MD175Z - Dispozitiv de obţinere a peliculelor supraconductoare - Google Patents

Dispozitiv de obţinere a peliculelor supraconductoare Download PDF

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Publication number
MD175Z
MD175Z MDS20090234A MDS20090234A MD175Z MD 175 Z MD175 Z MD 175Z MD S20090234 A MDS20090234 A MD S20090234A MD S20090234 A MDS20090234 A MD S20090234A MD 175 Z MD175 Z MD 175Z
Authority
MD
Moldova
Prior art keywords
obtaining
substrate
superconducting films
superconducting
electrode support
Prior art date
Application number
MDS20090234A
Other languages
English (en)
Russian (ru)
Inventor
Анатол СИДОРЕНКО
Владимир ЗДРАВКОВ
Роман МОРАРЬ
Original Assignee
Институт Электронной Инженерии И Промышленных Технологий Академии Наук Молдовы
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by Институт Электронной Инженерии И Промышленных Технологий Академии Наук Молдовы filed Critical Институт Электронной Инженерии И Промышленных Технологий Академии Наук Молдовы
Priority to MDS20090234A priority Critical patent/MD175Z/ro
Publication of MD175Y publication Critical patent/MD175Y/ro
Publication of MD175Z publication Critical patent/MD175Z/ro

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  • Superconductors And Manufacturing Methods Therefor (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

Invenţia se referă la supraconductori, şi anume la dispozitive de depunere în vid a peliculelor fine de calitate înaltă din materiale supraconductoare şi poate fi utilizată în construcţia de aparate.Dispozitivul de obţinere a peliculelor supraconductoare include o cameră de vid (1), dotată cu pompe de vid (2) şi în care sunt amplasate un magnetron (3), un suport-catod (4) cu ţintă (6), pe care este montat un ecran (5), şi un substrat (7). Suportul-catod (4) este fixat într-un mecanism (8) care asigură rotaţia-translaţia lui deasupra substratului (7).
MDS20090234A 2008-02-25 2008-02-25 Dispozitiv de obţinere a peliculelor supraconductoare MD175Z (ro)

Priority Applications (1)

Application Number Priority Date Filing Date Title
MDS20090234A MD175Z (ro) 2008-02-25 2008-02-25 Dispozitiv de obţinere a peliculelor supraconductoare

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
MDS20090234A MD175Z (ro) 2008-02-25 2008-02-25 Dispozitiv de obţinere a peliculelor supraconductoare

Publications (2)

Publication Number Publication Date
MD175Y MD175Y (ro) 2010-03-31
MD175Z true MD175Z (ro) 2010-10-31

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Family Applications (1)

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MDS20090234A MD175Z (ro) 2008-02-25 2008-02-25 Dispozitiv de obţinere a peliculelor supraconductoare

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2503096C1 (ru) * 2012-09-20 2013-12-27 Владимир Михайлович Борисов Устройство и способ для нанесения сверхпроводящих слоев

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001059815A2 (en) * 2000-02-09 2001-08-16 Semitool, Inc. Method and apparatus for processing a microelectronic workpiece at an elevated temperature
MD2289G2 (ro) * 2003-03-14 2004-08-31 Ион ТИГИНЯНУ Procedeu de fabricare a dispozitivului optic planar cu ghid de undă
MD2804G2 (ro) * 2004-10-19 2006-02-28 Ион ТИГИНЯНУ Procedeu de obţinere a nanocompozitului
MD3029C2 (ro) * 2004-09-06 2006-11-30 ШИШЯНУ Серджиу Procedeu de obţinere a senzorilor (variante)
MD3088G2 (ro) * 2005-08-10 2007-03-31 Институт Прикладной Физики Академии Наук Молдовы Procedeu de obţinere a nanotuburilor metalice
MD3372C2 (ro) * 2006-03-31 2008-02-29 ШИШЯНУ Серджиу Procedeu de obtinere a celuler fotovoltaice (variante)
MD4010F2 (ro) * 2007-12-12 2010-01-29 Universitatea Tehnica A Moldovei Procedeu de obtinere a peliculelor subtiri de semiconductoare oxidice de In2O3
MD3894G2 (ro) * 2008-02-22 2010-01-31 Государственный Университет Молд0 Sesizor de gaze în baza semiconductorilor halcogenici sticloşi
  • 2008

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001059815A2 (en) * 2000-02-09 2001-08-16 Semitool, Inc. Method and apparatus for processing a microelectronic workpiece at an elevated temperature
MD2289G2 (ro) * 2003-03-14 2004-08-31 Ион ТИГИНЯНУ Procedeu de fabricare a dispozitivului optic planar cu ghid de undă
MD3029C2 (ro) * 2004-09-06 2006-11-30 ШИШЯНУ Серджиу Procedeu de obţinere a senzorilor (variante)
MD2804G2 (ro) * 2004-10-19 2006-02-28 Ион ТИГИНЯНУ Procedeu de obţinere a nanocompozitului
MD3088G2 (ro) * 2005-08-10 2007-03-31 Институт Прикладной Физики Академии Наук Молдовы Procedeu de obţinere a nanotuburilor metalice
MD3372C2 (ro) * 2006-03-31 2008-02-29 ШИШЯНУ Серджиу Procedeu de obtinere a celuler fotovoltaice (variante)
MD4010F2 (ro) * 2007-12-12 2010-01-29 Universitatea Tehnica A Moldovei Procedeu de obtinere a peliculelor subtiri de semiconductoare oxidice de In2O3
MD3894G2 (ro) * 2008-02-22 2010-01-31 Государственный Университет Молд0 Sesizor de gaze în baza semiconductorilor halcogenici sticloşi

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
Hermn M.A., Sitter H. Molecular beam epitaxy – fundamentals and current status. ISBN 3-540-19075-9, Springer-Verlag-Berlin-Heidelberg-New York-London-Paris-Tokyo 1989, p. 1-382 *
Дедю В.И., Лыков А.Н., Махашвили Л.И. Малогабаритное устройство для магнетронного напыления. Физический Институт им. П.Н. Лебедева, Препринт № 92, Москва, 1987 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2503096C1 (ru) * 2012-09-20 2013-12-27 Владимир Михайлович Борисов Устройство и способ для нанесения сверхпроводящих слоев

Also Published As

Publication number Publication date
MD175Y (ro) 2010-03-31

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KA4Y Short-term patent lapsed due to non-payment of fees (with right of restoration)