KR960019103U - 기판 세정 장치 - Google Patents
기판 세정 장치Info
- Publication number
- KR960019103U KR960019103U KR2019940029295U KR19940029295U KR960019103U KR 960019103 U KR960019103 U KR 960019103U KR 2019940029295 U KR2019940029295 U KR 2019940029295U KR 19940029295 U KR19940029295 U KR 19940029295U KR 960019103 U KR960019103 U KR 960019103U
- Authority
- KR
- South Korea
- Prior art keywords
- cleaning device
- substrate cleaning
- substrate
- cleaning
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019940029295U KR960019103U (ko) | 1994-11-04 | 1994-11-04 | 기판 세정 장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019940029295U KR960019103U (ko) | 1994-11-04 | 1994-11-04 | 기판 세정 장치 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR960019103U true KR960019103U (ko) | 1996-06-19 |
Family
ID=60847976
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019940029295U KR960019103U (ko) | 1994-11-04 | 1994-11-04 | 기판 세정 장치 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR960019103U (ko) |
-
1994
- 1994-11-04 KR KR2019940029295U patent/KR960019103U/ko not_active Application Discontinuation
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
WITN | Withdrawal due to no request for examination |