KR960038727U - 웨이퍼 가장자리 치수 점검자 - Google Patents
웨이퍼 가장자리 치수 점검자Info
- Publication number
- KR960038727U KR960038727U KR2019950010753U KR19950010753U KR960038727U KR 960038727 U KR960038727 U KR 960038727U KR 2019950010753 U KR2019950010753 U KR 2019950010753U KR 19950010753 U KR19950010753 U KR 19950010753U KR 960038727 U KR960038727 U KR 960038727U
- Authority
- KR
- South Korea
- Prior art keywords
- wafer edge
- edge dimension
- checker
- dimension checker
- wafer
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019950010753U KR0123866Y1 (ko) | 1995-05-19 | 1995-05-19 | 웨이퍼 가장자리 치수 점검자 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019950010753U KR0123866Y1 (ko) | 1995-05-19 | 1995-05-19 | 웨이퍼 가장자리 치수 점검자 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR960038727U true KR960038727U (ko) | 1996-12-18 |
KR0123866Y1 KR0123866Y1 (ko) | 1999-02-18 |
Family
ID=19413599
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019950010753U KR0123866Y1 (ko) | 1995-05-19 | 1995-05-19 | 웨이퍼 가장자리 치수 점검자 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR0123866Y1 (ko) |
-
1995
- 1995-05-19 KR KR2019950010753U patent/KR0123866Y1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR0123866Y1 (ko) | 1999-02-18 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE69631098D1 (de) | Halbleiterstrukturen | |
DE59510981D1 (de) | Bohrfutter | |
DE69625265D1 (de) | Halbleiterstrukturen | |
DE69612854T2 (de) | Spannfutter | |
DE69533127D1 (de) | Kühlkörper | |
DE69620177D1 (de) | Reflektierende halbleitersubstrate | |
DE69427629D1 (de) | Halbleiterstapel | |
DE59609022D1 (de) | Verbindungssubstrat | |
KR960038727U (ko) | 웨이퍼 가장자리 치수 점검자 | |
KR960015613U (ko) | 웨이퍼 척 | |
KR970046824U (ko) | 웨이퍼 플랫존 정렬장치 | |
KR970046599U (ko) | 웨이퍼척 | |
KR970025834U (ko) | 웨이퍼 정렬장치 | |
KR970025846U (ko) | 웨이퍼 운반구 | |
KR970046846U (ko) | 웨이퍼 스토퍼 | |
KR970006818U (ko) | 점검기 | |
KR970003265U (ko) | 웨이퍼 척 | |
KR960035622U (ko) | 웨이퍼 척 | |
KR970011211U (ko) | 웨이퍼 척 | |
KR970046959U (ko) | 웨이퍼 구조 | |
DE29505875U1 (de) | Antistatische IC-Spezialzange | |
KR960015601U (ko) | 웨이퍼 현상장치 | |
KR960015593U (ko) | 웨이퍼 현상장치 | |
KR970003198U (ko) | 웨이퍼 세정장치 | |
KR970046721U (ko) | 웨이퍼 세정장치 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E701 | Decision to grant or registration of patent right | ||
REGI | Registration of establishment | ||
FPAY | Annual fee payment |
Payment date: 20090526 Year of fee payment: 12 |
|
EXPY | Expiration of term |