MX356580B - Sensor de fluido de amplio intervalo dinámico basado en una plataforma de nanoalambres. - Google Patents
Sensor de fluido de amplio intervalo dinámico basado en una plataforma de nanoalambres.Info
- Publication number
- MX356580B MX356580B MX2015004671A MX2015004671A MX356580B MX 356580 B MX356580 B MX 356580B MX 2015004671 A MX2015004671 A MX 2015004671A MX 2015004671 A MX2015004671 A MX 2015004671A MX 356580 B MX356580 B MX 356580B
- Authority
- MX
- Mexico
- Prior art keywords
- nanowires
- dynamic range
- sensor based
- wide dynamic
- fluid sensor
- Prior art date
Links
- 239000002070 nanowire Substances 0.000 title abstract 8
- 239000012530 fluid Substances 0.000 title abstract 3
- 239000011810 insulating material Substances 0.000 abstract 2
- 239000000126 substance Substances 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 238000001514 detection method Methods 0.000 abstract 1
- 239000012212 insulator Substances 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
- G01N27/4146—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS involving nanosized elements, e.g. nanotubes, nanowires
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
- G01N33/0031—General constructional details of gas analysers, e.g. portable test equipment concerning the detector comprising two or more sensors, e.g. a sensor array
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0657—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape of the body
- H01L29/0665—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape of the body the shape of the body defining a nanostructure
- H01L29/0669—Nanowires or nanotubes
- H01L29/0673—Nanowires or nanotubes oriented parallel to a substrate
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Pathology (AREA)
- Immunology (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Nanotechnology (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Molecular Biology (AREA)
- Power Engineering (AREA)
- Food Science & Technology (AREA)
- Medicinal Chemistry (AREA)
- Combustion & Propulsion (AREA)
- Materials Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Thin Film Transistor (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Abstract
Un dispositivo (100) para la detección de una sustancia en una muestra de fluido, el dispositivo comprende: un sustrato (102); una capa aislante (104) dispuesta sobre el sustrato (102); una pluralidad de nanoalambres semiconductores eléctricamente accesibles individualmente (106, 108, 110) dispuestos sobre la capa aislante (104) , cada uno de la pluralidad de nanoalambres está cubierta por un material aislante (202, 204, 206) y dispuestos para detectar la sustancia a través de una característica eléctrica del nanoalambre; y un compartimiento de muestra (118) para proporcionar la muestra de fluido en contacto con cada uno de la pluralidad de nanoalambres; en donde para cada uno de la pluralidad de nanoalambres (106, 108, 110), por lo menos uno de la dimensión transversal, el espesor del aislante y el tipo del material aislante se selecciona de tal manera que cada uno de los nanoalambres tiene un intervalo de detección diferente, y de tal manera que el intervalo dinámico del dispositivo es mayor que el intervalo dinámico de cada uno de los nanoalambres individuales.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201261714418P | 2012-10-16 | 2012-10-16 | |
PCT/IB2013/059160 WO2014060894A2 (en) | 2012-10-16 | 2013-10-07 | Wide dynamic range fluid sensor based on nanowire platform |
Publications (2)
Publication Number | Publication Date |
---|---|
MX2015004671A MX2015004671A (es) | 2015-08-07 |
MX356580B true MX356580B (es) | 2018-06-05 |
Family
ID=49917673
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
