KR970046761U - 반도체 제조장비의 웨이퍼 보트 - Google Patents

반도체 제조장비의 웨이퍼 보트

Info

Publication number
KR970046761U
KR970046761U KR2019950039333U KR19950039333U KR970046761U KR 970046761 U KR970046761 U KR 970046761U KR 2019950039333 U KR2019950039333 U KR 2019950039333U KR 19950039333 U KR19950039333 U KR 19950039333U KR 970046761 U KR970046761 U KR 970046761U
Authority
KR
South Korea
Prior art keywords
semiconductor manufacturing
manufacturing equipment
wafer boat
boat
wafer
Prior art date
Application number
KR2019950039333U
Other languages
English (en)
Other versions
KR200240959Y1 (ko
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019950039333U priority Critical patent/KR200240959Y1/ko
Publication of KR970046761U publication Critical patent/KR970046761U/ko
Application granted granted Critical
Publication of KR200240959Y1 publication Critical patent/KR200240959Y1/ko

Links

KR2019950039333U 1995-12-08 1995-12-08 반도체제조장비의웨이퍼보트 KR200240959Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950039333U KR200240959Y1 (ko) 1995-12-08 1995-12-08 반도체제조장비의웨이퍼보트

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950039333U KR200240959Y1 (ko) 1995-12-08 1995-12-08 반도체제조장비의웨이퍼보트

Publications (2)

Publication Number Publication Date
KR970046761U true KR970046761U (ko) 1997-07-31
KR200240959Y1 KR200240959Y1 (ko) 2001-11-30

Family

ID=60877624

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950039333U KR200240959Y1 (ko) 1995-12-08 1995-12-08 반도체제조장비의웨이퍼보트

Country Status (1)

Country Link
KR (1) KR200240959Y1 (ko)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100426810B1 (ko) * 2001-03-21 2004-04-08 삼성전자주식회사 웨이퍼 캐리어
KR100564544B1 (ko) * 1999-01-14 2006-03-28 삼성전자주식회사 웨이퍼 적재용 보트

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100456636B1 (ko) 2002-11-25 2004-11-10 한국전자통신연구원 Ｉｅｅｅ 1394와 ｔｃｐ/ｉｐ를 동시에 지원하는 홈네트웍에서 지니 룩업 서비스 구조 및 방법

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100564544B1 (ko) * 1999-01-14 2006-03-28 삼성전자주식회사 웨이퍼 적재용 보트
KR100426810B1 (ko) * 2001-03-21 2004-04-08 삼성전자주식회사 웨이퍼 캐리어

Also Published As

Publication number Publication date
KR200240959Y1 (ko) 2001-11-30

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