KR960025432U - 웨이퍼 홀딩장치 - Google Patents

웨이퍼 홀딩장치

Info

Publication number
KR960025432U
KR960025432U KR2019940037361U KR19940037361U KR960025432U KR 960025432 U KR960025432 U KR 960025432U KR 2019940037361 U KR2019940037361 U KR 2019940037361U KR 19940037361 U KR19940037361 U KR 19940037361U KR 960025432 U KR960025432 U KR 960025432U
Authority
KR
South Korea
Prior art keywords
holding device
wafer holding
wafer
holding
Prior art date
Application number
KR2019940037361U
Other languages
English (en)
Other versions
KR0118691Y1 (ko
Inventor
정창렬
유형성
김용술
Original Assignee
현대전자산업주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대전자산업주식회사 filed Critical 현대전자산업주식회사
Priority to KR2019940037361U priority Critical patent/KR0118691Y1/ko
Publication of KR960025432U publication Critical patent/KR960025432U/ko
Application granted granted Critical
Publication of KR0118691Y1 publication Critical patent/KR0118691Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR2019940037361U 1994-12-29 1994-12-29 웨이퍼 홀딩장치 KR0118691Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940037361U KR0118691Y1 (ko) 1994-12-29 1994-12-29 웨이퍼 홀딩장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940037361U KR0118691Y1 (ko) 1994-12-29 1994-12-29 웨이퍼 홀딩장치

Publications (2)

Publication Number Publication Date
KR960025432U true KR960025432U (ko) 1996-07-22
KR0118691Y1 KR0118691Y1 (ko) 1998-08-01

Family

ID=19403912

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940037361U KR0118691Y1 (ko) 1994-12-29 1994-12-29 웨이퍼 홀딩장치

Country Status (1)

Country Link
KR (1) KR0118691Y1 (ko)

Also Published As

Publication number Publication date
KR0118691Y1 (ko) 1998-08-01

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Legal Events

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A201 Request for examination
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