KR960031398A - 신규한 압전세라믹 조성물 및 그를 이용한 적층형 변위소자의 제조방법 - Google Patents

신규한 압전세라믹 조성물 및 그를 이용한 적층형 변위소자의 제조방법 Download PDF

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KR960031398A
KR960031398A KR1019950003327A KR19950003327A KR960031398A KR 960031398 A KR960031398 A KR 960031398A KR 1019950003327 A KR1019950003327 A KR 1019950003327A KR 19950003327 A KR19950003327 A KR 19950003327A KR 960031398 A KR960031398 A KR 960031398A
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KR970010348B1 (ko
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김호기
조정호
최원열
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심상철
한국과학기술원
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    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/48Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates
    • C04B35/49Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates
    • C04B35/491Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates based on lead zirconates and lead titanates, e.g. PZT
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28BSHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
    • B28B3/00Producing shaped articles from the material by using presses; Presses specially adapted therefor
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/626Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
    • C04B35/62605Treating the starting powders individually or as mixtures
    • C04B35/62645Thermal treatment of powders or mixtures thereof other than sintering
    • C04B35/62675Thermal treatment of powders or mixtures thereof other than sintering characterised by the treatment temperature
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    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/64Burning or sintering processes
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    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81Coating or impregnation
    • C04B41/89Coating or impregnation for obtaining at least two superposed coatings having different compositions
    • C04B41/90Coating or impregnation for obtaining at least two superposed coatings having different compositions at least one coating being a metal
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/80Constructional details
    • H10N30/85Piezoelectric or electrostrictive active materials
    • H10N30/853Ceramic compositions
    • H10N30/8548Lead-based oxides
    • H10N30/8554Lead-zirconium titanate [PZT] based
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28BSHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
    • B28B11/00Apparatus or processes for treating or working the shaped or preshaped articles
    • B28B11/08Apparatus or processes for treating or working the shaped or preshaped articles for reshaping the surface, e.g. smoothing, roughening, corrugating, making screw-threads
    • B28B11/0845Apparatus or processes for treating or working the shaped or preshaped articles for reshaping the surface, e.g. smoothing, roughening, corrugating, making screw-threads for smoothing
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/656Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes characterised by specific heating conditions during heat treatment
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  • Ceramic Engineering (AREA)
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Abstract

본 발명은 신규한 압전세라믹 조성물 및 그를 이용한 적층형 변위소자의 제조방법에 관한 것이다. 좀 더 구체적으로, 본 발명은 압전특성이 우수하며 저온소결이 가능한 신규한 압전세라믹 조성물 및 전기 조성물을 이용하여 압전특성이 우수한 적측형 변위소자를 제조하는 방법과 적층형 변위소자에 관한 것이다. 본 발명의 압전세라믹 조성물은 일반식 Pb1-a-bBaaCdb(Zn1/3Nb2/3)c(Ni1/3Nb2/3)0.15-c(ZrdTi1-d)0.85O3로 표시된다. 이때, a, b, c 및 d는 몰수를 나타내고; a는 0.07 내지 0.13; b는 0.01 내지 0.03; c는 0.001 내지 0.1; 및, d는 0.4 내지 0.6이다. 또한, 본 발명의 적측형 변위소자는, 전기 조성물을 건조하고 800 내지 900℃에서 2 내지 4시간 동안 하소하는 공정; 전기 하소된 조성물에 바인다(binder)를 가하여 조립화시키고 0.8 내지 1.2ton/㎤의 압력으로 가압성형하는 공정; 전기 성형체를 1,000 내지 1,100℃에서 1 내지 6시간 소결하는 공정; 및, 전기 소결체를 디스크 형상으로 연마하고 적층 및 전극을 부착하는 공정에 의해 제조되며, 본 발명에 의해 600pC/N 이상의 압전정수(d33) 및 60% 이상의 전기기계 결합계수(Kp)를 지닌 적층형 변위소자를 제조할 수 있다.

Description

신규한 압전세라믹 조성물 및 그를 이용한 적층형 변위소자의 제조방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음

Claims (4)

  1. 하기 일반식으로 표시되는 압전세라믹 조성물 :
    Pb1-a-bBaaCdb(Zn1/3Nb2/3)c(Ni1/3Nb2/3)0.15-c(ZrdTi1-d)0.85O3
    상기 식에서, a, b, c 및 d는 몰수를 나타내고; a는 0.07 내지 0.13; b는 0.01 내지 0.03; c는 0.001 내지 0.1; 및, d는 0.4 내지 0.6이다.
  2. (i) 제1항에 조성물을 건조하고 800 내지 900℃에서 2 내지 4시간 동안 하소하는 공정; (ⅱ) 전기 공정에서 하소된 조성물에 바인다를 가하여 조립화시키고 0.8 내지 1.2ton/㎤의 압력으로 가압성형하는 공정; (ⅲ) 전기 공정에서 수득한 성형체를 1,000 내지 1,100℃에서 1 내지 6시간 소결하는 공정; 및, (ⅳ) 전기 공정에서 수득한 소결체를 디스크 형상으로 연마하고 적층 및 전극을 부착하는 공정을 포함하는 적측형 변위소자의 제조방법.
  3. 제2항의 제조방법에 의해 제조된 적측형 변위소자.
  4. 제3항에 있어서, 압전정수(d33)는 600pC/N이상이며, 전기기계 결합계수(Kp)는 60%이상인 것을 특징으로 하는 적층형 변위소자.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019950003327A 1995-02-21 1995-02-21 신규한 압전세라믹 조성물 및 그를 이용한 적층형 변위소자의 제조방법 KR970010348B1 (ko)

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KR1019950003327A KR970010348B1 (ko) 1995-02-21 1995-02-21 신규한 압전세라믹 조성물 및 그를 이용한 적층형 변위소자의 제조방법

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KR1019950003327A KR970010348B1 (ko) 1995-02-21 1995-02-21 신규한 압전세라믹 조성물 및 그를 이용한 적층형 변위소자의 제조방법

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KR970010348B1 KR970010348B1 (ko) 1997-06-25

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