KR960009127B1 - Silicon field emission emitter and the manufacturing method - Google Patents

Silicon field emission emitter and the manufacturing method Download PDF

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Publication number
KR960009127B1
KR960009127B1 KR93000083A KR930000083A KR960009127B1 KR 960009127 B1 KR960009127 B1 KR 960009127B1 KR 93000083 A KR93000083 A KR 93000083A KR 930000083 A KR930000083 A KR 930000083A KR 960009127 B1 KR960009127 B1 KR 960009127B1
Authority
KR
South Korea
Prior art keywords
emitter
manufacturing
field emission
silicon field
emission emitter
Prior art date
Application number
KR93000083A
Other languages
English (en)
Other versions
KR940018911A (ko
Inventor
Kang-Ok Lee
Original Assignee
Samsung Display Devices Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung Display Devices Co Ltd filed Critical Samsung Display Devices Co Ltd
Priority to KR93000083A priority Critical patent/KR960009127B1/ko
Priority to US08/114,134 priority patent/US5401676A/en
Priority to FR9311173A priority patent/FR2700222B1/fr
Priority to JP30610793A priority patent/JP2767373B2/ja
Publication of KR940018911A publication Critical patent/KR940018911A/ko
Application granted granted Critical
Publication of KR960009127B1 publication Critical patent/KR960009127B1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/30—Cold cathodes, e.g. field-emissive cathode
    • H01J1/304—Field-emissive cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/30—Cold cathodes
    • H01J2201/304—Field emission cathodes
    • H01J2201/30403—Field emission cathodes characterised by the emitter shape
    • H01J2201/30426—Coatings on the emitter surface, e.g. with low work function materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2209/00—Apparatus and processes for manufacture of discharge tubes
    • H01J2209/02—Manufacture of cathodes
    • H01J2209/022—Cold cathodes
    • H01J2209/0223—Field emission cathodes
    • H01J2209/0226—Sharpening or resharpening of emitting point or edge
KR93000083A 1993-01-06 1993-01-06 Silicon field emission emitter and the manufacturing method KR960009127B1 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
KR93000083A KR960009127B1 (en) 1993-01-06 1993-01-06 Silicon field emission emitter and the manufacturing method
US08/114,134 US5401676A (en) 1993-01-06 1993-08-30 Method for making a silicon field emission device
FR9311173A FR2700222B1 (fr) 1993-01-06 1993-09-20 Procédé de formation d'un dispositif à effet de champ en silicium.
JP30610793A JP2767373B2 (ja) 1993-01-06 1993-11-12 シリコン電界放出エミッタ及びその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR93000083A KR960009127B1 (en) 1993-01-06 1993-01-06 Silicon field emission emitter and the manufacturing method

Publications (2)

Publication Number Publication Date
KR940018911A KR940018911A (ko) 1994-08-19
KR960009127B1 true KR960009127B1 (en) 1996-07-13

Family

ID=19349374

Family Applications (1)

Application Number Title Priority Date Filing Date
KR93000083A KR960009127B1 (en) 1993-01-06 1993-01-06 Silicon field emission emitter and the manufacturing method

Country Status (4)

Country Link
US (1) US5401676A (ko)
JP (1) JP2767373B2 (ko)
KR (1) KR960009127B1 (ko)
FR (1) FR2700222B1 (ko)

