KR960006354U - 웨이퍼 고정 장치 - Google Patents

웨이퍼 고정 장치

Info

Publication number
KR960006354U
KR960006354U KR2019940016967U KR19940016967U KR960006354U KR 960006354 U KR960006354 U KR 960006354U KR 2019940016967 U KR2019940016967 U KR 2019940016967U KR 19940016967 U KR19940016967 U KR 19940016967U KR 960006354 U KR960006354 U KR 960006354U
Authority
KR
South Korea
Prior art keywords
holding device
wafer holding
wafer
holding
Prior art date
Application number
KR2019940016967U
Other languages
English (en)
Other versions
KR0116364Y1 (ko
Inventor
김명조
이형호
전재종
이광준
Original Assignee
현대전자산업 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대전자산업 주식회사 filed Critical 현대전자산업 주식회사
Priority to KR2019940016967U priority Critical patent/KR0116364Y1/ko
Publication of KR960006354U publication Critical patent/KR960006354U/ko
Application granted granted Critical
Publication of KR0116364Y1 publication Critical patent/KR0116364Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR2019940016967U 1994-07-08 1994-07-08 웨이퍼 고정 장치 KR0116364Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940016967U KR0116364Y1 (ko) 1994-07-08 1994-07-08 웨이퍼 고정 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940016967U KR0116364Y1 (ko) 1994-07-08 1994-07-08 웨이퍼 고정 장치

Publications (2)

Publication Number Publication Date
KR960006354U true KR960006354U (ko) 1996-02-17
KR0116364Y1 KR0116364Y1 (ko) 1998-04-22

Family

ID=19387968

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940016967U KR0116364Y1 (ko) 1994-07-08 1994-07-08 웨이퍼 고정 장치

Country Status (1)

Country Link
KR (1) KR0116364Y1 (ko)

Also Published As

Publication number Publication date
KR0116364Y1 (ko) 1998-04-22

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