KR980005325A - 반사굴절 광학계 - Google Patents
반사굴절 광학계 Download PDFInfo
- Publication number
- KR980005325A KR980005325A KR1019970021291A KR19970021291A KR980005325A KR 980005325 A KR980005325 A KR 980005325A KR 1019970021291 A KR1019970021291 A KR 1019970021291A KR 19970021291 A KR19970021291 A KR 19970021291A KR 980005325 A KR980005325 A KR 980005325A
- Authority
- KR
- South Korea
- Prior art keywords
- optical system
- refractive
- imaging optical
- imaging
- reflective
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B17/00—Systems with reflecting surfaces, with or without refracting elements
- G02B17/08—Catadioptric systems
- G02B17/0892—Catadioptric systems specially adapted for the UV
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B17/00—Systems with reflecting surfaces, with or without refracting elements
- G02B17/08—Catadioptric systems
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70225—Optical aspects of catadioptric systems, i.e. comprising reflective and refractive elements
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/7025—Size or form of projection system aperture, e.g. aperture stops, diaphragms or pupil obscuration; Control thereof
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Lenses (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
자외선 파장영역에서 큰 개구수(NA)를 달성하고, 광학계 전체가 실용적인 크기이며 쿼터 마이크론 단위의 해상도를 가지고, 광학계의 각 구성 부재를 소형화한 반사굴절광학계를 제공한다. 광선이 진행하는 순서대로 굴절 부재에 의해 구성된 제 1 결상 광학계 S1, 오목경 M1 및 굴절 부재에 의해 구성된 제 2 결상 광학계 S2를 포함하며, 반도체 소자의 패턴을 기판상으로 투영하는 반사 굴절 광학계에 있어서, 상기 제 1 결상 광학계를 구성하는 굴절 부재 및 상기 제 2 결상 광학계를 구성하는 굴절 부재 중 적어도 굴절 부재는 비구면(非球面)을 가지는 반사 굴절 광학계를 제공한다.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제 1 도는 제 1 실시예의 반사 굴절 광학계의 구성도이다.
Claims (5)
- 광선이 진행되는 순서대로, 굴절 부재에 의해 구성된 제 1 결상 광학계, 오목경 및 굴절 부재에 의해 구성된 제 2 결상 광학계를 포함하여, 반도체 소자의 패턴을 기판상으로 투영하는 반사 굴절 광학계에 있어서, 상기 제 1 결상 광학계를 구성하는 굴절 부재 및 상기 제 2 결상 광학계를 구성하는 굴절 부재 중 적어도 하나의 굴절 부재는, 비구면을 가지는 것을 특징으로 하는 반사 굴절광학계.
- 제 1 항에 있어서, 상기 제 1 결상 광학계는 광선이 한 번만 통과하는 제 1 렌즈군 및 광선이 왕복하는 제 2 렌즈군으로 구성되며, 상기 제 2 렌즈군중 가장 오목경에 가까운 렌즈는 음부(負)의 렌즈이며, 상기 제 2 렌즈군을 사출한 광선은 상기 제 2 결상 광학계에 입사되기 전에 상기 반도체 소자의 패턴을 한 번 결상하는 것을 특징으로 하는 반사 굴절 광학계.
- 제 1 항 또는 제 2 항에 있어서, 상기 제 1 결상 광학계와 상기 제 2 결상 광학계 사이에 광로 편향 부재를 배치하는 것을 특징으로 하는 반사 굴절 광학계.
- 제 1 항 내지 제 3 항중 어느 한 항에 있어서, 상기 제 1 결상 광학계를 구성하는 굴절 부재 및 상기 제 2 결상 광학계를 구성하는 굴절 부재는 석영 및 형석, 또는 그중 어느 하나의 초석(硝)재로 구성되는 것을 특징으로 하는 반사 굴절 광학계.
