CN209335379U - It is a kind of with the quartz crystal slice grinder for reviewing one's lessons by oneself orthofunction - Google Patents
It is a kind of with the quartz crystal slice grinder for reviewing one's lessons by oneself orthofunction Download PDFInfo
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Abstract
本实用新型提出的是一种带有自修正功能的石英晶体片研磨机,其结构包括工作台、上研磨盘、下研磨盘、立柱、控制面板;其中下研磨盘的中心设有转轴,转轴安装于工作台的上表面中心,立柱呈倒L型,其底部设于工作台的上表面一侧,其顶部通过气缸连接上研磨盘的转轴,控制面板设置于工作台的上表面另一侧;上研磨盘与下研磨盘的转轴同轴。本实用新型的优点:通过中心齿圈和外齿圈共同驱动游星轮公转和自转,并采用上研磨盘和下研磨盘同时对石英晶体片研磨,效率较高;在研磨过程中自适应修整研磨盘,充分保证研磨盘的平整度,具有设计科学、实用性强、使用方便、修盘高效等优点。
The utility model proposes a quartz crystal plate grinder with a self-correcting function. Its structure includes a workbench, an upper grinding disc, a lower grinding disc, a column, and a control panel; the center of the lower grinding disc is provided with a rotating shaft. Installed in the center of the upper surface of the workbench, the column is inverted L-shaped, the bottom is set on one side of the upper surface of the workbench, the top is connected to the rotating shaft of the grinding disc through the cylinder, and the control panel is set on the other side of the upper surface of the workbench ; The shafts of the upper grinding disc and the lower grinding disc are coaxial. The utility model has the advantages of driving the revolution and rotation of the planetary wheel through the central ring gear and the outer ring gear, and using the upper grinding disc and the lower grinding disc to grind the quartz crystal sheet at the same time, with high efficiency; self-adaptive trimming during the grinding process The grinding disc fully guarantees the flatness of the grinding disc, and has the advantages of scientific design, strong practicability, convenient use, and efficient disc repairing.
Description
技术领域technical field
本实用新型涉及的是一种带有自修正功能的石英晶体片研磨机,属于石英晶体片加工技术领域。The utility model relates to a quartz crystal plate grinder with a self-correcting function, which belongs to the technical field of quartz crystal plate processing.
背景技术Background technique
石英晶体片不但是较好的光学材料,而且是重要的压电材料,在加工过程中需要对石英晶体片的表面进行研磨抛光处理,在对石英晶体片进行研磨抛光处理时,通常需要用到研磨机。现有的研磨机一般采用单面研磨和双面研磨两种方式来对石英晶体片表面进行研磨处理,但单面研磨速度慢,效率低;双面研磨方式将石英晶体片的正反两面同时进行研磨处理,虽然能大大提高研磨效率,但是研磨盘经过石英晶体片长时间研磨后,容易造成表面不平整,此时需要将游星轮换下,放入修正轮对研磨盘进行修整,在进行大批量生产时,对研磨盘的磨耗也相应增大,需要频繁对研磨盘进行修整,导致生产效率降低、成本增加。Quartz crystal sheet is not only a good optical material, but also an important piezoelectric material. During the processing, the surface of the quartz crystal sheet needs to be ground and polished. When grinding and polishing the quartz crystal sheet, it is usually necessary to use grinder. Existing grinding machines generally use two methods of single-side grinding and double-side grinding to grind the surface of the quartz crystal sheet, but the single-side grinding speed is slow and the efficiency is low; the double-side grinding method simultaneously grinds the front and back sides of the quartz crystal sheet. Although the grinding process can greatly improve the grinding efficiency, the surface of the grinding disc is likely to be uneven after being ground for a long time by the quartz crystal. During mass production, the wear and tear on the grinding discs also increases accordingly, and the grinding discs need to be trimmed frequently, resulting in reduced production efficiency and increased costs.
发明内容Contents of the invention
本实用新型提出的是一种带有自修正功能的石英晶体片研磨机,其结构设计合理,使用方便,成本较低,可灵活调节,能有效弥补因研磨盘平面度降低,导致研磨质量降低问题的可调节石英晶体片研磨平整度的修正工艺。本实用新型在基于现有工艺的基础上对研磨盘盘平控制以实现高水平的提升,使用方便,实用性强,必要时可结合采用修正轮修正研磨盘工艺方法。The utility model proposes a quartz crystal plate grinder with a self-correcting function, which has reasonable structural design, convenient use, low cost, flexible adjustment, and can effectively compensate for the decrease in grinding quality caused by the decrease in the flatness of the grinding disc. Problematic correction process for adjusting the flatness of quartz crystal plate grinding. The utility model controls the flatness of the grinding disc on the basis of the existing technology to achieve a high level of improvement, is convenient to use and has strong practicability, and can be combined with the correction wheel to correct the grinding disc process method when necessary.
