KR970015311U - 반도체 제조장비의 댐바다이 - Google Patents

반도체 제조장비의 댐바다이

Info

Publication number
KR970015311U
KR970015311U KR2019950024897U KR19950024897U KR970015311U KR 970015311 U KR970015311 U KR 970015311U KR 2019950024897 U KR2019950024897 U KR 2019950024897U KR 19950024897 U KR19950024897 U KR 19950024897U KR 970015311 U KR970015311 U KR 970015311U
Authority
KR
South Korea
Prior art keywords
manufacturing
dam
equipment
semiconductor
semiconductor manufacturing
Prior art date
Application number
KR2019950024897U
Other languages
English (en)
Other versions
KR0127582Y1 (ko
Inventor
김영래
Original Assignee
엘지반도체주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엘지반도체주식회사 filed Critical 엘지반도체주식회사
Priority to KR2019950024897U priority Critical patent/KR0127582Y1/ko
Publication of KR970015311U publication Critical patent/KR970015311U/ko
Application granted granted Critical
Publication of KR0127582Y1 publication Critical patent/KR0127582Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67092—Apparatus for mechanical treatment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Lead Frames For Integrated Circuits (AREA)
KR2019950024897U 1995-09-15 1995-09-15 반도체 제조장비의 댐바다이 KR0127582Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950024897U KR0127582Y1 (ko) 1995-09-15 1995-09-15 반도체 제조장비의 댐바다이

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950024897U KR0127582Y1 (ko) 1995-09-15 1995-09-15 반도체 제조장비의 댐바다이

Publications (2)

Publication Number Publication Date
KR970015311U true KR970015311U (ko) 1997-04-28
KR0127582Y1 KR0127582Y1 (ko) 1998-12-01

Family

ID=19423380

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950024897U KR0127582Y1 (ko) 1995-09-15 1995-09-15 반도체 제조장비의 댐바다이

Country Status (1)

Country Link
KR (1) KR0127582Y1 (ko)

Also Published As

Publication number Publication date
KR0127582Y1 (ko) 1998-12-01

Similar Documents

Publication Publication Date Title
DE69631098D1 (de) Halbleiterstrukturen
DE69625265T2 (de) Halbleiterstrukturen
DE69619330D1 (de) Herstellung von Halbleiterwafern
KR960015805A (ko) 반도체 장치의 제조 방법
KR970015311U (ko) 반도체 제조장비의 댐바다이
KR970046761U (ko) 반도체 제조장비의 웨이퍼 보트
KR960009211A (ko) 반도체장치의 제조방법
KR970019728U (ko) 반도체 제조 장치의 회전 도포 장치
KR970046897U (ko) 반도체 제조장비의 히터블럭
KR970045362U (ko) 반도체 노광장치
KR970007234U (ko) 반도체 제조장비의 배기장치
KR970003193U (ko) 반도체 제조장치의 스퍼터 장치
KR970007226U (ko) 반도체 제조장치의 버블러
KR970011213U (ko) 반도체 제조용 장치
KR970025843U (ko) 반도체 제조설비의 척조립체
KR980005306U (ko) 반도체 제조장비의 반응로
KR980005382U (ko) 반도체 제조장비의 반응로
KR970046960U (ko) 반도체 제조설비의 냉각장치
KR970025829U (ko) 반도체 제조설비의 냉각장치
KR950021382U (ko) 반도체 제조장비의 노광장치
KR970015299U (ko) 반도체 제조장비의 배기장치
KR970025874U (ko) 반도체 패키지 마킹장비의 마킹구조
KR970046703U (ko) 반도체 식각장치의 클램프링
KR970046691U (ko) 반도체 제조장비의 스퍼터장치
KR960027614U (ko) 반도체 노광장비의 개량된 척구조

Legal Events

Date Code Title Description
A201 Request for examination
E701 Decision to grant or registration of patent right
REGI Registration of establishment
FPAY Annual fee payment

Payment date: 20090624

Year of fee payment: 12

LAPS Lapse due to unpaid annual fee