KR980005383U - 반도체 제조용 반응로 - Google Patents

반도체 제조용 반응로

Info

Publication number
KR980005383U
KR980005383U KR2019960016688U KR19960016688U KR980005383U KR 980005383 U KR980005383 U KR 980005383U KR 2019960016688 U KR2019960016688 U KR 2019960016688U KR 19960016688 U KR19960016688 U KR 19960016688U KR 980005383 U KR980005383 U KR 980005383U
Authority
KR
South Korea
Prior art keywords
reactor
semiconductor manufacturing
semiconductor
manufacturing
Prior art date
Application number
KR2019960016688U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019960016688U priority Critical patent/KR980005383U/ko
Publication of KR980005383U publication Critical patent/KR980005383U/ko

Links

KR2019960016688U 1996-06-20 1996-06-20 반도체 제조용 반응로 KR980005383U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019960016688U KR980005383U (ko) 1996-06-20 1996-06-20 반도체 제조용 반응로

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019960016688U KR980005383U (ko) 1996-06-20 1996-06-20 반도체 제조용 반응로

Publications (1)

Publication Number Publication Date
KR980005383U true KR980005383U (ko) 1998-03-30

Family

ID=60840244

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019960016688U KR980005383U (ko) 1996-06-20 1996-06-20 반도체 제조용 반응로

Country Status (1)

Country Link
KR (1) KR980005383U (ko)

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Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E601 Decision to refuse application