KR970025834U - 웨이퍼 정렬장치 - Google Patents

웨이퍼 정렬장치

Info

Publication number
KR970025834U
KR970025834U KR2019950032508U KR19950032508U KR970025834U KR 970025834 U KR970025834 U KR 970025834U KR 2019950032508 U KR2019950032508 U KR 2019950032508U KR 19950032508 U KR19950032508 U KR 19950032508U KR 970025834 U KR970025834 U KR 970025834U
Authority
KR
South Korea
Prior art keywords
wafer aligner
aligner
wafer
Prior art date
Application number
KR2019950032508U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019950032508U priority Critical patent/KR970025834U/ko
Publication of KR970025834U publication Critical patent/KR970025834U/ko

Links

KR2019950032508U 1995-11-07 1995-11-07 웨이퍼 정렬장치 KR970025834U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950032508U KR970025834U (ko) 1995-11-07 1995-11-07 웨이퍼 정렬장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950032508U KR970025834U (ko) 1995-11-07 1995-11-07 웨이퍼 정렬장치

Publications (1)

Publication Number Publication Date
KR970025834U true KR970025834U (ko) 1997-06-20

Family

ID=60906113

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950032508U KR970025834U (ko) 1995-11-07 1995-11-07 웨이퍼 정렬장치

Country Status (1)

Country Link
KR (1) KR970025834U (ko)

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Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E601 Decision to refuse application