KR970056046U - 수평식 저압 화학기상 증착장치 - Google Patents

수평식 저압 화학기상 증착장치

Info

Publication number
KR970056046U
KR970056046U KR2019960005698U KR19960005698U KR970056046U KR 970056046 U KR970056046 U KR 970056046U KR 2019960005698 U KR2019960005698 U KR 2019960005698U KR 19960005698 U KR19960005698 U KR 19960005698U KR 970056046 U KR970056046 U KR 970056046U
Authority
KR
South Korea
Prior art keywords
vapor deposition
low pressure
chemical vapor
pressure chemical
deposition system
Prior art date
Application number
KR2019960005698U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019960005698U priority Critical patent/KR970056046U/ko
Publication of KR970056046U publication Critical patent/KR970056046U/ko

Links

KR2019960005698U 1996-03-23 1996-03-23 수평식 저압 화학기상 증착장치 KR970056046U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019960005698U KR970056046U (ko) 1996-03-23 1996-03-23 수평식 저압 화학기상 증착장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019960005698U KR970056046U (ko) 1996-03-23 1996-03-23 수평식 저압 화학기상 증착장치

Publications (1)

Publication Number Publication Date
KR970056046U true KR970056046U (ko) 1997-10-13

Family

ID=60932274

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019960005698U KR970056046U (ko) 1996-03-23 1996-03-23 수평식 저압 화학기상 증착장치

Country Status (1)

Country Link
KR (1) KR970056046U (ko)

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Legal Events

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