- 제 1 항 내지 제 4 항중 어느 한 항에 있어서, 상기 오목경은 비구면(非球面) 형상인 것을 특징으로 하는 반사 굴절 광학계.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP153770/1996 | 1996-06-14 | ||
JP8153770A JPH103039A (ja) | 1996-06-14 | 1996-06-14 | 反射屈折光学系 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR980005325A true KR980005325A (ko) | 1998-03-30 |
Family
ID=15569767
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019970021291A KR980005325A (ko) | 1996-06-14 | 1997-05-28 | 반사굴절 광학계 |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP0816892A3 (ko) |
JP (1) | JPH103039A (ko) |
KR (1) | KR980005325A (ko) |
Families Citing this family (47)
Publication number | Priority date | Publication date | Assignee | Title |
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US5969882A (en) * | 1997-04-01 | 1999-10-19 | Nikon Corporation | Catadioptric optical system |
WO1999052004A1 (fr) | 1998-04-07 | 1999-10-14 | Nikon Corporation | Appareil et procede d'exposition a projection, et systeme optique reflechissant a refraction |
EP1293831A1 (en) | 1998-06-08 | 2003-03-19 | Nikon Corporation | Projection exposure apparatus and method |
EP0989434B1 (en) * | 1998-07-29 | 2006-11-15 | Carl Zeiss SMT AG | Catadioptric optical system and exposure apparatus having the same |
DE19939088A1 (de) | 1998-08-18 | 2000-02-24 | Nikon Corp | Belichtungsvorrichtung und -verfahren |
US6985210B2 (en) | 1999-02-15 | 2006-01-10 | Carl Zeiss Smt Ag | Projection system for EUV lithography |
USRE42118E1 (en) * | 1999-02-15 | 2011-02-08 | Carl-Zeiss-Smt Ag | Projection system for EUV lithography |
US7151592B2 (en) | 1999-02-15 | 2006-12-19 | Carl Zeiss Smt Ag | Projection system for EUV lithography |
EP1094350A3 (en) | 1999-10-21 | 2001-08-16 | Carl Zeiss | Optical projection lens system |
JP2001160530A (ja) | 1999-12-01 | 2001-06-12 | Nikon Corp | ステージ装置及び露光装置 |
WO2001050171A1 (de) | 1999-12-29 | 2001-07-12 | Carl Zeiss | Projektionsobjektiv mit benachbart angeordneten asphärischen linsenoberflächen |
WO2002044786A2 (en) | 2000-11-28 | 2002-06-06 | Carl Zeiss Smt Ag | Catadioptric projection system for 157 nm lithography |
TW538256B (en) | 2000-01-14 | 2003-06-21 | Zeiss Stiftung | Microlithographic reduction projection catadioptric objective |
JP2001257143A (ja) | 2000-03-09 | 2001-09-21 | Nikon Corp | ステージ装置及び露光装置、並びにデバイス製造方法 |
JP2001267226A (ja) | 2000-03-21 | 2001-09-28 | Nikon Corp | 駆動装置及び露光装置、並びにデバイス及びその製造方法 |
US20030155882A1 (en) | 2002-02-19 | 2003-08-21 | Nikon Corporation | Anti-gravity mount with air and magnets |
US7154676B2 (en) | 2002-03-01 | 2006-12-26 | Carl Zeiss Smt A.G. | Very-high aperture projection objective |
US7190527B2 (en) | 2002-03-01 | 2007-03-13 | Carl Zeiss Smt Ag | Refractive projection objective |
JP3977324B2 (ja) | 2002-11-12 | 2007-09-19 | エーエスエムエル ネザーランズ ビー.ブイ. | リソグラフィ装置 |
KR101547077B1 (ko) | 2003-04-09 | 2015-08-25 | 가부시키가이샤 니콘 | 노광 방법 및 장치, 그리고 디바이스 제조 방법 |
KR20140139139A (ko) | 2003-04-10 | 2014-12-04 | 가부시키가이샤 니콘 | 액침 리소그래피 장치용 운반 영역을 포함하는 환경 시스템 |
KR101469405B1 (ko) | 2003-04-10 | 2014-12-10 | 가부시키가이샤 니콘 | 액침 리소그래피 장치용 진공 배출을 포함하는 환경 시스템 |
SG2012031217A (en) | 2003-04-11 | 2015-09-29 | Nippon Kogaku Kk | Apparatus having an immersion fluid system configured to maintain immersion fluid in a gap adjacent an optical assembly |
TWI295414B (en) | 2003-05-13 | 2008-04-01 | Asml Netherlands Bv | Lithographic apparatus and device manufacturing method |
TWI282487B (en) | 2003-05-23 | 2007-06-11 | Canon Kk | Projection optical system, exposure apparatus, and device manufacturing method |
KR101289979B1 (ko) | 2003-06-19 | 2013-07-26 | 가부시키가이샤 니콘 | 노광 장치 및 디바이스 제조방법 |
