MY142016A - Antireflective compositions for photoresists - Google Patents

Antireflective compositions for photoresists

Info

Publication number
MY142016A
MY142016A MYPI20054304A MYPI20054304A MY142016A MY 142016 A MY142016 A MY 142016A MY PI20054304 A MYPI20054304 A MY PI20054304A MY PI20054304 A MYPI20054304 A MY PI20054304A MY 142016 A MY142016 A MY 142016A
Authority
MY
Malaysia
Prior art keywords
photoresists
polymer
antireflective compositions
relates
coating composition
Prior art date
Application number
MYPI20054304A
Other languages
English (en)
Inventor
Hengpeng Wu
Shuji Ding-Lee
Zhong Xiang
Aritaka Hishida
Jianhui Shan
Hong Zhuang
Original Assignee
Az Electronic Materials Usa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/941,221 external-priority patent/US20060057501A1/en
Application filed by Az Electronic Materials Usa filed Critical Az Electronic Materials Usa
Publication of MY142016A publication Critical patent/MY142016A/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/091—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers characterised by antireflection means or light filtering or absorbing means, e.g. anti-halation, contrast enhancement
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F8/00—Chemical modification by after-treatment
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03C—PHOTOSENSITIVE MATERIALS FOR PHOTOGRAPHIC PURPOSES; PHOTOGRAPHIC PROCESSES, e.g. CINE, X-RAY, COLOUR, STEREO-PHOTOGRAPHIC PROCESSES; AUXILIARY PROCESSES IN PHOTOGRAPHY
    • G03C5/00—Photographic processes or agents therefor; Regeneration of such processing agents

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Architecture (AREA)
  • Structural Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Paints Or Removers (AREA)
  • Materials For Photolithography (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Polyethers (AREA)
  • Polyesters Or Polycarbonates (AREA)
MYPI20054304A 2004-09-15 2005-09-13 Antireflective compositions for photoresists MY142016A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/941,221 US20060057501A1 (en) 2004-09-15 2004-09-15 Antireflective compositions for photoresists
US11/159,002 US7691556B2 (en) 2004-09-15 2005-06-22 Antireflective compositions for photoresists

Publications (1)

Publication Number Publication Date
MY142016A true MY142016A (en) 2010-08-16

Family

ID=35797449

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI20054304A MY142016A (en) 2004-09-15 2005-09-13 Antireflective compositions for photoresists

Country Status (7)

Country Link
US (1) US7691556B2 (enExample)
EP (1) EP1805561B1 (enExample)
JP (2) JP5320624B2 (enExample)
KR (1) KR101270508B1 (enExample)
MY (1) MY142016A (enExample)
TW (1) TWI408189B (enExample)
WO (1) WO2006030320A2 (enExample)