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US5686791A (en) 1992-03-16 1997-11-11 Microelectronics And Computer Technology Corp. Amorphic diamond film flat field emission cathode
US5543684A (en) 1992-03-16 1996-08-06 Microelectronics And Computer Technology Corporation Flat panel display based on diamond thin films
US5675216A (en) 1992-03-16 1997-10-07 Microelectronics And Computer Technololgy Corp. Amorphic diamond film flat field emission cathode
KR950008758B1 (ko) * 1992-12-11 1995-08-04 삼성전관주식회사 실리콘 전계방출 소자 및 그의 제조방법
US5534743A (en) * 1993-03-11 1996-07-09 Fed Corporation Field emission display devices, and field emission electron beam source and isolation structure components therefor
JPH07111868B2 (ja) * 1993-04-13 1995-11-29 日本電気株式会社 電界放出冷陰極素子
KR0183628B1 (ko) * 1993-09-16 1999-03-20 박경팔 전계방사형 음극구조체의 제조방법
KR100366191B1 (ko) 1993-11-04 2003-03-15 에스아이 다이아몬드 테크놀로지, 인코포레이티드 플랫패널디스플레이시스템및구성소자의제조방법
JP3249288B2 (ja) * 1994-03-15 2002-01-21 株式会社東芝 微小真空管およびその製造方法
JP2770755B2 (ja) * 1994-11-16 1998-07-02 日本電気株式会社 電界放出型電子銃
KR0159805B1 (ko) * 1994-12-10 1998-12-01 이종덕 저전압구동형 전계방출어레이의 제조방법
JPH08180824A (ja) * 1994-12-22 1996-07-12 Hitachi Ltd 電子線源、その製造方法、電子線源装置及びそれを用いた電子線装置
JPH08222126A (ja) * 1995-02-13 1996-08-30 Nec Kansai Ltd 電界放出冷陰極の製造方法
US6033277A (en) * 1995-02-13 2000-03-07 Nec Corporation Method for forming a field emission cold cathode
US5628659A (en) 1995-04-24 1997-05-13 Microelectronics And Computer Corporation Method of making a field emission electron source with random micro-tip structures
US5643032A (en) * 1995-05-09 1997-07-01 National Science Council Method of fabricating a field emission device
US5641706A (en) * 1996-01-18 1997-06-24 Micron Display Technology, Inc. Method for formation of a self-aligned N-well for isolated field emission devices
EP0789382A1 (en) * 1996-02-09 1997-08-13 International Business Machines Corporation Structure and method for fabricating of a field emission device
KR100442982B1 (ko) * 1996-04-15 2004-09-18 마츠시타 덴끼 산교 가부시키가이샤 전계방출형전자원및그제조방법
US5672544A (en) * 1996-04-22 1997-09-30 Pan; Yang Method for reducing silicided poly gate resistance for very small transistors
JP3127844B2 (ja) * 1996-11-22 2001-01-29 日本電気株式会社 電界放出型冷陰極
US5930589A (en) * 1997-02-28 1999-07-27 Motorola, Inc. Method for fabricating an integrated field emission device
US6144145A (en) * 1997-07-11 2000-11-07 Emagin Corporation High performance field emitter and method of producing the same
US6091190A (en) * 1997-07-28 2000-07-18 Motorola, Inc. Field emission device
US5956611A (en) * 1997-09-03 1999-09-21 Micron Technologies, Inc. Field emission displays with reduced light leakage
US6323587B1 (en) 1998-08-06 2001-11-27 Micron Technology, Inc. Titanium silicide nitride emitters and method
US6232705B1 (en) * 1998-09-01 2001-05-15 Micron Technology, Inc. Field emitter arrays with gate insulator and cathode formed from single layer of polysilicon
US6328620B1 (en) * 1998-12-04 2001-12-11 Micron Technology, Inc. Apparatus and method for forming cold-cathode field emission displays
US6235545B1 (en) * 1999-02-16 2001-05-22 Micron Technology, Inc. Methods of treating regions of substantially upright silicon-comprising structures, method of treating silicon-comprising emitter structures, methods of forming field emission display devices, and cathode assemblies
US6417016B1 (en) * 1999-02-26 2002-07-09 Micron Technology, Inc. Structure and method for field emitter tips
US6086442A (en) * 1999-03-01 2000-07-11 Micron Technology, Inc. Method of forming field emission devices
KR20010011136A (ko) * 1999-07-26 2001-02-15 정선종 나노구조를 에미터로 사용한 삼극형 전계 방출 에미터의 구조및 그 제조방법
KR20010058197A (ko) * 1999-12-24 2001-07-05 박종섭 전계방출표시 소자의 제조방법
US6692323B1 (en) * 2000-01-14 2004-02-17 Micron Technology, Inc. Structure and method to enhance field emission in field emitter device
KR20010091420A (ko) * 2000-03-15 2001-10-23 윤덕용 금속실리사이드가 코팅된 실리콘 팁의 제조방법
JP2001266735A (ja) * 2000-03-22 2001-09-28 Lg Electronics Inc 電界放出型冷陰極構造及びこの陰極を備えた電子銃
US6664721B1 (en) * 2000-10-06 2003-12-16 Extreme Devices Incorporated Gated electron field emitter having an interlayer
TW483025B (en) * 2000-10-24 2002-04-11 Nat Science Council Formation method of metal tip electrode field emission structure
US20040029413A1 (en) * 2000-10-30 2004-02-12 Norbert Angert Film material comprising spikes and method for the production thereof
EP2819165B1 (en) * 2013-06-26 2018-05-30 Nexperia B.V. Electric field gap device and manufacturing method
KR20220082232A (ko) 2020-12-10 2022-06-17 (주)조타 동계스포츠형 이동식 슬로프

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US3755704A (en) * 1970-02-06 1973-08-28 Stanford Research Inst Field emission cathode structures and devices utilizing such structures
US3669241A (en) * 1970-11-13 1972-06-13 Taylor Mfg Package accumulating conveyor
JPS5325632B2 (ko) * 1973-03-22 1978-07-27
US3970887A (en) * 1974-06-19 1976-07-20 Micro-Bit Corporation Micro-structure field emission electron source
JPS5436828B2 (ko) * 1974-08-16 1979-11-12
EP0434330A3 (en) * 1989-12-18 1991-11-06 Seiko Epson Corporation Field emission device and process for producing the same
US4964946A (en) * 1990-02-02 1990-10-23 The United States Of America As Represented By The Secretary Of The Navy Process for fabricating self-aligned field emitter arrays
DE4041276C1 (ko) * 1990-12-21 1992-02-27 Siemens Ag, 8000 Muenchen, De
US5229331A (en) * 1992-02-14 1993-07-20 Micron Technology, Inc. Method to form self-aligned gate structures around cold cathode emitter tips using chemical mechanical polishing technology
US5186670A (en) * 1992-03-02 1993-02-16 Micron Technology, Inc. Method to form self-aligned gate structures and focus rings
US5259799A (en) * 1992-03-02 1993-11-09 Micron Technology, Inc. Method to form self-aligned gate structures and focus rings
US5232549A (en) * 1992-04-14 1993-08-03 Micron Technology, Inc. Spacers for field emission display fabricated via self-aligned high energy ablation

Also Published As

Publication number Publication date
FR2700222A1 (fr) 1994-07-08
US5401676A (en) 1995-03-28
JPH06231675A (ja) 1994-08-19
FR2700222B1 (fr) 1995-03-24
KR940018911A (ko) 1994-08-19
JP2767373B2 (ja) 1998-06-18

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