本实用新型的技术解决方案:一种带有自修正功能的石英晶体片研磨机,其结构包括工作台1、上研磨盘2、下研磨盘3、立柱7、控制面板8;其中下研磨盘3的中心设有转轴,转轴安装于工作台1的上表面中心,立柱7呈倒L型,其底部设于工作台1的上表面一侧,其顶部通过气缸连接上研磨盘2的转轴,控制面板8设置于工作台1的上表面另一侧;上研磨盘2与下研磨盘3的转轴同轴。The technical solution of the utility model: a quartz crystal plate grinder with a self-correcting function, its structure includes a workbench 1, an upper grinding disc 2, a lower grinding disc 3, a column 7, and a control panel 8; wherein the lower grinding disc The center of 3 is provided with a rotating shaft, and the rotating shaft is installed in the center of the upper surface of the workbench 1. The column 7 is inverted L-shaped, and its bottom is arranged on one side of the upper surface of the workbench 1, and its top is connected to the rotating shaft of the upper grinding disc 2 through a cylinder. The control panel 8 is arranged on the other side of the upper surface of the workbench 1 ; the rotation axes of the upper grinding disc 2 and the lower grinding disc 3 are coaxial.
优选的,所述的下研磨盘3的上表面包括外齿圈4、中心齿圈5、游星轮6;其中中心齿圈5设于下研磨盘3的旋转中心,外齿圈4设于下研磨盘3的外沿,中心齿圈5和外齿圈4的旋转轴同轴,中心齿圈5与外齿圈4之间等距地设有5个尺寸相同的游星轮6,每个游星轮6与中心齿圈5的外侧和外齿圈4的内侧紧密啮合。Preferably, the upper surface of the lower grinding disc 3 includes an outer gear ring 4, a central gear ring 5, and a planetary gear 6; wherein the central gear ring 5 is arranged at the rotation center of the lower grinding disc 3, and the outer gear ring 4 is located at the center of rotation of the lower grinding disc 3. On the outer edge of the lower grinding disc 3, the rotation axes of the central ring gear 5 and the outer ring gear 4 are coaxial, and five planetary gears 6 of the same size are equidistantly arranged between the central ring gear 5 and the outer ring gear 4, and each A planetary wheel 6 is tightly meshed with the outer side of the central ring gear 5 and the inner side of the outer ring gear 4 .
本实用新型的优点:通过设置中心齿圈和外齿圈,共同驱动游星轮公转和自转,并采用上研磨盘和下研磨盘同时对石英晶体片研磨,效率较高;此外通过调整副机转速切换圈数达到在研磨过程中自适应修整研磨盘,充分保证研磨盘的平整度,具有设计科学、实用性强、使用方便、修盘高效等优点。The utility model has the advantages: by arranging the central ring gear and the outer ring gear, the planetary wheel is jointly driven to revolve and rotate, and the upper grinding disc and the lower grinding disc are used to grind the quartz crystal sheet at the same time, so the efficiency is high; in addition, by adjusting the auxiliary machine The number of rotating speed switching circles can achieve self-adaptive dressing of the grinding disc during the grinding process, fully ensuring the flatness of the grinding disc, and has the advantages of scientific design, strong practicability, convenient use, and high efficiency of disc repairing.
附图说明Description of drawings
附图1是带有自修正功能的石英晶体片研磨机的结构示意图。Accompanying drawing 1 is the structure schematic diagram of the quartz crystal plate grinder with self-correction function.
附图2是上、下研磨盘、中心齿圈、外齿圈啮合结构剖面图。Accompanying drawing 2 is the sectional view of the meshing structure of the upper and lower grinding discs, the central ring gear, and the outer ring gear.
附图3-1、3-2是游星轮正转、逆转俯视示意图。Accompanying drawing 3-1, 3-2 are the top view schematic diagrams of star wheel forward rotation and reverse rotation.
