SG11201702990VA - Optical waveguide structure and optical gas sensor, and methods of fabrication thereof - Google Patents

Optical waveguide structure and optical gas sensor, and methods of fabrication thereof

Info

Publication number
SG11201702990VA
SG11201702990VA SG11201702990VA SG11201702990VA SG11201702990VA SG 11201702990V A SG11201702990V A SG 11201702990VA SG 11201702990V A SG11201702990V A SG 11201702990VA SG 11201702990V A SG11201702990V A SG 11201702990VA SG 11201702990V A SG11201702990V A SG 11201702990VA
Authority
SG
Singapore
Prior art keywords
optical
fabrication
methods
gas sensor
waveguide structure
Prior art date
Application number
SG11201702990VA
Inventor
Jifang Tao
Hong Cai
Alex Yuandong Gu
Hyun Kee Chang
Original Assignee
Agency Science Tech & Res
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency Science Tech & Res filed Critical Agency Science Tech & Res
Priority to SG11201702990VA priority Critical patent/SG11201702990VA/en
Publication of SG11201702990VA publication Critical patent/SG11201702990VA/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/136—Integrated optical circuits characterised by the manufacturing method by etching
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12097—Ridge, rib or the like
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12133—Functions
    • G02B2006/12138—Sensor
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/12176—Etching

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Biochemistry (AREA)
  • Analytical Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
SG11201702990VA 2014-10-16 2015-10-16 Optical waveguide structure and optical gas sensor, and methods of fabrication thereof SG11201702990VA (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SG11201702990VA SG11201702990VA (en) 2014-10-16 2015-10-16 Optical waveguide structure and optical gas sensor, and methods of fabrication thereof

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
SG10201406681S 2014-10-16
SG11201702990VA SG11201702990VA (en) 2014-10-16 2015-10-16 Optical waveguide structure and optical gas sensor, and methods of fabrication thereof
PCT/SG2015/050394 WO2016060619A1 (en) 2014-10-16 2015-10-16 Optical waveguide structure and optical gas sensor, and methods of fabrication thereof

Publications (1)

Publication Number Publication Date
SG11201702990VA true SG11201702990VA (en) 2017-05-30

Family

ID=55747029

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201702990VA SG11201702990VA (en) 2014-10-16 2015-10-16 Optical waveguide structure and optical gas sensor, and methods of fabrication thereof

Country Status (3)

Country Link
US (1) US10215692B2 (en)
SG (1) SG11201702990VA (en)
WO (1) WO2016060619A1 (en)

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US10571633B1 (en) * 2016-12-23 2020-02-25 Acacia Communications, Inc. Suspended cantilever waveguide
WO2018179752A1 (en) * 2017-03-30 2018-10-04 旭化成エレクトロニクス株式会社 Optical waveguide, optical concentration measuring device, method for manufacturing optical waveguide
US10768365B2 (en) * 2018-03-21 2020-09-08 Futurewei Technologies, Inc. Enabling thermal efficiency on a silicon-on-insulator (SOI) platform
WO2020036648A2 (en) * 2018-04-25 2020-02-20 Shaw Development, Llc Device with aeration mitigation for improved measurement of fluids
JP7142895B2 (en) * 2018-05-02 2022-09-28 学校法人幾徳学園 Optical waveguide structure and optical waveguide sensor
DE102018211548A1 (en) * 2018-07-11 2020-01-16 Robert Bosch Gmbh Manufacturing method for a micromechanical device with inclined optical windows and a micromechanical device with inclined optical windows
CN109031523B (en) * 2018-08-22 2020-02-18 清华大学 Manufacturing method and structure of terahertz suspended hollow ridge dielectric waveguide
GB2588891B (en) * 2019-10-23 2024-04-24 Smart Photonics Holding B V Manufacturing a semiconductor structure
CN111061009B (en) * 2019-12-30 2022-06-28 腾讯科技（深圳）有限公司 Suspended optical waveguide and preparation method thereof
US10775560B1 (en) 2020-07-02 2020-09-15 Scidatek Inc. Optical sensing and photocatalysis devices based on three-dimensional waveguiding structures and method of using same
CN112285825A (en) * 2020-10-19 2021-01-29 东南大学 Optical coupling chip and preparation method thereof
CN113804630B (en) * 2020-12-07 2024-01-23 宁波大学 Micro-nano optical sensor for detecting chemical components and manufacturing and detecting method thereof
SE545362C2 (en) * 2021-12-22 2023-07-18 Senseair Ab Capped semiconductor based sensor and method for its fabrication
SE545446C2 (en) * 2021-12-22 2023-09-12 Senseair Ab Capped semiconductor based sensor and method for its fabrication
GB202213015D0 (en) * 2022-09-06 2022-10-19 Univ I Tromsoe Norges Arktiske Univ Optical components

Family Cites Families (14)

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Publication number Priority date Publication date Assignee Title
US5444249A (en) 1994-02-14 1995-08-22 Telaire Systems, Inc. NDIR gas sensor
JPH0815540A (en) * 1994-06-29 1996-01-19 Sumitomo Electric Ind Ltd Optical waveguide and its production
JP4078898B2 (en) * 2002-06-28 2008-04-23 日本電気株式会社 Thermo-optic phase shifter and manufacturing method thereof
US6969857B2 (en) 2003-01-10 2005-11-29 Southwest Research Institute Compensated infrared absorption sensor for carbon dioxide and other infrared absorbing gases
JP2006030733A (en) 2004-07-20 2006-02-02 Nippon Telegr & Teleph Corp <Ntt> Optical waveguide and method for manufacturing optical waveguide
GB2427748A (en) 2005-10-17 2007-01-03 Univ Southampton Silica waveguides for upconversion lasers
US7920770B2 (en) * 2008-05-01 2011-04-05 Massachusetts Institute Of Technology Reduction of substrate optical leakage in integrated photonic circuits through localized substrate removal
US7848599B2 (en) 2009-03-31 2010-12-07 Oracle America, Inc. Optical device with large thermal impedance
US8427738B2 (en) 2009-09-11 2013-04-23 The United States Of America, As Represented By The Secretary Of The Navy Nonlinear frequency conversion in nanoslot optical waveguides
US20120223232A1 (en) 2009-11-17 2012-09-06 Nec Corporation Gas detection device
JP6025150B2 (en) 2011-05-23 2016-11-16 シチズン時計株式会社 Optical device
US9110221B2 (en) 2012-02-10 2015-08-18 Massachusetts Institute Of Technology Athermal photonic waveguide with refractive index tuning
US9046650B2 (en) * 2013-03-12 2015-06-02 The Massachusetts Institute Of Technology Methods and apparatus for mid-infrared sensing
US9448422B2 (en) * 2014-03-05 2016-09-20 Huawei Technologies Co., Ltd. Integrated thermo-optic switch with thermally isolated and heat restricting pillars

Also Published As

Publication number Publication date
US20170227456A1 (en) 2017-08-10
WO2016060619A1 (en) 2016-04-21
US10215692B2 (en) 2019-02-26

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