KR970046824U - 웨이퍼 플랫존 정렬장치 - Google Patents

웨이퍼 플랫존 정렬장치

Info

Publication number
KR970046824U
KR970046824U KR2019950039334U KR19950039334U KR970046824U KR 970046824 U KR970046824 U KR 970046824U KR 2019950039334 U KR2019950039334 U KR 2019950039334U KR 19950039334 U KR19950039334 U KR 19950039334U KR 970046824 U KR970046824 U KR 970046824U
Authority
KR
South Korea
Prior art keywords
flat zone
wafer flat
zone aligner
aligner
wafer
Prior art date
Application number
KR2019950039334U
Other languages
English (en)
Other versions
KR200205408Y1 (ko
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019950039334U priority Critical patent/KR200205408Y1/ko
Publication of KR970046824U publication Critical patent/KR970046824U/ko
Application granted granted Critical
Publication of KR200205408Y1 publication Critical patent/KR200205408Y1/ko

Links

KR2019950039334U 1995-12-08 1995-12-08 웨이퍼 플랫존 정렬장치 KR200205408Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950039334U KR200205408Y1 (ko) 1995-12-08 1995-12-08 웨이퍼 플랫존 정렬장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950039334U KR200205408Y1 (ko) 1995-12-08 1995-12-08 웨이퍼 플랫존 정렬장치

Publications (2)

Publication Number Publication Date
KR970046824U true KR970046824U (ko) 1997-07-31
KR200205408Y1 KR200205408Y1 (ko) 2001-01-15

Family

ID=60877629

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950039334U KR200205408Y1 (ko) 1995-12-08 1995-12-08 웨이퍼 플랫존 정렬장치

Country Status (1)

Country Link
KR (1) KR200205408Y1 (ko)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101531560B1 (ko) * 2013-05-03 2015-06-26 주식회사 선익시스템 웨이퍼 적재장치
KR102374092B1 (ko) * 2021-10-14 2022-03-14 이세창 웨이퍼 코팅장치

Also Published As

Publication number Publication date
KR200205408Y1 (ko) 2001-01-15

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