附图4-1、4-2、4-3是游星轮正转、逆转工作状态下上下研磨盘内侧变形示意图,其中图4-1是工作前形状示意图,图4-2是游星轮正转工作形状示意图,图4-3是游星轮逆转工作形状示意图。Attached drawings 4-1, 4-2, and 4-3 are schematic diagrams of the deformation of the inner side of the upper and lower grinding discs under the normal and reverse rotation of the star wheel, in which Figure 4-1 is a schematic diagram of the shape before work, and Figure 4-2 is a schematic diagram of the star wheel The schematic diagram of the forward rotation working shape, and Fig. 4-3 is the schematic diagram of the reverse rotation working shape of the planetary wheel.
图中1是工作台、2是上研磨盘、3是下研磨盘、4是外齿圈、5是中心齿圈、6是游星轮、7是立柱、8是控制面板。Among the figure, 1 is a workbench, 2 is an upper grinding disc, 3 is a lower grinding disc, 4 is an outer ring gear, 5 is a central gear ring, 6 is a planetary wheel, 7 is a column, and 8 is a control panel.
具体实施方式Detailed ways
如图1所示,一种带有自修正功能的石英晶体片研磨机,其结构包括工作台1、上研磨盘2、下研磨盘3、立柱7、控制面板8;其中下研磨盘3通过转轴安装于工作台1的上表面中心,立柱7呈倒L型,其底部设于工作台1的上表面一侧,其顶部通过气缸和转轴连接上研磨盘2,上研磨盘2与下研磨盘3的转轴同轴;控制面板8设于工作台1的上表面另一侧。As shown in Figure 1, a quartz crystal plate grinder with a self-correcting function has a structure including a workbench 1, an upper grinding disc 2, a lower grinding disc 3, a column 7, and a control panel 8; wherein the lower grinding disc 3 passes The rotating shaft is installed in the center of the upper surface of the workbench 1. The column 7 is in an inverted L shape, and its bottom is set on the upper surface of the workbench 1. The rotating shafts of the disk 3 are coaxial; the control panel 8 is arranged on the other side of the upper surface of the workbench 1 .
所述的上研磨盘2和下研磨盘3为球墨铸铁材料,上研磨盘2的下表面和下研磨盘3的上表面均为光滑的平面,其表面设置有凹槽,以便研磨液能够均匀流动;上研磨盘2中心的转轴通过螺钉固定在支架上,通过气缸调节可上下升降,下降后随中心齿圈做圆周运动;下研磨盘3不升降,其底部设置了调节水平的三点支撑结构,可对下研磨盘3的偏斜进行微调,下研磨盘3中心的转轴通过螺钉固定在工作台1内部的托盘上,可随托盘做圆周运动。The upper grinding disc 2 and the lower grinding disc 3 are ductile iron materials, the lower surface of the upper grinding disc 2 and the upper surface of the lower grinding disc 3 are smooth planes, and grooves are provided on the surface so that the grinding liquid can be evenly Flow; the rotating shaft in the center of the upper grinding disc 2 is fixed on the bracket by screws, and can be adjusted up and down by the cylinder, and then moves circularly with the central ring gear after falling; the lower grinding disc 3 does not rise and fall, and a three-point support for adjusting the level is set at the bottom structure, the deflection of the lower grinding disc 3 can be fine-tuned, and the rotating shaft at the center of the lower grinding disc 3 is fixed on the tray inside the workbench 1 by screws, and can move circularly with the tray.
如图2所示,上研磨盘2下降后压在游星轮上表面,下研磨盘3与上研磨盘2同轴、同外径,中心齿圈5设于下研磨盘3的旋转中心,外齿圈4设于下研磨盘3的外沿,中心齿圈5和外齿圈4的旋转轴同轴,中心齿圈5与外齿圈4之间等距地设有5个尺寸相同的游星轮6,每个游星轮6与中心齿圈5的外侧和外齿圈4的内侧紧密啮合。外齿圈4采用Φ330mm,305齿的设计;中心齿圈5采用Φ195mm,100齿的设计;游星轮6采用Φ231mm,108齿的设计。As shown in Figure 2, the upper grinding disc 2 is lowered and pressed on the upper surface of the planetary wheel, the lower grinding disc 3 is coaxial with the upper grinding disc 2 and has the same outer diameter, and the central ring gear 5 is arranged at the rotation center of the lower grinding disc 3, The outer ring gear 4 is arranged on the outer edge of the lower grinding disc 3, the rotating shafts of the central ring gear 5 and the outer ring gear 4 are coaxial, and 5 same-sized ring gears are equidistantly arranged between the central ring gear 5 and the outer ring gear 4. Planetary wheels 6, each planetary wheel 6 is tightly meshed with the outer side of the central ring gear 5 and the inner side of the outer ring gear 4. The outer ring gear 4 adopts the design of Φ330mm and 305 teeth; the central ring gear 5 adopts the design of Φ195mm and 100 teeth; the planetary wheel 6 adopts the design of Φ231mm and 108 teeth.
