MD175Z - Device for the obtaining of superconducting films - Google Patents

Device for the obtaining of superconducting films Download PDF

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Publication number
MD175Z
MD175Z MDS20090234A MDS20090234A MD175Z MD 175 Z MD175 Z MD 175Z MD S20090234 A MDS20090234 A MD S20090234A MD S20090234 A MDS20090234 A MD S20090234A MD 175 Z MD175 Z MD 175Z
Authority
MD
Moldova
Prior art keywords
obtaining
substrate
superconducting films
superconducting
electrode support
Prior art date
Application number
MDS20090234A
Other languages
Romanian (ro)
Russian (ru)
Inventor
Анатол СИДОРЕНКО
Владимир ЗДРАВКОВ
Роман МОРАРЬ
Original Assignee
Институт Электронной Инженерии И Промышленных Технологий Академии Наук Молдовы
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Институт Электронной Инженерии И Промышленных Технологий Академии Наук Молдовы filed Critical Институт Электронной Инженерии И Промышленных Технологий Академии Наук Молдовы
Priority to MDS20090234A priority Critical patent/MD175Z/en
Publication of MD175Y publication Critical patent/MD175Y/en
Publication of MD175Z publication Critical patent/MD175Z/en

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  • Superconductors And Manufacturing Methods Therefor (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

The invention relates to superconductors, namely to devices for vacuum deposition of high-quality thin films of superconducting materials and can be used in the instrument engineering.The device for the obtaining of superconducting films includes a vacuum chamber (1) equipped with vacuum pumps (2) and wherein it is placed a magnetron (3), an electrode support (4) with target (6), on which it is mounted a screen (5) and a substrate (7). The electrode support (4) is fixed into a mechanism (8) providing for the rotary-translational motion thereof above the substrate (7).
MDS20090234A 2008-02-25 2008-02-25 Device for the obtaining of superconducting films MD175Z (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
MDS20090234A MD175Z (en) 2008-02-25 2008-02-25 Device for the obtaining of superconducting films

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
MDS20090234A MD175Z (en) 2008-02-25 2008-02-25 Device for the obtaining of superconducting films

Publications (2)

Publication Number Publication Date
MD175Y MD175Y (en) 2010-03-31
MD175Z true MD175Z (en) 2010-10-31

Family

ID=43568947

Family Applications (1)

Application Number Title Priority Date Filing Date
MDS20090234A MD175Z (en) 2008-02-25 2008-02-25 Device for the obtaining of superconducting films

Country Status (1)

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MD (1) MD175Z (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2503096C1 (en) * 2012-09-20 2013-12-27 Владимир Михайлович Борисов Apparatus and method of depositing superconducting layers

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001059815A2 (en) * 2000-02-09 2001-08-16 Semitool, Inc. Method and apparatus for processing a microelectronic workpiece at an elevated temperature
MD2289G2 (en) * 2003-03-14 2004-08-31 Ион ТИГИНЯНУ Process for manufacture of the planar optic device with waveguide
MD2804G2 (en) * 2004-10-19 2006-02-28 Ион ТИГИНЯНУ Process for nanocomposite obtaining
MD3029C2 (en) * 2004-09-06 2006-11-30 ШИШЯНУ Серджиу Process for sensor obtaining (variants)
MD3088G2 (en) * 2005-08-10 2007-03-31 Институт Прикладной Физики Академии Наук Молдовы Process for obtaining metal nanotubes
MD3372C2 (en) * 2006-03-31 2008-02-29 ШИШЯНУ Серджиу Process for obtaining photocells (variants)
MD4010F2 (en) * 2007-12-12 2010-01-29 Universitatea Tehnica A Moldovei Method for obtaining thin films of oxide semiconductors of In2O3
MD3894G2 (en) * 2008-02-22 2010-01-31 Государственный Университет Молд0 Gas sensor on base of vitreous chalcogenide semiconductors
  • 2008

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001059815A2 (en) * 2000-02-09 2001-08-16 Semitool, Inc. Method and apparatus for processing a microelectronic workpiece at an elevated temperature
MD2289G2 (en) * 2003-03-14 2004-08-31 Ион ТИГИНЯНУ Process for manufacture of the planar optic device with waveguide
MD3029C2 (en) * 2004-09-06 2006-11-30 ШИШЯНУ Серджиу Process for sensor obtaining (variants)
MD2804G2 (en) * 2004-10-19 2006-02-28 Ион ТИГИНЯНУ Process for nanocomposite obtaining
MD3088G2 (en) * 2005-08-10 2007-03-31 Институт Прикладной Физики Академии Наук Молдовы Process for obtaining metal nanotubes
MD3372C2 (en) * 2006-03-31 2008-02-29 ШИШЯНУ Серджиу Process for obtaining photocells (variants)
MD4010F2 (en) * 2007-12-12 2010-01-29 Universitatea Tehnica A Moldovei Method for obtaining thin films of oxide semiconductors of In2O3
MD3894G2 (en) * 2008-02-22 2010-01-31 Государственный Университет Молд0 Gas sensor on base of vitreous chalcogenide semiconductors

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
Hermn M.A., Sitter H. Molecular beam epitaxy – fundamentals and current status. ISBN 3-540-19075-9, Springer-Verlag-Berlin-Heidelberg-New York-London-Paris-Tokyo 1989, p. 1-382 *
Дедю В.И., Лыков А.Н., Махашвили Л.И. Малогабаритное устройство для магнетронного напыления. Физический Институт им. П.Н. Лебедева, Препринт № 92, Москва, 1987 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2503096C1 (en) * 2012-09-20 2013-12-27 Владимир Михайлович Борисов Apparatus and method of depositing superconducting layers

Also Published As

Publication number Publication date
MD175Y (en) 2010-03-31

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KA4Y Short-term patent lapsed due to non-payment of fees (with right of restoration)