KR970056051U - 화학기상증착장치 - Google Patents

화학기상증착장치

Info

Publication number
KR970056051U
KR970056051U KR2019960004282U KR19960004282U KR970056051U KR 970056051 U KR970056051 U KR 970056051U KR 2019960004282 U KR2019960004282 U KR 2019960004282U KR 19960004282 U KR19960004282 U KR 19960004282U KR 970056051 U KR970056051 U KR 970056051U
Authority
KR
South Korea
Prior art keywords
vapor deposition
chemical vapor
deposition system
chemical
vapor
Prior art date
Application number
KR2019960004282U
Other languages
English (en)
Other versions
KR200143432Y1 (ko
Inventor
이희명
Original Assignee
삼성전자주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 삼성전자주식회사 filed Critical 삼성전자주식회사
Priority to KR2019960004282U priority Critical patent/KR200143432Y1/ko
Publication of KR970056051U publication Critical patent/KR970056051U/ko
Application granted granted Critical
Publication of KR200143432Y1 publication Critical patent/KR200143432Y1/ko

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
KR2019960004282U 1996-03-08 1996-03-08 화학기상증착장치 KR200143432Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019960004282U KR200143432Y1 (ko) 1996-03-08 1996-03-08 화학기상증착장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019960004282U KR200143432Y1 (ko) 1996-03-08 1996-03-08 화학기상증착장치

Publications (2)

Publication Number Publication Date
KR970056051U true KR970056051U (ko) 1997-10-13
KR200143432Y1 KR200143432Y1 (ko) 1999-06-15

Family

ID=19451616

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019960004282U KR200143432Y1 (ko) 1996-03-08 1996-03-08 화학기상증착장치

Country Status (1)

Country Link
KR (1) KR200143432Y1 (ko)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100634159B1 (ko) * 2000-07-10 2006-10-16 삼성전자주식회사 종형 씨브이디장치
KR100917797B1 (ko) * 2007-09-05 2009-09-18 주식회사 에이디피엔지니어링 플라즈마처리장치의 전극어셈블리

Also Published As

Publication number Publication date
KR200143432Y1 (ko) 1999-06-15

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