KR960025339U - 웨이퍼캐리어 클리닝 장치 - Google Patents
웨이퍼캐리어 클리닝 장치Info
- Publication number
- KR960025339U KR960025339U KR2019940036959U KR19940036959U KR960025339U KR 960025339 U KR960025339 U KR 960025339U KR 2019940036959 U KR2019940036959 U KR 2019940036959U KR 19940036959 U KR19940036959 U KR 19940036959U KR 960025339 U KR960025339 U KR 960025339U
- Authority
- KR
- South Korea
- Prior art keywords
- cleaning device
- wafer carrier
- carrier cleaning
- wafer
- cleaning
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019940036959U KR960025339U (ko) | 1994-12-28 | 1994-12-28 | 웨이퍼캐리어 클리닝 장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019940036959U KR960025339U (ko) | 1994-12-28 | 1994-12-28 | 웨이퍼캐리어 클리닝 장치 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR960025339U true KR960025339U (ko) | 1996-07-22 |
Family
ID=60853177
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019940036959U KR960025339U (ko) | 1994-12-28 | 1994-12-28 | 웨이퍼캐리어 클리닝 장치 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR960025339U (ko) |
-
1994
- 1994-12-28 KR KR2019940036959U patent/KR960025339U/ko not_active Application Discontinuation
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
WITN | Withdrawal due to no request for examination |