MY148619A - Pusher, pusher unit and semiconductor testing apparatus - Google Patents
Pusher, pusher unit and semiconductor testing apparatusInfo
- Publication number
- MY148619A MY148619A MYPI20063467A MYPI20063467A MY148619A MY 148619 A MY148619 A MY 148619A MY PI20063467 A MYPI20063467 A MY PI20063467A MY PI20063467 A MYPI20063467 A MY PI20063467A MY 148619 A MY148619 A MY 148619A
- Authority
- MY
- Malaysia
- Prior art keywords
- pusher
- semiconductor device
- test
- device under
- under test
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
- G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Power Engineering (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2005/013409 WO2007010610A1 (ja) | 2005-07-21 | 2005-07-21 | プッシャ、プッシャユニットおよび半導体試験装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
MY148619A true MY148619A (en) | 2013-05-15 |
Family
ID=37668499
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
MYPI20063467A MY148619A (en) | 2005-07-21 | 2006-07-20 | Pusher, pusher unit and semiconductor testing apparatus |
Country Status (6)
Country | Link |
---|---|
US (1) | US7804316B2 (ja) |
JP (1) | JPWO2007010610A1 (ja) |
KR (1) | KR20100017958A (ja) |
MY (1) | MY148619A (ja) |
TW (1) | TW200704940A (ja) |
WO (1) | WO2007010610A1 (ja) |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
MY148803A (en) | 2007-02-23 | 2013-05-31 | Advantest Corp | Electronic component pressing device and electronic component test apparatus |
JP5282930B2 (ja) * | 2007-10-09 | 2013-09-04 | 住友電気工業株式会社 | 光素子温度特性検査装置 |
WO2009101706A1 (ja) * | 2008-02-15 | 2009-08-20 | Advantest Corporation | マッチプレートベース部および本体部、電子部品ハンドリング装置、ならびにマッチプレート本体部およびテスト部ユニットの交換治具および交換方法 |
US20100066395A1 (en) | 2008-03-13 | 2010-03-18 | Johnson Morgan T | Wafer Prober Integrated With Full-Wafer Contacter |
US8030957B2 (en) | 2009-03-25 | 2011-10-04 | Aehr Test Systems | System for testing an integrated circuit of a device and its method of use |
JPWO2011007419A1 (ja) * | 2009-07-14 | 2012-12-20 | 株式会社アドバンテスト | 電子部品押圧装置、電子部品試験装置及びインタフェース装置 |
KR101104413B1 (ko) * | 2009-09-25 | 2012-01-16 | 세크론 주식회사 | 반도체 소자 테스트용 접속 장치 및 이를 포함하는 테스트 핸들러 |
JP5910303B2 (ja) * | 2012-05-21 | 2016-04-27 | 三菱電機株式会社 | 半導体検査治具 |
KR101936348B1 (ko) * | 2012-09-17 | 2019-01-08 | 삼성전자주식회사 | 급속 온도 변환이 가능한 테스트 핸들러 및 그를 이용한 반도체 소자의 테스트 방법 |
KR101532391B1 (ko) * | 2014-04-10 | 2015-06-30 | 주식회사 아이에스시 | 푸셔 장치 |
JP6445340B2 (ja) * | 2015-02-06 | 2018-12-26 | 株式会社エンプラス | 電気部品用ソケット |
US9921265B2 (en) | 2015-12-18 | 2018-03-20 | Sensata Technologies, Inc. | Thermal clutch for thermal control unit and methods related thereto |
KR20180101476A (ko) | 2016-01-08 | 2018-09-12 | 에어 테스트 시스템즈 | 일렉트로닉스 테스터 내의 디바이스들의 열 제어를 위한 방법 및 시스템 |
JP6790768B2 (ja) * | 2016-11-30 | 2020-11-25 | セイコーエプソン株式会社 | 電子部品搬送装置および電子部品検査装置 |
