KR980005383U - 반도체 제조용 반응로 - Google Patents
반도체 제조용 반응로Info
- Publication number
- KR980005383U KR980005383U KR2019960016688U KR19960016688U KR980005383U KR 980005383 U KR980005383 U KR 980005383U KR 2019960016688 U KR2019960016688 U KR 2019960016688U KR 19960016688 U KR19960016688 U KR 19960016688U KR 980005383 U KR980005383 U KR 980005383U
- Authority
- KR
- South Korea
- Prior art keywords
- reactor
- semiconductor manufacturing
- semiconductor
- manufacturing
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019960016688U KR980005383U (ko) | 1996-06-20 | 1996-06-20 | 반도체 제조용 반응로 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019960016688U KR980005383U (ko) | 1996-06-20 | 1996-06-20 | 반도체 제조용 반응로 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR980005383U true KR980005383U (ko) | 1998-03-30 |
Family
ID=60840244
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019960016688U KR980005383U (ko) | 1996-06-20 | 1996-06-20 | 반도체 제조용 반응로 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR980005383U (ko) |
-
1996
- 1996-06-20 KR KR2019960016688U patent/KR980005383U/ko not_active Application Discontinuation
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E601 | Decision to refuse application |