KR960019103U - 기판 세정 장치 - Google Patents

기판 세정 장치

Info

Publication number
KR960019103U
KR960019103U KR2019940029295U KR19940029295U KR960019103U KR 960019103 U KR960019103 U KR 960019103U KR 2019940029295 U KR2019940029295 U KR 2019940029295U KR 19940029295 U KR19940029295 U KR 19940029295U KR 960019103 U KR960019103 U KR 960019103U
Authority
KR
South Korea
Prior art keywords
cleaning device
substrate cleaning
substrate
cleaning
Prior art date
Application number
KR2019940029295U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019940029295U priority Critical patent/KR960019103U/ko
Publication of KR960019103U publication Critical patent/KR960019103U/ko

Links

KR2019940029295U 1994-11-04 1994-11-04 기판 세정 장치 KR960019103U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940029295U KR960019103U (ko) 1994-11-04 1994-11-04 기판 세정 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940029295U KR960019103U (ko) 1994-11-04 1994-11-04 기판 세정 장치

Publications (1)

Publication Number Publication Date
KR960019103U true KR960019103U (ko) 1996-06-19

Family

ID=60847976

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940029295U KR960019103U (ko) 1994-11-04 1994-11-04 기판 세정 장치

Country Status (1)

Country Link
KR (1) KR960019103U (ko)

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Legal Events

Date Code Title Description
WITN Withdrawal due to no request for examination