EP2466382B1 (en) | 2003-07-08 | 2014-11-26 | Nikon Corporation | Wafer table for immersion lithography |
US8208198B2 (en) | 2004-01-14 | 2012-06-26 | Carl Zeiss Smt Gmbh | Catadioptric projection objective |
TWI573175B (zh) | 2003-10-28 | 2017-03-01 | 尼康股份有限公司 | 照明光學裝置、曝光裝置、曝光方法以及元件製造 方法 |
TW201809801A (zh) | 2003-11-20 | 2018-03-16 | 日商尼康股份有限公司 | 光學照明裝置、曝光裝置、曝光方法、以及元件製造方法 |
US20080151364A1 (en) | 2004-01-14 | 2008-06-26 | Carl Zeiss Smt Ag | Catadioptric projection objective |
US7589822B2 (en) | 2004-02-02 | 2009-09-15 | Nikon Corporation | Stage drive method and stage unit, exposure apparatus, and device manufacturing method |
TWI389174B (zh) | 2004-02-06 | 2013-03-11 | 尼康股份有限公司 | 偏光變換元件、光學照明裝置、曝光裝置以及曝光方法 |
TW201816844A (zh) | 2004-03-25 | 2018-05-01 | 日商尼康股份有限公司 | 曝光裝置、曝光方法、及元件製造方法 |
KR20140138350A (ko) | 2004-05-17 | 2014-12-03 | 칼 짜이스 에스엠티 게엠베하 | 중간이미지를 갖는 카타디옵트릭 투사 대물렌즈 |
US7324185B2 (en) | 2005-03-04 | 2008-01-29 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US8248577B2 (en) | 2005-05-03 | 2012-08-21 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
KR101455551B1 (ko) | 2005-05-12 | 2014-10-27 | 가부시키가이샤 니콘 | 투영 광학계, 노광 장치 및 노광 방법 |
US20080073563A1 (en) | 2006-07-01 | 2008-03-27 | Nikon Corporation | Exposure apparatus that includes a phase change circulation system for movers |
US7830046B2 (en) | 2007-03-16 | 2010-11-09 | Nikon Corporation | Damper for a stage assembly |
JP5267029B2 (ja) | 2007-10-12 | 2013-08-21 | 株式会社ニコン | 照明光学装置、露光装置及びデバイスの製造方法 |
US8379187B2 (en) | 2007-10-24 | 2013-02-19 | Nikon Corporation | Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method |
US9116346B2 (en) | 2007-11-06 | 2015-08-25 | Nikon Corporation | Illumination apparatus, illumination method, exposure apparatus, and device manufacturing method |
EP2381310B1 (en) | 2010-04-22 | 2015-05-06 | ASML Netherlands BV | Fluid handling structure and lithographic apparatus |
WO2012033933A1 (en) | 2010-09-09 | 2012-03-15 | Nikon Corporation | Parallel linkage and actuator motor coil designs for a tube carrier |
US8572518B2 (en) | 2011-06-23 | 2013-10-29 | Nikon Precision Inc. | Predicting pattern critical dimensions in a lithographic exposure process |
US9030057B2 (en) | 2011-06-24 | 2015-05-12 | Nikon Corporation | Method and apparatus to allow a plurality of stages to operate in close proximity |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
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US5140459A (en) * | 1989-08-29 | 1992-08-18 | Texas Instruments | Apparatus and method for optical relay and reimaging |
JPH04367213A (ja) * | 1991-06-13 | 1992-12-18 | Orc Mfg Co Ltd | 投影型露光装置 |
EP0527043B1 (en) * | 1991-08-05 | 1997-01-22 | Nikon Corporation | Catadioptric reduction projection optical system |
US5212593A (en) * | 1992-02-06 | 1993-05-18 | Svg Lithography Systems, Inc. | Broad band optical reduction system using matched multiple refractive element materials |
EP0604093B1 (en) * | 1992-12-24 | 1997-11-19 | Nikon Corporation | Catadioptric reduction projection optical system |
US5537260A (en) * | 1993-01-26 | 1996-07-16 | Svg Lithography Systems, Inc. | Catadioptric optical reduction system with high numerical aperture |
-
1996
- 1996-06-14 JP JP8153770A patent/JPH103039A/ja active Pending
-
1997
- 1997-05-28 KR KR1019970021291A patent/KR980005325A/ko not_active Application Discontinuation
- 1997-06-16 EP EP97110124A patent/EP0816892A3/en not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
EP0816892A2 (en) | 1998-01-07 |
JPH103039A (ja) | 1998-01-06 |
EP0816892A3 (en) | 1999-06-09 |
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WITN | Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid |