KR960003077U - 저압 화학 기상 증착 장치용 웨이퍼 보트 - Google Patents

저압 화학 기상 증착 장치용 웨이퍼 보트

Info

Publication number
KR960003077U
KR960003077U KR2019940013379U KR19940013379U KR960003077U KR 960003077 U KR960003077 U KR 960003077U KR 2019940013379 U KR2019940013379 U KR 2019940013379U KR 19940013379 U KR19940013379 U KR 19940013379U KR 960003077 U KR960003077 U KR 960003077U
Authority
KR
South Korea
Prior art keywords
vapor deposition
low pressure
chemical vapor
pressure chemical
wafer boat
Prior art date
Application number
KR2019940013379U
Other languages
English (en)
Other versions
KR0136549Y1 (ko
Inventor
양희식
Original Assignee
엘지반도체주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엘지반도체주식회사 filed Critical 엘지반도체주식회사
Priority to KR2019940013379U priority Critical patent/KR0136549Y1/ko
Publication of KR960003077U publication Critical patent/KR960003077U/ko
Application granted granted Critical
Publication of KR0136549Y1 publication Critical patent/KR0136549Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67303—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
    • H01L21/67309—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements characterized by the substrate support

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR2019940013379U 1994-06-09 1994-06-09 저압 화학 기상 증착 장치용 웨이퍼 보트 KR0136549Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940013379U KR0136549Y1 (ko) 1994-06-09 1994-06-09 저압 화학 기상 증착 장치용 웨이퍼 보트

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940013379U KR0136549Y1 (ko) 1994-06-09 1994-06-09 저압 화학 기상 증착 장치용 웨이퍼 보트

Publications (2)

Publication Number Publication Date
KR960003077U true KR960003077U (ko) 1996-01-22
KR0136549Y1 KR0136549Y1 (ko) 1999-03-20

Family

ID=19385265

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940013379U KR0136549Y1 (ko) 1994-06-09 1994-06-09 저압 화학 기상 증착 장치용 웨이퍼 보트

Country Status (1)

Country Link
KR (1) KR0136549Y1 (ko)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100712495B1 (ko) * 2001-09-01 2007-04-27 삼성전자주식회사 웨이퍼 적재용 보트의 고정장치 및 그에 의한 고정방법
KR102526763B1 (ko) * 2022-02-28 2023-04-28 유한회사 주은이엔지 다기능 착즙 채유 장치

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100712495B1 (ko) * 2001-09-01 2007-04-27 삼성전자주식회사 웨이퍼 적재용 보트의 고정장치 및 그에 의한 고정방법
KR102526763B1 (ko) * 2022-02-28 2023-04-28 유한회사 주은이엔지 다기능 착즙 채유 장치

Also Published As

Publication number Publication date
KR0136549Y1 (ko) 1999-03-20

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