Families Citing this family (47)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7355384B2 (en) * 2004-04-08 2008-04-08 International Business Machines Corporation Apparatus, method, and computer program product for monitoring and controlling a microcomputer using a single existing pin
US7691556B2 (en) 2004-09-15 2010-04-06 Az Electronic Materials Usa Corp. Antireflective compositions for photoresists
US7553905B2 (en) 2005-10-31 2009-06-30 Az Electronic Materials Usa Corp. Anti-reflective coatings
US7704670B2 (en) * 2006-06-22 2010-04-27 Az Electronic Materials Usa Corp. High silicon-content thin film thermosets
US7754414B2 (en) * 2006-07-12 2010-07-13 Az Electronic Materials Usa Corp. Antireflective coating compositions
US7741230B2 (en) * 2006-08-08 2010-06-22 Intel Corporation Highly-selective metal etchants
US7638262B2 (en) 2006-08-10 2009-12-29 Az Electronic Materials Usa Corp. Antireflective composition for photoresists
US7416834B2 (en) 2006-09-27 2008-08-26 Az Electronic Materials Usa Corp. Antireflective coating compositions
US7824844B2 (en) * 2007-01-19 2010-11-02 Az Electronic Materials Usa Corp. Solvent mixtures for antireflective coating compositions for photoresists
US8026040B2 (en) * 2007-02-20 2011-09-27 Az Electronic Materials Usa Corp. Silicone coating composition
JP2010519362A (ja) * 2007-02-26 2010-06-03 エイゼット・エレクトロニック・マテリアルズ・ユーエスエイ・コーポレイション シロキサンポリマーの製造方法
JP2010519398A (ja) 2007-02-27 2010-06-03 エイゼット・エレクトロニック・マテリアルズ・ユーエスエイ・コーポレイション ケイ素に基づく反射防止膜用組成物
US20080286689A1 (en) * 2007-05-14 2008-11-20 Hong Zhuang Antireflective Coating Compositions
US20090035704A1 (en) * 2007-08-03 2009-02-05 Hong Zhuang Underlayer Coating Composition Based on a Crosslinkable Polymer
US20090042133A1 (en) * 2007-08-10 2009-02-12 Zhong Xiang Antireflective Coating Composition
US8039201B2 (en) * 2007-11-21 2011-10-18 Az Electronic Materials Usa Corp. Antireflective coating composition and process thereof
WO2009075265A1 (ja) 2007-12-13 2009-06-18 Nissan Chemical Industries, Ltd. レジスト下層膜形成組成物及びレジストパターンの形成方法
US20090162800A1 (en) * 2007-12-20 2009-06-25 David Abdallah Process for Imaging a Photoresist Coated over an Antireflective Coating
US9138536B2 (en) 2008-04-01 2015-09-22 Gambro Lundia Ab Apparatus and a method for monitoring a vascular access
KR100894218B1 (ko) * 2008-04-11 2009-04-22 금호석유화학 주식회사 흡광제 및 이를 포함하는 유기 반사 방지막 조성물
US8329387B2 (en) * 2008-07-08 2012-12-11 Az Electronic Materials Usa Corp. Antireflective coating compositions
US8221965B2 (en) * 2008-07-08 2012-07-17 Az Electronic Materials Usa Corp. Antireflective coating compositions
KR100997502B1 (ko) * 2008-08-26 2010-11-30 금호석유화학 주식회사 개환된 프탈릭 언하이드라이드를 포함하는 유기 반사 방지막 조성물과 이의 제조방법
US20100092894A1 (en) * 2008-10-14 2010-04-15 Weihong Liu Bottom Antireflective Coating Compositions
US20100136477A1 (en) * 2008-12-01 2010-06-03 Ng Edward W Photosensitive Composition
US8551686B2 (en) * 2009-10-30 2013-10-08 Az Electronic Materials Usa Corp. Antireflective composition for photoresists
US8507192B2 (en) 2010-02-18 2013-08-13 Az Electronic Materials Usa Corp. Antireflective compositions and methods of using same
US8445181B2 (en) * 2010-06-03 2013-05-21 Az Electronic Materials Usa Corp. Antireflective coating composition and process thereof
US8465902B2 (en) * 2011-02-08 2013-06-18 Az Electronic Materials Usa Corp. Underlayer coating composition and processes thereof
US8906590B2 (en) 2011-03-30 2014-12-09 Az Electronic Materials Usa Corp. Antireflective coating composition and process thereof
US8623589B2 (en) 2011-06-06 2014-01-07 Az Electronic Materials Usa Corp. Bottom antireflective coating compositions and processes thereof
US9170494B2 (en) 2012-06-19 2015-10-27 Az Electronic Materials (Luxembourg) S.A.R.L. Antireflective compositions and methods of using same
US8906592B2 (en) 2012-08-01 2014-12-09 Az Electronic Materials (Luxembourg) S.A.R.L. Antireflective coating composition and process thereof
DE102012223387A1 (de) * 2012-12-17 2014-06-18 Evonik Industries Ag Verwendung von substituierten Benzylalkoholen in reaktiven Epoxy-Systemen
US9152051B2 (en) 2013-06-13 2015-10-06 Az Electronics Materials (Luxembourg) S.A.R.L. Antireflective coating composition and process thereof
KR102255221B1 (ko) 2013-12-27 2021-05-24 롬엔드하스전자재료코리아유한회사 나노리소그래피용 유기 바닥 반사방지 코팅 조성물
US9274426B2 (en) 2014-04-29 2016-03-01 Az Electronic Materials (Luxembourg) S.A.R.L. Antireflective coating compositions and processes thereof
TWI592760B (zh) * 2014-12-30 2017-07-21 羅門哈斯電子材料韓國有限公司 與經外塗佈之光致抗蝕劑一起使用之塗層組合物
CN115058175A (zh) 2015-08-31 2022-09-16 罗门哈斯电子材料有限责任公司 与外涂布光致抗蚀剂一起使用的涂料组合物
TWI646397B (zh) 2015-10-31 2019-01-01 南韓商羅門哈斯電子材料韓國公司 與外塗佈光致抗蝕劑一起使用的塗料組合物
KR102477802B1 (ko) 2016-12-21 2022-12-15 메르크 파텐트 게엠베하 금속 산화물 나노입자 및 유기 중합체를 함유하는 스핀-온 물질의 조성물
CN111604236B (zh) * 2020-06-11 2022-07-08 沈阳芯源微电子设备股份有限公司 一种以taiko环结构为衬底的超薄型晶圆的涂胶方法
KR102675074B1 (ko) * 2020-11-20 2024-06-12 삼성에스디아이 주식회사 레지스트 하층막용 조성물 및 이를 이용한 패턴형성방법
CN116082609B (zh) * 2021-11-05 2025-05-30 上海芯刻微材料技术有限责任公司 一种193nm湿法光刻胶用添加剂及其制备方法和应用
CN115808847B (zh) * 2023-01-18 2023-04-28 苏州润邦半导体材料科技有限公司 一种光刻胶底部的抗反射涂层树脂及其制备方法和应用
WO2024204232A1 (ja) 2023-03-27 2024-10-03 日産化学株式会社 レジスト下層膜形成組成物
KR20250029581A (ko) * 2023-08-23 2025-03-05 삼성에스디아이 주식회사 레지스트 하층막용 조성물 및 이를 이용한 패턴형성방법

