KR970025834U - 웨이퍼 정렬장치 - Google Patents
웨이퍼 정렬장치Info
- Publication number
- KR970025834U KR970025834U KR2019950032508U KR19950032508U KR970025834U KR 970025834 U KR970025834 U KR 970025834U KR 2019950032508 U KR2019950032508 U KR 2019950032508U KR 19950032508 U KR19950032508 U KR 19950032508U KR 970025834 U KR970025834 U KR 970025834U
- Authority
- KR
- South Korea
- Prior art keywords
- wafer aligner
- aligner
- wafer
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019950032508U KR970025834U (ko) | 1995-11-07 | 1995-11-07 | 웨이퍼 정렬장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019950032508U KR970025834U (ko) | 1995-11-07 | 1995-11-07 | 웨이퍼 정렬장치 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR970025834U true KR970025834U (ko) | 1997-06-20 |
Family
ID=60906113
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019950032508U KR970025834U (ko) | 1995-11-07 | 1995-11-07 | 웨이퍼 정렬장치 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR970025834U (ko) |
-
1995
- 1995-11-07 KR KR2019950032508U patent/KR970025834U/ko not_active Application Discontinuation
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E601 | Decision to refuse application |