KR960025424U - 웨이퍼 클램핑장치 - Google Patents

웨이퍼 클램핑장치

Info

Publication number
KR960025424U
KR960025424U KR2019940035955U KR19940035955U KR960025424U KR 960025424 U KR960025424 U KR 960025424U KR 2019940035955 U KR2019940035955 U KR 2019940035955U KR 19940035955 U KR19940035955 U KR 19940035955U KR 960025424 U KR960025424 U KR 960025424U
Authority
KR
South Korea
Prior art keywords
clamping device
wafer clamping
wafer
clamping
Prior art date
Application number
KR2019940035955U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019940035955U priority Critical patent/KR960025424U/ko
Publication of KR960025424U publication Critical patent/KR960025424U/ko

Links

KR2019940035955U 1994-12-26 1994-12-26 웨이퍼 클램핑장치 KR960025424U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940035955U KR960025424U (ko) 1994-12-26 1994-12-26 웨이퍼 클램핑장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940035955U KR960025424U (ko) 1994-12-26 1994-12-26 웨이퍼 클램핑장치

Publications (1)

Publication Number Publication Date
KR960025424U true KR960025424U (ko) 1996-07-22

Family

ID=60853081

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940035955U KR960025424U (ko) 1994-12-26 1994-12-26 웨이퍼 클램핑장치

Country Status (1)

Country Link
KR (1) KR960025424U (ko)

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Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E601 Decision to refuse application