KR950034374U - 플래트존 얼라이너 - Google Patents
플래트존 얼라이너Info
- Publication number
- KR950034374U KR950034374U KR2019940012566U KR19940012566U KR950034374U KR 950034374 U KR950034374 U KR 950034374U KR 2019940012566 U KR2019940012566 U KR 2019940012566U KR 19940012566 U KR19940012566 U KR 19940012566U KR 950034374 U KR950034374 U KR 950034374U
- Authority
- KR
- South Korea
- Prior art keywords
- platzone
- aligner
- platzone aligner
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67313—Horizontal boat type carrier whereby the substrates are vertically supported, e.g. comprising rod-shaped elements
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR94012566U KR0114986Y1 (en) | 1994-05-31 | 1994-05-31 | Flatzone aligner |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR94012566U KR0114986Y1 (en) | 1994-05-31 | 1994-05-31 | Flatzone aligner |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR950034374U true KR950034374U (ko) | 1995-12-18 |
| KR0114986Y1 KR0114986Y1 (en) | 1998-04-15 |
Family
ID=19384658
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR94012566U KR0114986Y1 (en) | 1994-05-31 | 1994-05-31 | Flatzone aligner |
Country Status (1)
| Country | Link |
|---|---|
| KR (1) | KR0114986Y1 (ko) |
-
1994
- 1994-05-31 KR KR94012566U patent/KR0114986Y1/ko not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| KR0114986Y1 (en) | 1998-04-15 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A201 | Request for examination | ||
| E902 | Notification of reason for refusal | ||
| E701 | Decision to grant or registration of patent right | ||
| REGI | Registration of establishment | ||
| FPAY | Annual fee payment |
Payment date: 20081125 Year of fee payment: 12 |
|
| EXPY | Expiration of term |