KR960015841A - 완충 수단을 갖춘 웨이퍼 캐리어 - Google Patents

완충 수단을 갖춘 웨이퍼 캐리어 Download PDF

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Publication number
KR960015841A
KR960015841A KR1019950034154A KR19950034154A KR960015841A KR 960015841 A KR960015841 A KR 960015841A KR 1019950034154 A KR1019950034154 A KR 1019950034154A KR 19950034154 A KR19950034154 A KR 19950034154A KR 960015841 A KR960015841 A KR 960015841A
Authority
KR
South Korea
Prior art keywords
shock absorber
wafer carrier
wafer
carrier
absorber
Prior art date
Application number
KR1019950034154A
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of KR960015841A publication Critical patent/KR960015841A/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67369—Closed carriers characterised by shock absorbing elements, e.g. retainers or cushions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D25/00—Details of other kinds or types of rigid or semi-rigid containers
    • B65D25/02—Internal fittings
    • B65D25/10—Devices to locate articles in containers

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Packaging Frangible Articles (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR1019950034154A 1994-10-06 1995-10-05 완충 수단을 갖춘 웨이퍼 캐리어 KR960015841A (ko)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24258194A JP2796502B2 (ja) 1994-10-06 1994-10-06 ウェーハ収納容器のウェーハ抑え

Publications (1)

Publication Number Publication Date
KR960015841A true KR960015841A (ko) 1996-05-22

Family

ID=17091198

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950034154A KR960015841A (ko) 1994-10-06 1995-10-05 완충 수단을 갖춘 웨이퍼 캐리어

Country Status (5)

Country Link
JP (1) JP2796502B2 (ko)
KR (1) KR960015841A (ko)
DE (1) DE19537193A1 (ko)
FR (1) FR2725960B1 (ko)
GB (1) GB2293816B (ko)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20010053787A (ko) * 1999-12-01 2001-07-02 마이클 디. 오브라이언 웨이퍼 핸들링장치
KR100832702B1 (ko) * 2003-12-24 2008-05-28 동부일렉트로닉스 주식회사 반도체 웨이퍼 세정장치

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5788082A (en) * 1996-07-12 1998-08-04 Fluoroware, Inc. Wafer carrier
US5711427A (en) * 1996-07-12 1998-01-27 Fluoroware, Inc. Wafer carrier with door
US6193090B1 (en) 1999-04-06 2001-02-27 3M Innovative Properties Company Reusable container
DE10151320B4 (de) * 2001-10-17 2006-02-09 Infineon Technologies Ag Scheibenträger
JP4903893B2 (ja) * 2003-12-02 2012-03-28 ミライアル株式会社 薄板支持容器用蓋体
US20060042998A1 (en) * 2004-08-24 2006-03-02 Haggard Clifton C Cushion for packing disks such as semiconductor wafers
JP4606294B2 (ja) * 2005-09-27 2011-01-05 Ｏｋｉセミコンダクタ株式会社 ウエハキャリアとこれを用いた半導体装置の製造方法
WO2008056549A1 (fr) * 2006-11-07 2008-05-15 Shin-Etsu Polymer Co., Ltd. Récipient pour substrat
SG151129A1 (en) * 2007-09-26 2009-04-30 E Sun Prec Ind Co Ltd Container for reticle
DE102010005202B4 (de) * 2010-01-21 2020-04-09 Q-Cells Se Magazin für einen photovoltaischen Wafer- und/oder Zellstapel mit einem Magazineinsatz zur Aufnahme desselben
CN102582670A (zh) * 2011-10-17 2012-07-18 上海华力微电子有限公司 一种掩模板安全搬运推车
JP2016149492A (ja) * 2015-02-13 2016-08-18 ミライアル株式会社 基板収納容器

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4043451A (en) * 1976-03-18 1977-08-23 Fluoroware, Inc. Shipping container for silicone semiconductor wafers
US4557382A (en) * 1983-08-17 1985-12-10 Empak Inc. Disk package
IT1181778B (it) * 1985-05-07 1987-09-30 Dynamit Nobel Silicon Spa Contenitore per l'immagazzinamento ed il trasporto di dischetti (fette) di silicio
US5207324A (en) * 1991-03-08 1993-05-04 Fluoroware, Inc. Wafer cushion for shippers
JP2586364Y2 (ja) * 1992-12-28 1998-12-02 住友シチックス株式会社 輸送用ウェーハケース
JPH0679152U (ja) * 1993-04-22 1994-11-04 株式会社大八化成 半導体ウエーハ運搬用容器の構造
JP2908985B2 (ja) * 1994-07-19 1999-06-23 信越ポリマー株式会社 ウェーハ収納容器のウェーハ抑え

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20010053787A (ko) * 1999-12-01 2001-07-02 마이클 디. 오브라이언 웨이퍼 핸들링장치
KR100832702B1 (ko) * 2003-12-24 2008-05-28 동부일렉트로닉스 주식회사 반도체 웨이퍼 세정장치

Also Published As

Publication number Publication date
JPH08107141A (ja) 1996-04-23
GB2293816B (en) 1998-06-10
FR2725960B1 (fr) 1998-04-03
DE19537193A1 (de) 1996-04-11
JP2796502B2 (ja) 1998-09-10
GB9519637D0 (en) 1995-11-29
FR2725960A1 (fr) 1996-04-26
GB2293816A (en) 1996-04-10

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