KR970046824U - 웨이퍼 플랫존 정렬장치 - Google Patents
웨이퍼 플랫존 정렬장치Info
- Publication number
- KR970046824U KR970046824U KR2019950039334U KR19950039334U KR970046824U KR 970046824 U KR970046824 U KR 970046824U KR 2019950039334 U KR2019950039334 U KR 2019950039334U KR 19950039334 U KR19950039334 U KR 19950039334U KR 970046824 U KR970046824 U KR 970046824U
- Authority
- KR
- South Korea
- Prior art keywords
- flat zone
- wafer flat
- zone aligner
- aligner
- wafer
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019950039334U KR200205408Y1 (ko) | 1995-12-08 | 1995-12-08 | 웨이퍼 플랫존 정렬장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019950039334U KR200205408Y1 (ko) | 1995-12-08 | 1995-12-08 | 웨이퍼 플랫존 정렬장치 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR970046824U true KR970046824U (ko) | 1997-07-31 |
KR200205408Y1 KR200205408Y1 (ko) | 2001-01-15 |
Family
ID=60877629
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019950039334U KR200205408Y1 (ko) | 1995-12-08 | 1995-12-08 | 웨이퍼 플랫존 정렬장치 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR200205408Y1 (ko) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101531560B1 (ko) * | 2013-05-03 | 2015-06-26 | 주식회사 선익시스템 | 웨이퍼 적재장치 |
KR102374092B1 (ko) * | 2021-10-14 | 2022-03-14 | 이세창 | 웨이퍼 코팅장치 |
-
1995
- 1995-12-08 KR KR2019950039334U patent/KR200205408Y1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR200205408Y1 (ko) | 2001-01-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E701 | Decision to grant or registration of patent right | ||
REGI | Registration of establishment | ||
FPAY | Annual fee payment |
Payment date: 20100825 Year of fee payment: 11 |
|
EXPY | Expiration of term |