MX9603406A - Detector mejorado de gas en el infrarrojo no dispersivo. - Google Patents

Detector mejorado de gas en el infrarrojo no dispersivo.

Info

Publication number
MX9603406A
MX9603406A MX9603406A MX9603406A MX9603406A MX 9603406 A MX9603406 A MX 9603406A MX 9603406 A MX9603406 A MX 9603406A MX 9603406 A MX9603406 A MX 9603406A MX 9603406 A MX9603406 A MX 9603406A
Authority
MX
Mexico
Prior art keywords
light source
waveguide
sensor
light detector
gas
Prior art date
Application number
MX9603406A
Other languages
English (en)
Inventor
Jacob Y Wong
Original Assignee
Telaire Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Telaire Systems Inc filed Critical Telaire Systems Inc
Publication of MX9603406A publication Critical patent/MX9603406A/es

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/59—Transmissivity
    • G01N21/61—Non-dispersive gas analysers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03—Cuvette constructions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03—Cuvette constructions
    • G01N21/0303—Optical path conditioning in cuvettes, e.g. windows; adapted optical elements or systems; path modifying or adjustment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

Un detector mejorado de gas en el infrarrojo no dispersivo (NDIR) miniaturizado se fabrica utilizando técnicas de micromaquinado de semiconductor a partir de un material semiconductor tal como SI o GaAS; el detector de gas NDIR (28) incluye una guía de onda optica (30), una fuente de luz (32) en un extremo de la guía, por lo menos un detector de luz (36) en el extremo de la guía de onda opuesto a la fuente de luz, una cámara de muestra de gas de tipo de difusion (34) formada dentro de la guía de onda e interpuesta en la trayectoria optica entre la fuente de luz y el detector de luz para que la fuente de luz y el detector de luz se aislen térmicamente desde la muestra de gas mediante las ventanas (38, 39) y un filtro de paso de banda separado (52) interpuesto entre la fuente de luz y cada detector de luz; debido a que el detector NDIR se fabrica de un material semiconductor, el impulsor de fuente (76) y los componentes electronicos de procedimiento de señal (78) pueden agregarse directamente al detector utilizando las técnicas de fabricacion de circuito integrado; las partículas, el humo y el polvo pueden mantenerse fuera de la cámara de muestra mediante la aplicacion de una membrana permeable al gas (56) sobre las aberturas (54) en las paredes de cámara de muestra.
MX9603406A 1994-02-14 1995-01-30 Detector mejorado de gas en el infrarrojo no dispersivo. MX9603406A (es)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US19552394A 1994-02-14 1994-02-14
PCT/US1995/001229 WO1995022045A1 (en) 1994-02-14 1995-01-30 Improved ndir gas sensor

Publications (1)

Publication Number Publication Date
MX9603406A true MX9603406A (es) 1997-03-29

Family

ID=22721730

Family Applications (1)

Application Number Title Priority Date Filing Date
MX9603406A MX9603406A (es) 1994-02-14 1995-01-30 Detector mejorado de gas en el infrarrojo no dispersivo.

Country Status (8)

Country Link
US (1) US5444249A (es)
EP (1) EP0749573A4 (es)
KR (1) KR970701341A (es)
CN (1) CN1145115A (es)
AU (1) AU1696595A (es)
CA (1) CA2183259A1 (es)
MX (1) MX9603406A (es)
WO (1) WO1995022045A1 (es)

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DE102007006153A1 (de) * 2007-02-07 2008-08-21 Tyco Electronics Raychem Gmbh Optische Gassensoranordnung in monolithisch integrierter Bauweise
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EP2017602B1 (en) * 2007-07-19 2014-02-26 Consejo Superior de Investigaciones Cientificas Interferometer and sensor based on bimodal optical waveguide and sensing method
JP5345333B2 (ja) * 2008-03-31 2013-11-20 Ｈｏｙａ株式会社 フォトマスクブランク、フォトマスク及びその製造方法
KR101034647B1 (ko) 2008-09-30 2011-05-16 (주)유우일렉트로닉스 웨이퍼 레벨 패키징을 이용한 ｎｄｉｒ 방식의 가스 센서용적외선 감지소자 및 그의 제조방법
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Also Published As

Publication number Publication date
KR970701341A (ko) 1997-03-17
WO1995022045A1 (en) 1995-08-17
US5444249A (en) 1995-08-22
CN1145115A (zh) 1997-03-12
EP0749573A1 (en) 1996-12-27
AU1696595A (en) 1995-08-29
EP0749573A4 (en) 1998-11-18
CA2183259A1 (en) 1995-08-17

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