KR980005306U - 반도체 제조장비의 반응로 - Google Patents

반도체 제조장비의 반응로

Info

Publication number
KR980005306U
KR980005306U KR2019960015780U KR19960015780U KR980005306U KR 980005306 U KR980005306 U KR 980005306U KR 2019960015780 U KR2019960015780 U KR 2019960015780U KR 19960015780 U KR19960015780 U KR 19960015780U KR 980005306 U KR980005306 U KR 980005306U
Authority
KR
South Korea
Prior art keywords
reactor
semiconductor manufacturing
manufacturing equipment
equipment
semiconductor
Prior art date
Application number
KR2019960015780U
Other languages
English (en)
Other versions
KR200148775Y1 (ko
Inventor
김창현
Original Assignee
엘지반도체주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엘지반도체주식회사 filed Critical 엘지반도체주식회사
Priority to KR2019960015780U priority Critical patent/KR200148775Y1/ko
Publication of KR980005306U publication Critical patent/KR980005306U/ko
Application granted granted Critical
Publication of KR200148775Y1 publication Critical patent/KR200148775Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
KR2019960015780U 1996-06-14 1996-06-14 반도체 제조장비의 반응로 KR200148775Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019960015780U KR200148775Y1 (ko) 1996-06-14 1996-06-14 반도체 제조장비의 반응로

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019960015780U KR200148775Y1 (ko) 1996-06-14 1996-06-14 반도체 제조장비의 반응로

Publications (2)

Publication Number Publication Date
KR980005306U true KR980005306U (ko) 1998-03-30
KR200148775Y1 KR200148775Y1 (ko) 1999-06-15

Family

ID=19458496

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019960015780U KR200148775Y1 (ko) 1996-06-14 1996-06-14 반도체 제조장비의 반응로

Country Status (1)

Country Link
KR (1) KR200148775Y1 (ko)

Also Published As

Publication number Publication date
KR200148775Y1 (ko) 1999-06-15

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