Family Cites Families (57)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3232692A (en) * 1966-02-01 Sil\/kultaneously dyekng and resin finishing textiles
AT291571B (de) * 1969-07-29 1971-07-26 Vianova Kunstharz Ag Verfahren zur Herstellung von nach Neutralisation wasserverdünnbaren, wärmehärtbaren, selbstvernetzenden Copolymerisaten
US4064191A (en) * 1976-03-10 1977-12-20 American Cyanamid Company Coating composition containing an alkylated glycoluril, a polymeric non-self-crosslinking compound and an acid catalyst
US4229400A (en) * 1978-09-18 1980-10-21 Fiberite Corporation Mold component comprising a mat impregnated with a reaction product of an aminoplast resin and a polyalkylene glycol
US4254235A (en) * 1979-06-18 1981-03-03 Scm Corporation Thermosetting powder paints
US4255558A (en) * 1979-06-18 1981-03-10 Scm Corporation Self-curing thermosetting powder paints
JPS598770A (ja) 1982-07-07 1984-01-18 Toyobo Co Ltd 塗装鋼板用塗料組成物
US4491628A (en) * 1982-08-23 1985-01-01 International Business Machines Corporation Positive- and negative-working resist compositions with acid generating photoinitiator and polymer with acid labile groups pendant from polymer backbone
US4492628A (en) * 1982-08-25 1985-01-08 Freeport Kaolin Company Method of treating clay to improve its whiteness
US4487889A (en) * 1984-04-25 1984-12-11 Scm Corporation Aqueous glycoluril thermosetting coating
US5162510A (en) * 1986-05-02 1992-11-10 Hoechst Celanese Corporation Process for the preparation of photosensitive compositions containing a mixed ester o-quinone photosensitizer
DE3817012A1 (de) * 1988-05-19 1989-11-30 Basf Ag Positiv und negativ arbeitende strahlungsempfindliche gemische sowie verfahren zur herstellung von reliefmustern
EP0440374B1 (en) * 1990-01-30 1997-04-16 Wako Pure Chemical Industries Ltd Chemical amplified resist material
JP3000745B2 (ja) * 1991-09-19 2000-01-17 富士通株式会社 レジスト組成物とレジストパターンの形成方法
US5294680A (en) * 1992-07-24 1994-03-15 International Business Machines Corporation Polymeric dyes for antireflective coatings
US5371169A (en) * 1992-09-28 1994-12-06 Hoechst Celanese Corporation Novolak resin mixtures
US5294671A (en) * 1993-05-13 1994-03-15 American Cyanamid Company Monomeric aminoplast crosslinking agents
DE19501188A1 (de) 1995-01-17 1996-07-18 Henkel Kgaa 2-Phasen-Haarbehandlungsmittel III
JP3804138B2 (ja) * 1996-02-09 2006-08-02 Ｊｓｒ株式会社 ＡｒＦエキシマレーザー照射用感放射線性樹脂組成物
RU2194295C2 (ru) 1996-03-07 2002-12-10 З Би. Эф. Гудрич Кампэни Фоторезистная композиция и полимер
US5733714A (en) * 1996-09-30 1998-03-31 Clariant Finance (Bvi) Limited Antireflective coating for photoresist compositions
EP0851300B1 (en) * 1996-12-24 2001-10-24 Fuji Photo Film Co., Ltd. Bottom anti-reflective coating material composition and method of forming resist pattern using the same
US5981145A (en) * 1997-04-30 1999-11-09 Clariant Finance (Bvi) Limited Light absorbing polymers
US6468718B1 (en) * 1999-02-04 2002-10-22 Clariant Finance (Bvi) Limited Radiation absorbing polymer, composition for radiation absorbing coating, radiation absorbing coating and application thereof as anti-reflective coating
US5919599A (en) * 1997-09-30 1999-07-06 Brewer Science, Inc. Thermosetting anti-reflective coatings at deep ultraviolet
US5935760A (en) * 1997-10-20 1999-08-10 Brewer Science Inc. Thermosetting polyester anti-reflective coatings for multilayer photoresist processes
WO1999042508A1 (en) * 1998-02-23 1999-08-26 Stepan Company Low viscosity polyester polyols and methods for preparing same