JP2018081021A (ja) * | 2016-11-17 | 2018-05-24 | 三菱電機株式会社 | 押さえ治具 |
KR102295094B1 (ko) * | 2017-10-01 | 2021-08-31 | (주)아테코 | 전자부품소자 테스트 온도 조절 장치와 방법, 테스트 챔버의 푸싱 장치, 및 전자부품 테스트 장치 |
KR20200012211A (ko) | 2018-07-26 | 2020-02-05 | 삼성전자주식회사 | 반도체 소자 테스트 시스템, 반도체 소자 테스트 방법, 및 반도체 소자 제조 방법 |
JP7270348B2 (ja) * | 2018-09-10 | 2023-05-10 | 三菱電機株式会社 | 電気特性検査治具 |
KR102185035B1 (ko) * | 2019-07-02 | 2020-12-01 | 세메스 주식회사 | 반도체 패키지 테스트 장치 |
TWI734238B (zh) * | 2019-10-29 | 2021-07-21 | 鴻勁精密股份有限公司 | 分類設備及其溫控裝置 |
KR102281297B1 (ko) * | 2019-11-13 | 2021-07-23 | 주식회사 아이에스시 | 전기적 검사를 위한 푸셔장치 |
KR102329619B1 (ko) * | 2020-01-20 | 2021-11-22 | 주식회사 제너릭스 | 반도체 소자 테스트 장비용 푸셔 장치 |
TWI744205B (zh) * | 2021-03-16 | 2021-10-21 | 力成科技股份有限公司 | 測試分類機的共用型匹配板 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3099254B2 (ja) * | 1994-02-28 | 2000-10-16 | 安藤電気株式会社 | 浮動機構つき吸着ハンドおよび搬送接触機構 |
JPH0933606A (ja) * | 1995-07-20 | 1997-02-07 | Shin Etsu Polymer Co Ltd | 半導体素子検査用治具 |
JPH09175647A (ja) | 1995-10-27 | 1997-07-08 | Advantest Corp | 半導体デバイス搬送処理装置 |
US5640303A (en) * | 1995-10-30 | 1997-06-17 | Precision Connector Designs, Inc. | Interconnection apparatus for semiconductor/integrated circuit devices |
JPH1058367A (ja) | 1996-08-23 | 1998-03-03 | Advantest Corp | Ic搬送装置 |
JP3951436B2 (ja) * | 1998-04-01 | 2007-08-01 | 株式会社アドバンテスト | Ic試験装置 |
JPH11329646A (ja) * | 1998-05-15 | 1999-11-30 | Jsr Corp | 検査装置 |
JPH11344527A (ja) * | 1998-06-02 | 1999-12-14 | Ando Electric Co Ltd | 高温ハンドラの測定機構 |
JP4100790B2 (ja) | 1998-12-08 | 2008-06-11 | 株式会社アドバンテスト | 電子部品吸着装置および電子部品試験装置 |
US6301097B1 (en) * | 1999-07-27 | 2001-10-09 | International Business Machines Corporation | Inflatable sealing system for low temperature electronic module |
JP4327335B2 (ja) * | 2000-06-23 | 2009-09-09 | 株式会社アドバンテスト | コンタクトアームおよびこれを用いた電子部品試験装置 |
JP2002160187A (ja) * | 2000-11-24 | 2002-06-04 | Seiko Epson Corp | 保持装置、搬送装置、ic検査装置、保持方法、搬送方法及びic検査方法 |
JP2002174658A (ja) | 2000-12-05 | 2002-06-21 | Advantest Corp | ハンドラおよび電子部品試験装置 |
-
2005
- 2005-07-21 KR KR1020097027388A patent/KR20100017958A/ko not_active Application Discontinuation
- 2005-07-21 JP JP2007525477A patent/JPWO2007010610A1/ja not_active Abandoned
- 2005-07-21 WO PCT/JP2005/013409 patent/WO2007010610A1/ja active Application Filing
-
2006
- 2006-07-20 TW TW095126485A patent/TW200704940A/zh unknown
- 2006-07-20 MY MYPI20063467A patent/MY148619A/en unknown
-
2008
- 2008-01-18 US US12/016,211 patent/US7804316B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
US7804316B2 (en) | 2010-09-28 |
TW200704940A (en) | 2007-02-01 |
WO2007010610A1 (ja) | 2007-01-25 |
US20090102497A1 (en) | 2009-04-23 |
JPWO2007010610A1 (ja) | 2009-01-29 |
KR20100017958A (ko) | 2010-02-16 |
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