KR970025814U - 웨이퍼 이물질 제거장치 - Google Patents

웨이퍼 이물질 제거장치

Info

Publication number
KR970025814U
KR970025814U KR2019950032509U KR19950032509U KR970025814U KR 970025814 U KR970025814 U KR 970025814U KR 2019950032509 U KR2019950032509 U KR 2019950032509U KR 19950032509 U KR19950032509 U KR 19950032509U KR 970025814 U KR970025814 U KR 970025814U
Authority
KR
South Korea
Prior art keywords
removal device
debris removal
wafer debris
wafer
removal
Prior art date
Application number
KR2019950032509U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019950032509U priority Critical patent/KR970025814U/ko
Publication of KR970025814U publication Critical patent/KR970025814U/ko

Links

KR2019950032509U 1995-11-07 1995-11-07 웨이퍼 이물질 제거장치 KR970025814U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950032509U KR970025814U (ko) 1995-11-07 1995-11-07 웨이퍼 이물질 제거장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950032509U KR970025814U (ko) 1995-11-07 1995-11-07 웨이퍼 이물질 제거장치

Publications (1)

Publication Number Publication Date
KR970025814U true KR970025814U (ko) 1997-06-20

Family

ID=60906226

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950032509U KR970025814U (ko) 1995-11-07 1995-11-07 웨이퍼 이물질 제거장치

Country Status (1)

Country Link
KR (1) KR970025814U (ko)

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Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E601 Decision to refuse application