TW457403B (en) * 1998-07-03 2001-10-01 Clariant Int Ltd Composition for forming a radiation absorbing coating containing blocked isocyanate compound and anti-reflective coating formed therefrom
US20020102483A1 (en) 1998-09-15 2002-08-01 Timothy Adams Antireflective coating compositions
WO2000017712A1 (en) 1998-09-23 2000-03-30 E.I. Du Pont De Nemours And Company Photoresists, polymers and processes for microlithography
EP1183571B1 (en) 1999-05-04 2010-06-02 E.I. Du Pont De Nemours And Company Fluorinated photoresists and processes for microlithography
US6187506B1 (en) * 1999-08-05 2001-02-13 Clariant Finance (Bvi) Limited Antireflective coating for photoresist compositions
US6444408B1 (en) * 2000-02-28 2002-09-03 International Business Machines Corporation High silicon content monomers and polymers suitable for 193 nm bilayer resists
US6653411B2 (en) * 2000-04-19 2003-11-25 Brewer Science, Inc. Anti-reflective coating compositions comprising polymerized aminoplasts
JP4121006B2 (ja) 2000-04-24 2008-07-16 株式会社リコー 印刷システム
JP3971088B2 (ja) 2000-06-30 2007-09-05 株式会社東芝 パターン形成方法
DE10038147A1 (de) * 2000-08-04 2002-02-14 Sued Chemie Ag Propfpolymere oder -copolymere
JP4117871B2 (ja) * 2000-11-09 2008-07-16 東京応化工業株式会社 反射防止膜形成用組成物
TW591341B (en) 2001-09-26 2004-06-11 Shipley Co Llc Coating compositions for use with an overcoated photoresist
US6652411B2 (en) * 2001-09-26 2003-11-25 General Motors Corporation Multi-speed transmission family with three planetary gear sets and five rotating torque transmitting mechanisms
GB2386354B (en) * 2002-03-15 2005-10-12 Myers Lorraine Patricia Improved trolley handle
US6894102B2 (en) * 2002-05-20 2005-05-17 General Electric Syndiotactic polystyrene blends
US6894104B2 (en) * 2002-05-23 2005-05-17 Brewer Science Inc. Anti-reflective coatings and dual damascene fill compositions comprising styrene-allyl alcohol copolymers
US6806026B2 (en) * 2002-05-31 2004-10-19 International Business Machines Corporation Photoresist composition
CN1275405C (zh) 2002-06-27 2006-09-13 中兴通讯股份有限公司 一种在通信系统中实现定位业务的方法
JP4250939B2 (ja) 2002-10-01 2009-04-08 日産化学工業株式会社 反射防止膜形成組成物
EP1560070B1 (en) 2002-10-09 2009-12-30 Nissan Chemical Industries, Ltd. Composition for forming antireflection film for lithography
US7038328B2 (en) * 2002-10-15 2006-05-02 Brewer Science Inc. Anti-reflective compositions comprising triazine compounds
US7691556B2 (en) 2004-09-15 2010-04-06 Az Electronic Materials Usa Corp. Antireflective compositions for photoresists
US20060057501A1 (en) * 2004-09-15 2006-03-16 Hengpeng Wu Antireflective compositions for photoresists
US7326523B2 (en) 2004-12-16 2008-02-05 International Business Machines Corporation Low refractive index polymers as underlayers for silicon-containing photoresists
US7816071B2 (en) 2005-02-10 2010-10-19 Az Electronic Materials Usa Corp. Process of imaging a photoresist with multiple antireflective coatings
TWI340296B (en) * 2005-03-20 2011-04-11 Rohm & Haas Elect Mat Coating compositions for use with an overcoated photoresist
EP1742108B1 (en) 2005-07-05 2015-10-28 Rohm and Haas Electronic Materials, L.L.C. Coating compositions for use with an overcoated photoresist
JP2007072102A (ja) 2005-09-06 2007-03-22 Fujifilm Corp ポジ型感光性組成物及びそれを用いたパターン形成方法
US7553905B2 (en) * 2005-10-31 2009-06-30 Az Electronic Materials Usa Corp. Anti-reflective coatings
JP4666166B2 (ja) 2005-11-28 2011-04-06 信越化学工業株式会社 レジスト下層膜材料及びパターン形成方法