MX2015004671A MX356580B (es) | 2012-10-16 | 2013-10-07 | Sensor de fluido de amplio intervalo dinámico basado en una plataforma de nanoalambres. |
Country Status (8)
Country | Link |
---|---|
US (1) | US10126263B2 (es) |
EP (1) | EP2909617A2 (es) |
JP (1) | JP6533465B2 (es) |
CN (1) | CN104737009B (es) |
BR (1) | BR112015008202B1 (es) |
MX (1) | MX356580B (es) |
RU (1) | RU2638130C2 (es) |
WO (1) | WO2014060894A2 (es) |
Families Citing this family (19)
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JP6063603B2 (ja) * | 2013-03-14 | 2017-01-18 | ヒューレット−パッカード デベロップメント カンパニー エル.ピー.Hewlett‐Packard Development Company, L.P. | 物質を検出するための装置及び該装置を製造する方法 |
KR101866006B1 (ko) * | 2013-03-14 | 2018-06-08 | 휴렛-팩커드 디벨롭먼트 컴퍼니, 엘.피. | 물질을 검출하기 위한 장치, 및 그러한 장치를 제조하는 방법 |
CN107709979B (zh) | 2015-06-30 | 2020-07-07 | 富士通株式会社 | 气体传感器及其使用方法 |
WO2017049203A1 (en) * | 2015-09-16 | 2017-03-23 | Systems And Software Enterprises, Llc | Enhanced liquid detection mechanisms for circuit cards |
CN105424780B (zh) * | 2015-11-26 | 2018-06-22 | 深圳代尔夫特电子科技有限公司 | 一种氮化镓传感器、制备方法和多传感器系统 |
WO2017104130A1 (ja) * | 2015-12-16 | 2017-06-22 | パナソニックIpマネジメント株式会社 | ガスセンサ及びガスセンシングシステム |
FR3046243B1 (fr) * | 2015-12-24 | 2017-12-22 | Commissariat Energie Atomique | Capteur nw-fet comportant au moins deux detecteurs distincts a nanofil de semi-conducteur |
CN106290525B (zh) * | 2016-08-04 | 2018-08-28 | 北京大学 | 一种带正面栅极调控的纳米线生物传感器件及其制备方法 |
JP2019190829A (ja) * | 2016-08-31 | 2019-10-31 | シャープ株式会社 | ナノファイバーセンサ |
JP6880930B2 (ja) * | 2017-03-30 | 2021-06-02 | セイコーエプソン株式会社 | センサー |
WO2019107165A1 (ja) * | 2017-11-30 | 2019-06-06 | 東レ株式会社 | 回路、検知器、無線通信デバイス、水分検知システム、おむつ、報知システムおよび回路の製造方法 |
US10788375B2 (en) * | 2017-12-07 | 2020-09-29 | Tower Semiconductor Ltd. | Apparatus, system and method of a temperature sensor |
EP3540422B1 (en) * | 2018-03-14 | 2024-01-03 | Sciosense B.V. | Monolithic gas sensor arrangement, manufacturing method and measurement method |
US11906459B2 (en) | 2018-11-20 | 2024-02-20 | National Research Council Of Canada | Sensor platform |
KR20220032099A (ko) * | 2019-07-12 | 2022-03-15 | 큐랩 메디컬 엘티디. | 전기화학적 fet 센서 |
RU2749070C1 (ru) * | 2020-09-17 | 2021-06-03 | Общество С Ограниченной Ответственностью "Крокус Наноэлектроника" (Ооо "Крокус Наноэлектроника") | Способ формирования активных структур для микроэлектронных устройств и микроэлектронное устройство, содержащее активные структуры |
US11840921B2 (en) | 2021-03-02 | 2023-12-12 | Saudi Arabian Oil Company | Detecting carbon dioxide leakage in the field |
US11414986B1 (en) * | 2021-03-02 | 2022-08-16 | Saudi Arabian Oil Company | Detecting carbon dioxide leakage in the field |
RU2764722C1 (ru) * | 2021-08-04 | 2022-01-19 | Общество С Ограниченной Ответственностью "Крокус Наноэлектроника" (Ооо "Крокус Наноэлектроника") | Способ формирования активных структур для микроэлектронных устройств на кремниевой подложке и микроэлектронное устройство, содержащее сформированные активные структуры |
Family Cites Families (25)
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JP3000711B2 (ja) * | 1991-04-16 | 2000-01-17 | エヌオーケー株式会社 | ガスセンサ |
WO2002048701A2 (en) * | 2000-12-11 | 2002-06-20 | President And Fellows Of Harvard College | Nanosensors |
US8152991B2 (en) | 2005-10-27 | 2012-04-10 | Nanomix, Inc. | Ammonia nanosensors, and environmental control system |
AU2003258969A1 (en) * | 2002-06-27 | 2004-01-19 | Nanosys Inc. | Planar nanowire based sensor elements, devices, systems and methods for using and making same |
US7051945B2 (en) | 2002-09-30 | 2006-05-30 | Nanosys, Inc | Applications of nano-enabled large area macroelectronic substrates incorporating nanowires and nanowire composites |
