positioned with the dressing grinding wheel and the lower grinding disc influences the material removal uniformity of the lower surface of the dressing grinding wheel, the rotating speed of the upper grinding disc, the lower grinding disc, the sun gear and the inner gear ring is controlled in the disc surface dressing process of the application, the placing position and the quantity of the dressing grinding wheel are controlled, the condition that the upper surface and the lower surface of the dressing grinding wheel are removed in the machining process is adjusted, and the purpose of dressing the disc surface is achieved after machining.
The application provides a quotation of two-sided grinding board is repaiied technology, confirms the quotation scope of repairment according to the position that the wandering star wheel was put and movement track, and the degree of quotation is maintained according to the adjustment of the trimming wheel quantity in the wandering star wheel work piece inslot to make the dish type reach the purpose of predetermineeing unsmooth degree. The method not only can effectively repair the disk surface, but also can repair different concave-convex degrees of the upper disk surface and the lower disk surface, and is flexible and simple to operate.
The foregoing is only a preferred embodiment of the present application, and it should be noted that, for those skilled in the art, many modifications and substitutions can be made without departing from the technical principle of the present application, and these modifications and substitutions should also be regarded as the protection scope of the present application.
Claims (8)
1. A disk surface finishing process of a double-sided grinding machine is characterized by comprising the following steps:
s1: averagely and symmetrically placing two or more pairs of planetary wheels on preset positions of a lower disc surface of a double-sided grinding machine, wherein the radius r of each pair of planetary wheels from the center of the lower disc surface is different;
s2: placing a dressing grinding wheel in a workpiece groove of the planetary wheel, wherein when a double-sided grinding machine operates, the motion trail of each pair of planetary wheels is different, so that different positions of the disk surface are dressed;
s3: adjusting the number of the trimming grinding wheels according to the concave-convex degree of the preset disc surface;
s4: and performing rough trimming and fine trimming on the disk surface according to preset parameters.
2. The disc surface dressing process of a double-sided grinding machine according to claim 1, wherein when the number of the planetary wheels is 2 pairs, a group of planetary wheels closer to the center of the lower disc is set, the placing position is A1, the radius between the A1 and the center of the lower disc is r1, the placing position of the other pair of the planetary wheels is A2, the radius between the A2 and the center of the lower disc is r2, the lower disc is set to be a first part, a second part and a third part in sequence from the center to the edge according to annular division, the moving track of the planetary wheel at the A1 position is mainly distributed in the first part and the third part, and the moving track of the planetary wheel at the A2 position is mainly distributed in the second part.
3. The disc surface finishing process of a double-sided grinding machine according to claim 2, wherein r2: r1 is 5.
4. The disc surface dressing process of a double-sided grinding table as claimed in claim 2, wherein when the disc surface dressing target is that the edge height is greater than the middle height, the number of dressing grinding wheels at the A1 position is greater than the number of dressing grinding wheels at the A2 position; conversely, when the disk surface trimming target is that the middle height is greater than the edge height, the number of the trimming grinding wheels at the A1 position is less than that at the A2 position.
5. The disc surface finishing process of a double-sided grinding machine as claimed in claim 1, wherein in step S4, the disc surface is dried by an air gun after finishing each finishing, and the disc shape is confirmed by a gauge.
6. The disc surface dressing process of a double-sided grinding machine as claimed in claim 1, wherein a 400# grinding wheel is used for rough dressing and a 1000# grinding wheel is used for finish dressing.
7. The disc surface trimming process of a double-sided grinding machine according to claim 1, wherein in the rough trimming process of step S4, when the height drop between the center and the edge of the disc surface is less than or equal to 5 μm, the trimming time is 20 to 30min; when the height drop between the center of the disk surface and the edge is more than 5 mu m, the trimming time is between 30 and 60min.
8. The disc surface finishing process of a double-sided grinding machine according to claim 1, wherein the object to be processed of the double-sided grinding machine is a filter substrate comprising lithium tantalate or lithium niobate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210990159.7A CN115256233A (en) | 2022-08-18 | 2022-08-18 | Disc surface finishing process of double-sided grinding machine table |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210990159.7A CN115256233A (en) | 2022-08-18 | 2022-08-18 | Disc surface finishing process of double-sided grinding machine table |
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| CN115256233A true CN115256233A (en) | 2022-11-01 |
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| CN202210990159.7A Pending CN115256233A (en) | 2022-08-18 | 2022-08-18 | Disc surface finishing process of double-sided grinding machine table |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116749080A (en) * | 2023-08-18 | 2023-09-15 | 浙江求是半导体设备有限公司 | Dressing method |
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| US20110223836A1 (en) * | 2010-03-12 | 2011-09-15 | Duescher Wayne O | Three-point fixed-spindle floating-platen abrasive system |
| CN106312818A (en) * | 2016-09-23 | 2017-01-11 | 江苏吉星新材料有限公司 | Dressing method for ceramic disc for grinding |
| CN107077865A (en) * | 2014-11-12 | 2017-08-18 | Hoya株式会社 | The manufacture method of substrate for magnetic disc and the manufacture method of disk |
| CN207206150U (en) * | 2017-09-15 | 2018-04-10 | 济源石晶光电频率技术有限公司 | Wafer grinding machine with freeing wheel |
| CN109015338A (en) * | 2018-08-17 | 2018-12-18 | 铜陵晶越电子有限公司 | A kind of lapping machine for two-side of wafer for modifying amendment wheel with flatness |
| CN209335379U (en) * | 2018-12-07 | 2019-09-03 | 廊坊中电熊猫晶体科技有限公司 | It is a kind of with the quartz crystal slice grinder for reviewing one's lessons by oneself orthofunction |
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2022
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Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1394718A (en) * | 2001-06-29 | 2003-02-05 | "科研工艺研究院"股份公司 | Method for repairing and maintaining grinding board by using double-board grinding machine |
| US20110223836A1 (en) * | 2010-03-12 | 2011-09-15 | Duescher Wayne O | Three-point fixed-spindle floating-platen abrasive system |
| CN107077865A (en) * | 2014-11-12 | 2017-08-18 | Hoya株式会社 | The manufacture method of substrate for magnetic disc and the manufacture method of disk |
| CN106312818A (en) * | 2016-09-23 | 2017-01-11 | 江苏吉星新材料有限公司 | Dressing method for ceramic disc for grinding |
| CN207206150U (en) * | 2017-09-15 | 2018-04-10 | 济源石晶光电频率技术有限公司 | Wafer grinding machine with freeing wheel |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116749080A (en) * | 2023-08-18 | 2023-09-15 | 浙江求是半导体设备有限公司 | Dressing method |
| CN116749080B (en) * | 2023-08-18 | 2023-11-14 | 浙江求是半导体设备有限公司 | Dressing method |
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