如图3-1、3-2所示,当中心齿圈5的转速大于外齿圈4的转速时,游星轮6与外齿圈4做相对运动,与中心齿圈5做相向运动,下研磨盘3整体形成中间高四周低的形状,如图4-2所示;当外齿圈4的转速大于中心齿圈5的转速时,游星轮6与外齿圈4做相向运动,与中心齿圈5做相对运动,下研磨盘3整体形成中间低四周高的形状,如图4-3所示。As shown in Figure 3-1 and 3-2, when the rotation speed of the central ring gear 5 is greater than the rotation speed of the outer ring gear 4, the planetary wheel 6 and the outer ring gear 4 will move relative to each other, and will move opposite to the center ring gear 5. The lower grinding disc 3 forms a shape that is high in the middle and low around the periphery, as shown in Figure 4-2; when the rotation speed of the outer ring gear 4 is greater than the rotation speed of the center ring gear 5, the planetary wheel 6 and the outer ring gear 4 move in opposite directions. Relatively moving with the central ring gear 5, the lower grinding disc 3 forms a shape with a lower center and a higher perimeter as a whole, as shown in Figure 4-3.
本实用新型提出的研磨机主体采用型号为9B-5L(Ⅱ)的研磨机,主电机采用EV1000-4T0037G变频调速器控制,输入电源为三相380V,控制面板8采用的可编程控制器型号为 SIEMENS S7-200CN。本实用新型采用3-Motor驱动方式,即上、下研磨盘、外齿圈和中心齿圈分别由独立的电机控制,控制面板8通过导线连接各台电机,并控制其旋转方向和速度。The main body of the grinding machine proposed by the utility model adopts the grinding machine of model 9B-5L (Ⅱ), the main motor is controlled by EV1000-4T0037G frequency conversion speed regulator, the input power is three-phase 380V, and the programmable controller model adopted by the control panel 8 For SIEMENS S7-200CN. The utility model adopts a 3-Motor drive mode, that is, the upper and lower grinding discs, the outer ring gear and the center ring gear are respectively controlled by independent motors, and the control panel 8 is connected to each motor through a wire, and controls its rotation direction and speed.
实际工作时,将石英晶体片放置在游星轮中,设置上研磨盘转速:游星轮公转速度:下研磨盘整体转速=1:1:-3,由于上、下研磨盘转向相反,石英晶体片上下表面与相对研磨盘形成了相同的速度差,保证了石英晶体片上下表面磨削量的一致,使得石英晶体片得到极好的平行度和平面度。During actual work, place the quartz crystal piece in the star wheel, set the speed of the upper grinding disc: the revolution speed of the star wheel: the overall speed of the lower grinding disc = 1:1:-3, because the upper and lower grinding discs turn in opposite directions, the quartz The upper and lower surfaces of the crystal sheet form the same speed difference with the relative grinding disc, which ensures the consistent grinding amount of the upper and lower surfaces of the quartz crystal sheet, and makes the quartz crystal sheet obtain excellent parallelism and flatness.
在正常加工石英晶体片研磨过程中,不再需要修正轮修正研磨盘,而是通过合理设定游星轮正转和逆转的圈数、转速等参数,实现研磨机盘面平整度在工艺要求的范围内,且研磨盘平整度变化后,能够在石英晶体片研磨过程中得到自动修正。In the normal process of grinding quartz crystal slices, it is no longer necessary to correct the grinding disc with the correction wheel, but by setting the parameters such as the number of forward and reverse rotations and rotational speeds of the star wheel reasonably, the flatness of the disc surface of the grinding machine can be achieved within the process requirements. Within the range, and after the flatness of the grinding disc changes, it can be automatically corrected during the grinding process of the quartz crystal plate.