US7163659B2 (en) * | 2002-12-03 | 2007-01-16 | Hewlett-Packard Development Company, L.P. | Free-standing nanowire sensor and method for detecting an analyte in a fluid |
US7910064B2 (en) * | 2003-06-03 | 2011-03-22 | Nanosys, Inc. | Nanowire-based sensor configurations |
US8129725B2 (en) | 2005-08-08 | 2012-03-06 | Microgan Gmbh | Semiconductor sensor |
US20070269924A1 (en) | 2006-05-18 | 2007-11-22 | Basf Aktiengesellschaft | Patterning nanowires on surfaces for fabricating nanoscale electronic devices |
EP2049436B1 (en) * | 2006-08-11 | 2012-10-17 | Agency for Science, Technology and Research | Nanowire sensor, nanowire sensor array and method of fabricating the same |
JP4928865B2 (ja) * | 2006-08-11 | 2012-05-09 | 株式会社アツミテック | 水素ガス濃度センサ及び水素ガス濃度測定装置 |
US7846786B2 (en) | 2006-12-05 | 2010-12-07 | Korea University Industrial & Academic Collaboration Foundation | Method of fabricating nano-wire array |
US7437938B2 (en) * | 2007-03-21 | 2008-10-21 | Rosemount Inc. | Sensor with composite diaphragm containing carbon nanotubes or semiconducting nanowires |
FR2924108B1 (fr) | 2007-11-28 | 2010-02-12 | Commissariat Energie Atomique | Procede d'elaboration, sur un materiau dielectrique, de nanofils en materiaux semi-conducteur connectant deux electrodes |
KR100906154B1 (ko) | 2007-12-05 | 2009-07-03 | 한국전자통신연구원 | 반도체 나노선 센서 소자 및 이의 제조 방법 |
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JP2009229341A (ja) | 2008-03-25 | 2009-10-08 | Hiroshima Univ | バイオセンサーおよびその製造方法 |
US7963148B2 (en) | 2008-09-03 | 2011-06-21 | National Formosa Univeristy | Gas sensor made of field effect transistor based on ZnO nanowires |
US8169006B2 (en) | 2008-11-29 | 2012-05-01 | Electronics And Telecommunications Research Institute | Bio-sensor chip for detecting target material |
JP5371453B2 (ja) * | 2009-01-09 | 2013-12-18 | ミツミ電機株式会社 | 電界効果トランジスタおよびその製造方法 |
CN101847581A (zh) * | 2009-03-25 | 2010-09-29 | 中国科学院微电子研究所 | 顶栅ZnO多纳米线场效应晶体管的制作方法 |
WO2011017077A2 (en) * | 2009-07-27 | 2011-02-10 | Trustees Of Boston University | Nanochannel-based sensor system with controlled sensitivity |
EP2434278A1 (en) * | 2010-08-31 | 2012-03-28 | Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V. | Apparatus for detecting one or more analytes comprising an elongated nano-structure and method for manufacturing said apparatus |
WO2013009875A2 (en) * | 2011-07-12 | 2013-01-17 | University Of Pittsburgh----Of The Commonwealth System Of Higher Education | pH SENSOR SYSTEMS AND METHODS OF SENSING pH |
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2013
- 2013-10-07 RU RU2015118169A patent/RU2638130C2/ru active
- 2013-10-07 BR BR112015008202-5A patent/BR112015008202B1/pt active IP Right Grant
- 2013-10-07 CN CN201380053956.1A patent/CN104737009B/zh active Active
- 2013-10-07 EP EP13817722.5A patent/EP2909617A2/en not_active Withdrawn
- 2013-10-07 US US14/435,592 patent/US10126263B2/en active Active
- 2013-10-07 JP JP2015536256A patent/JP6533465B2/ja active Active
- 2013-10-07 WO PCT/IB2013/059160 patent/WO2014060894A2/en active Application Filing
- 2013-10-07 MX MX2015004671A patent/MX356580B/es active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
US10126263B2 (en) | 2018-11-13 |
BR112015008202A2 (pt) | 2017-07-04 |
EP2909617A2 (en) | 2015-08-26 |
MX2015004671A (es) | 2015-08-07 |
CN104737009A (zh) | 2015-06-24 |
BR112015008202B1 (pt) | 2021-02-09 |
US20160003770A1 (en) | 2016-01-07 |
WO2014060894A3 (en) | 2014-07-24 |
RU2015118169A (ru) | 2016-12-10 |
JP6533465B2 (ja) | 2019-06-19 |
WO2014060894A2 (en) | 2014-04-24 |
JP2015531491A (ja) | 2015-11-02 |
CN104737009B (zh) | 2018-07-13 |
RU2638130C2 (ru) | 2017-12-11 |
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Legal Events
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FG | Grant or registration |