Also Published As

Publication number Publication date
JP2013152485A (ja) 2013-08-08
US7691556B2 (en) 2010-04-06
EP1805561A2 (en) 2007-07-11
JP5613950B2 (ja) 2014-10-29
EP1805561B1 (en) 2018-10-24
WO2006030320A2 (en) 2006-03-23
WO2006030320A3 (en) 2006-05-04
TWI408189B (zh) 2013-09-11
US20060058468A1 (en) 2006-03-16
KR20070051363A (ko) 2007-05-17
JP2008513567A (ja) 2008-05-01
TW200626685A (en) 2006-08-01
KR101270508B1 (ko) 2013-06-19
JP5320624B2 (ja) 2013-10-23

Similar Documents

Publication Publication Date Title
MY142016A (en) Antireflective compositions for photoresists
WO2009019574A8 (en) Photoresist composition for deep uv and process thereof
ZA200800033B (en) Aqueous-based and transparent coating for making substrates
WO2005049681A3 (en) Antireflective coatings for via fill and photolithography applications and methods of preparation thereof
WO2009019575A3 (en) Underlayer coating composition based on a crosslinkable polymer
MY145421A (en) Antireflective composition for photoresists
TW200731016A (en) Composition for forming upper film and method for forming photoresist pattern
EP1906246A3 (en) Photosensitive resin composition, production method of cured relief pattern using the same and semiconductor device
TW200634075A (en) Coating compositions for marking substrates
NO20082877L (no) Forloperforbindelse til radioaktiv halogenmerket organisk forbindelse
MY126933A (en) Antireflective coating for photoresist compositions
NZ598184A (en) Composition for aqueous coating material and process for its production, and two-component curable aqueous coating material kit
AU2003262181A1 (en) Acrylate-functionalized alkyd compositions for fast-dry coatings
TW200643622A (en) Antireflective hardmask composition and methods for using same
TW200641534A (en) Photosensitive resin composition
WO2008132842A1 (ja) 感光性樹脂組成物、ドライフィルムおよびそれを用いた加工品
WO2006132962A3 (en) Novel photosensitive resin compositions
EP1704928A3 (en) Aqueous coating compositions
WO2011014020A3 (ko) 자가정렬 이중 패턴 형성용 포토레지스트 조성물
MY117828A (en) Antireflective coating material for photoresists.
TW200641073A (en) Polymer for forming anti-reflective coating layer
EP1889832A3 (en) Oxypentafluorosulfate compositions and processes for making them
WO2009048262A3 (en) Polymer for forming organic anti-reflective coating layer and composition including the same
TWI266956B (en) Positive photoresist composition for discharge nozzle-coating method and formation method of resist pattern
WO2008132966A1 (ja) 化合物、酸発生剤、レジスト組成物およびレジストパターン形成方法