KR960025424U - 웨이퍼 클램핑장치 - Google Patents
웨이퍼 클램핑장치Info
- Publication number
- KR960025424U KR960025424U KR2019940035955U KR19940035955U KR960025424U KR 960025424 U KR960025424 U KR 960025424U KR 2019940035955 U KR2019940035955 U KR 2019940035955U KR 19940035955 U KR19940035955 U KR 19940035955U KR 960025424 U KR960025424 U KR 960025424U
- Authority
- KR
- South Korea
- Prior art keywords
- clamping device
- wafer clamping
- wafer
- clamping
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019940035955U KR960025424U (ko) | 1994-12-26 | 1994-12-26 | 웨이퍼 클램핑장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019940035955U KR960025424U (ko) | 1994-12-26 | 1994-12-26 | 웨이퍼 클램핑장치 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR960025424U true KR960025424U (ko) | 1996-07-22 |
Family
ID=60853081
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019940035955U KR960025424U (ko) | 1994-12-26 | 1994-12-26 | 웨이퍼 클램핑장치 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR960025424U (ko) |
-
1994
- 1994-12-26 KR KR2019940035955U patent/KR960025424U/ko not_active Application Discontinuation
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E601 | Decision to refuse application |