通过点击控制面板8上的触摸屏,可设定和修改“主机转速”、“副机转速+”、“副机转速-”、“副机转速切换圈数+”、“副机转速切换全换圈数-”等研磨参数,控制各研磨盘的旋转速度;主机副机转速可以参照正常研磨时主机副机转速比例设定较快转速,以达到快速修盘的目的。“副机转速切换圈数+”与“副机转速切换圈数-”的设定可以根据研磨盘的平整度进行更改,例如:若下研磨盘截面从外圈到内圈边缘截面高低呈逐步降低趋势(即外高内低),那么“副机转速切换圈数+”设置为70圈,“副机转速切换圈数-”设置为30圈,相反,若下研磨盘截面从外圈到内圈边缘截面高低呈逐步升高趋势(即外低内高),那么“副机转速切换圈数+”设置为30圈,“副机转速切换圈数-”设置为70圈。By clicking the touch screen on the control panel 8, you can set and modify the "master speed", "auxiliary speed +", "auxiliary speed -", "secondary speed switching circles +", "auxiliary speed switching full change laps-" and other grinding parameters to control the rotation speed of each grinding disc; the speed of the main machine and auxiliary machine can be set at a faster speed by referring to the ratio of the speed of the main machine and auxiliary machine during normal grinding, so as to achieve the purpose of rapid disk repair. The settings of "Auxiliary Machine Speed Switching Turns+" and "Auxiliary Machine Speed Switching Turns-" can be changed according to the flatness of the grinding disc. Decreasing trend (that is, the outer high and inner low), then the "auxiliary machine speed switching circles +" is set to 70 circles, and the "auxiliary machine speed switching circles -" is set to 30 circles. On the contrary, if the section of the lower grinding disc is from the outer circle to the The height of the edge section of the inner ring is gradually increasing (i.e. low on the outside and high on the inside), then the "secondary engine speed switching turns +" is set to 30 turns, and the "auxiliary engine speed switching turns -" is set to 70 turns.
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| CN110524409A (en) * | 2019-09-04 | 2019-12-03 | 芜湖森永机器有限公司 | A polishing and grinding device |
| CN110575895A (en) * | 2019-10-20 | 2019-12-17 | 连云港睿晶石英材料有限公司 | Sample grinding equipment for quartz material detection |
| CN111359717A (en) * | 2020-02-28 | 2020-07-03 | 新沂市引河石英材料有限公司 | Efficient grinding machine for processing fused quartz powder and working method thereof |
| CN111761505A (en) * | 2020-07-10 | 2020-10-13 | 浙江中晶科技股份有限公司 | Silicon wafer double-side grinding equipment and production process thereof |
| CN111761516A (en) * | 2020-07-10 | 2020-10-13 | 浙江中晶科技股份有限公司 | Silicon wafer grinding disc correction equipment and correction process thereof |
| CN113231957A (en) * | 2021-04-29 | 2021-08-10 | 金华博蓝特电子材料有限公司 | Wafer grinding process based on double-side grinding equipment and semiconductor wafer |
| CN114406851A (en) * | 2022-01-12 | 2022-04-29 | 漳州市合琦靶材科技有限公司 | Continuous preparation system and method for alloy target |
| CN115256233A (en) * | 2022-08-18 | 2022-11-01 | 福建晶安光电有限公司 | Disc surface finishing process of double-sided grinding machine table |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110524409A (en) * | 2019-09-04 | 2019-12-03 | 芜湖森永机器有限公司 | A polishing and grinding device |
| CN110575895A (en) * | 2019-10-20 | 2019-12-17 | 连云港睿晶石英材料有限公司 | Sample grinding equipment for quartz material detection |
| CN111359717A (en) * | 2020-02-28 | 2020-07-03 | 新沂市引河石英材料有限公司 | Efficient grinding machine for processing fused quartz powder and working method thereof |
| CN111761505A (en) * | 2020-07-10 | 2020-10-13 | 浙江中晶科技股份有限公司 | Silicon wafer double-side grinding equipment and production process thereof |
| CN111761516A (en) * | 2020-07-10 | 2020-10-13 | 浙江中晶科技股份有限公司 | Silicon wafer grinding disc correction equipment and correction process thereof |
| CN113231957A (en) * | 2021-04-29 | 2021-08-10 | 金华博蓝特电子材料有限公司 | Wafer grinding process based on double-side grinding equipment and semiconductor wafer |
| CN114406851A (en) * | 2022-01-12 | 2022-04-29 | 漳州市合琦靶材科技有限公司 | Continuous preparation system and method for alloy target |
| CN115256233A (en) * | 2022-08-18 | 2022-11-01 | 福建晶安光电有限公司 | Disc surface finishing process of double-sided grinding machine table |
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