KR960025339U - 웨이퍼캐리어 클리닝 장치 - Google Patents

웨이퍼캐리어 클리닝 장치

Info

Publication number
KR960025339U
KR960025339U KR2019940036959U KR19940036959U KR960025339U KR 960025339 U KR960025339 U KR 960025339U KR 2019940036959 U KR2019940036959 U KR 2019940036959U KR 19940036959 U KR19940036959 U KR 19940036959U KR 960025339 U KR960025339 U KR 960025339U
Authority
KR
South Korea
Prior art keywords
cleaning device
wafer carrier
carrier cleaning
wafer
cleaning
Prior art date
Application number
KR2019940036959U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019940036959U priority Critical patent/KR960025339U/ko
Publication of KR960025339U publication Critical patent/KR960025339U/ko

Links

KR2019940036959U 1994-12-28 1994-12-28 웨이퍼캐리어 클리닝 장치 KR960025339U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940036959U KR960025339U (ko) 1994-12-28 1994-12-28 웨이퍼캐리어 클리닝 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940036959U KR960025339U (ko) 1994-12-28 1994-12-28 웨이퍼캐리어 클리닝 장치

Publications (1)

Publication Number Publication Date
KR960025339U true KR960025339U (ko) 1996-07-22

Family

ID=60853177

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940036959U KR960025339U (ko) 1994-12-28 1994-12-28 웨이퍼캐리어 클리닝 장치

Country Status (1)

Country Link
KR (1) KR960025339U (ko)

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Legal Events

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