KR940027591U - 저압화학기상증착 시스템의 부산물 제거장치 - Google Patents
저압화학기상증착 시스템의 부산물 제거장치Info
- Publication number
- KR940027591U KR940027591U KR2019930007995U KR930007995U KR940027591U KR 940027591 U KR940027591 U KR 940027591U KR 2019930007995 U KR2019930007995 U KR 2019930007995U KR 930007995 U KR930007995 U KR 930007995U KR 940027591 U KR940027591 U KR 940027591U
- Authority
- KR
- South Korea
- Prior art keywords
- vapor deposition
- low pressure
- chemical vapor
- removal device
- pressure chemical
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019930007995U KR960000138Y1 (ko) | 1993-05-13 | 1993-05-13 | 저압화학기상증착 시스템의 부산물 제거장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019930007995U KR960000138Y1 (ko) | 1993-05-13 | 1993-05-13 | 저압화학기상증착 시스템의 부산물 제거장치 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR940027591U true KR940027591U (ko) | 1994-12-10 |
KR960000138Y1 KR960000138Y1 (ko) | 1996-01-04 |
Family
ID=19355202
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019930007995U KR960000138Y1 (ko) | 1993-05-13 | 1993-05-13 | 저압화학기상증착 시스템의 부산물 제거장치 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR960000138Y1 (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100589924B1 (ko) * | 1999-03-11 | 2006-06-15 | 동경 엘렉트론 주식회사 | 처리 장치, 처리 장치용 진공 배기 시스템, 감압 cvd장치, 감압 cvd 장치용 진공 배기 시스템 및 트랩 장치 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20160001103A (ko) * | 2014-06-26 | 2016-01-06 | 주식회사 우남케미코 | 우레탄계 약액주입패커를 이용한 연약지반 보강공법 |
-
1993
- 1993-05-13 KR KR2019930007995U patent/KR960000138Y1/ko not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100589924B1 (ko) * | 1999-03-11 | 2006-06-15 | 동경 엘렉트론 주식회사 | 처리 장치, 처리 장치용 진공 배기 시스템, 감압 cvd장치, 감압 cvd 장치용 진공 배기 시스템 및 트랩 장치 |
Also Published As
Publication number | Publication date |
---|---|
KR960000138Y1 (ko) | 1996-01-04 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E701 | Decision to grant or registration of patent right | ||
REGI | Registration of establishment | ||
FPAY | Annual fee payment |
Payment date: 20080102 Year of fee payment: 13 |
|
EXPY | Expiration of term |