KR970012405A - 상변화형 광디스크의 제조방법 - Google Patents

상변화형 광디스크의 제조방법 Download PDF

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Publication number
KR970012405A
KR970012405A KR1019950026446A KR19950026446A KR970012405A KR 970012405 A KR970012405 A KR 970012405A KR 1019950026446 A KR1019950026446 A KR 1019950026446A KR 19950026446 A KR19950026446 A KR 19950026446A KR 970012405 A KR970012405 A KR 970012405A
Authority
KR
South Korea
Prior art keywords
recording film
forming
phase change
manufacturing
optical disc
Prior art date
Application number
KR1019950026446A
Other languages
English (en)
Other versions
KR0151278B1 (ko
Inventor
김용회
김명룡
Original Assignee
구자홍
Lg 전자주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 구자홍, Lg 전자주식회사 filed Critical 구자홍
Priority to KR1019950026446A priority Critical patent/KR0151278B1/ko
Publication of KR970012405A publication Critical patent/KR970012405A/ko
Application granted granted Critical
Publication of KR0151278B1 publication Critical patent/KR0151278B1/ko

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Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
    • G11B7/266—Sputtering or spin-coating layers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/257—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/258—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of reflective layers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B2220/00—Record carriers by type
    • G11B2220/20—Disc-shaped record carriers
    • G11B2220/25—Disc-shaped record carriers characterised in that the disc is based on a specific recording technology
    • G11B2220/2537—Optical discs

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Manufacturing Optical Record Carriers (AREA)

Abstract

본 발명은 상변화형 광디스크에서 기록막의 마이크로셀화에 의한 매체의 유동을 방지하여 반복기록 특성이 우수하고 잡음이 적은 고밀도의 상변화형 광디스크 제조에 관한 것으로, 기판위에 하부 유전체층을 성막시키는 단계, 상기 하부 유전체층 위에 상변화형 기록막을 성막함과 함께 결정질로 변화시키는 단계, 상기 결정될 기록막을 스퍼터 에칭하여 마이크로셀화 시키는 단계, 상기 마이크로셀화된 기록막위에 제2상부 유전체층과 반사층을 형성시키는 단계로 이루어진 상변화형 광디스크의 제조방법에 관한 기술이다.

Description

상변화형 광디스크의 제조방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제2도는 본 발명의 스퍼터 에칭에 따른 광디스크 단면구조도.

Claims (3)

  1. 기판위에 하부 유전체층을 성막시키는 단계, 상부 하부 유전체층 위헤 상변화형 기록막을 성막함과 함께 결정질로 변화시키는 단계, 상기 결정질 기록막을 스퍼터 에칭하여 마이크로셀화 시키는 단계, 상기 마이크로셀화된 기록막 위헤 제2상부 유전체층과 반사층을 형성시키는 단계로 이루어진 상변화형 광디스크의 제조방법.
  2. 제1항에 있어서, 결정질 기록막 형성을 위해 스퍼터 가스압력(Sputter Gas Pressure)을 통상보다 낮게 하고, 원격가열하는 단계로 이루어진 상변화형 광디스크의 제조방법.
  3. 제1항에 있어서, 마이크로셀화를 위한 스퍼터링 에칭시 스퍼터링의 전압의 극성을 바꾸어 에칭하는 단계로 이루어진 상변화형 광디스크의 제조방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019950026446A 1995-08-24 1995-08-24 상변화형 광디스크의 제조방법 KR0151278B1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019950026446A KR0151278B1 (ko) 1995-08-24 1995-08-24 상변화형 광디스크의 제조방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019950026446A KR0151278B1 (ko) 1995-08-24 1995-08-24 상변화형 광디스크의 제조방법

Publications (2)

Publication Number Publication Date
KR970012405A true KR970012405A (ko) 1997-03-29
KR0151278B1 KR0151278B1 (ko) 1998-10-15

Family

ID=19424423

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950026446A KR0151278B1 (ko) 1995-08-24 1995-08-24 상변화형 광디스크의 제조방법

Country Status (1)

Country Link
KR (1) KR0151278B1 (ko)

Also Published As

Publication number Publication date
KR0151278B1 (ko) 1998-10-15

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