MD1740Y - Procedeu de obţinere a straturilor epitaxiale subţiri de TiO2 - Google Patents
Procedeu de obţinere a straturilor epitaxiale subţiri de TiO2 Download PDFInfo
- Publication number
- MD1740Y MD1740Y MDS20230010A MDS20230010A MD1740Y MD 1740 Y MD1740 Y MD 1740Y MD S20230010 A MDS20230010 A MD S20230010A MD S20230010 A MDS20230010 A MD S20230010A MD 1740 Y MD1740 Y MD 1740Y
- Authority
- MD
- Moldova
- Prior art keywords
- vapors
- thin layers
- epitaxial
- tio2
- speed
- Prior art date
Links
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 title abstract 6
- 238000004519 manufacturing process Methods 0.000 title abstract 4
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 abstract 4
- VXUYXOFXAQZZMF-UHFFFAOYSA-N titanium(IV) isopropoxide Chemical compound CC(C)O[Ti](OC(C)C)(OC(C)C)OC(C)C VXUYXOFXAQZZMF-UHFFFAOYSA-N 0.000 abstract 4
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 abstract 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 abstract 3
- 229910052786 argon Inorganic materials 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract 1
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 230000005587 bubbling Effects 0.000 abstract 1
- 238000005229 chemical vapour deposition Methods 0.000 abstract 1
- 238000005238 degreasing Methods 0.000 abstract 1
- 238000000151 deposition Methods 0.000 abstract 1
- 230000008021 deposition Effects 0.000 abstract 1
- 238000001035 drying Methods 0.000 abstract 1
- 239000011521 glass Substances 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 230000005693 optoelectronics Effects 0.000 abstract 1
- 239000001301 oxygen Substances 0.000 abstract 1
- 229910052760 oxygen Inorganic materials 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
Landscapes
- Inorganic Compounds Of Heavy Metals (AREA)
Abstract
Invenţia se referă la tehnologia de obţinere a semiconductoarelor, şi poate fi utilizată pentru fabricarea dispozitivelor optoelectronice.Procedeul de obţinere a straturilor epitaxiale subţiri de TiO2 include degresarea unui substrat de sticlă în toluen, uscarea lui în vapori de alcool izopropilic şi plasarea acestuia într-un reactor de depunere chimică din faza de vapori, care se purjează cu argon timp de 20 min cu viteza fluxului de 100 cm3/min, apoi se măreşte temperatura substratului până la 400°C. Procedeul mai include producerea vaporilor de izopropoxid de titan prin barbotare la temperatura de 90°C. Depunerea straturilor epitaxiale de TiO2 se realizează prin debitarea separată în reactor a vaporilor de izopropoxid de titan, transportaţi cu un flux de argon cu viteza de 40 cm3/min, şi unui flux de oxigen cu viteza de 40 cm3/min, timp de 30 min.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| MDS20230010A MD1740Z (ro) | 2023-02-02 | 2023-02-02 | Procedeu de obţinere a straturilor epitaxiale subţiri de TiO2 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| MDS20230010A MD1740Z (ro) | 2023-02-02 | 2023-02-02 | Procedeu de obţinere a straturilor epitaxiale subţiri de TiO2 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| MD1740Y true MD1740Y (ro) | 2024-01-31 |
| MD1740Z MD1740Z (ro) | 2024-08-31 |
Family
ID=89843888
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| MDS20230010A MD1740Z (ro) | 2023-02-02 | 2023-02-02 | Procedeu de obţinere a straturilor epitaxiale subţiri de TiO2 |
Country Status (1)
| Country | Link |
|---|---|
| MD (1) | MD1740Z (ro) |
-
2023
- 2023-02-02 MD MDS20230010A patent/MD1740Z/ro active IP Right Grant
Also Published As
| Publication number | Publication date |
|---|---|
| MD1740Z (ro) | 2024-08-31 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FG9Y | Short term patent issued |