KR960005035B1 - 심-uv 콘트라스트 향상층을 제조하는데 유용한 원심 주형 가능한 혼합물 및 이를 사용하여 패턴화된 감광성 내식막을 제조하는 방법 - Google Patents

심-uv 콘트라스트 향상층을 제조하는데 유용한 원심 주형 가능한 혼합물 및 이를 사용하여 패턴화된 감광성 내식막을 제조하는 방법 Download PDF

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Publication number
KR960005035B1
KR960005035B1 KR1019880009691A KR880009691A KR960005035B1 KR 960005035 B1 KR960005035 B1 KR 960005035B1 KR 1019880009691 A KR1019880009691 A KR 1019880009691A KR 880009691 A KR880009691 A KR 880009691A KR 960005035 B1 KR960005035 B1 KR 960005035B1
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KR
South Korea
Prior art keywords
alkyl
group
hydrogen
radicals
nitron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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KR1019880009691A
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English (en)
Korean (ko)
Other versions
KR890002708A (ko
Inventor
챨즈 데이비스 게리
Original Assignee
마이크로시, 인코포레이티드
리차드 메이슨
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Publication of KR890002708A publication Critical patent/KR890002708A/ko
Application granted granted Critical
Publication of KR960005035B1 publication Critical patent/KR960005035B1/ko
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Expired - Fee Related legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/091—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers characterised by antireflection means or light filtering or absorbing means, e.g. anti-halation, contrast enhancement
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09B—EDUCATIONAL OR DEMONSTRATION APPLIANCES; APPLIANCES FOR TEACHING, OR COMMUNICATING WITH, THE BLIND, DEAF OR MUTE; MODELS; PLANETARIA; GLOBES; MAPS; DIAGRAMS
    • G09B9/00—Simulators for teaching or training purposes
    • G09B9/02—Simulators for teaching or training purposes for teaching control of vehicles or other craft
    • G09B9/08—Simulators for teaching or training purposes for teaching control of vehicles or other craft for teaching control of aircraft, e.g. Link trainer
    • G09B9/30—Simulation of view from aircraft
    • G09B9/32—Simulation of view from aircraft by projected image
    • G09B9/326—Simulation of view from aircraft by projected image the image being transformed by optical means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F1/00—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
    • H01F1/01—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
    • H01F1/03—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
    • H01F1/12—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials
    • H01F1/14—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials metals or alloys
    • H01F1/147—Alloys characterised by their composition
    • H01F1/153—Amorphous metallic alloys, e.g. glassy metals
    • H01F1/15383—Applying coatings thereon

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Dispersion Chemistry (AREA)
  • Power Engineering (AREA)
  • Educational Technology (AREA)
  • Business, Economics & Management (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Educational Administration (AREA)
  • Architecture (AREA)
  • Structural Engineering (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Paints Or Removers (AREA)
  • Materials For Photolithography (AREA)
  • Non-Silver Salt Photosensitive Materials And Non-Silver Salt Photography (AREA)
KR1019880009691A 1987-07-31 1988-07-30 심-uv 콘트라스트 향상층을 제조하는데 유용한 원심 주형 가능한 혼합물 및 이를 사용하여 패턴화된 감광성 내식막을 제조하는 방법 Expired - Fee Related KR960005035B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US7998887A 1987-07-31 1987-07-31
US079,988 1987-07-31

Publications (2)

Publication Number Publication Date
KR890002708A KR890002708A (ko) 1989-04-11
KR960005035B1 true KR960005035B1 (ko) 1996-04-18

Family

ID=22154078

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019880009691A Expired - Fee Related KR960005035B1 (ko) 1987-07-31 1988-07-30 심-uv 콘트라스트 향상층을 제조하는데 유용한 원심 주형 가능한 혼합물 및 이를 사용하여 패턴화된 감광성 내식막을 제조하는 방법

Country Status (9)

Country Link
EP (1) EP0301559B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JPH07109512B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
KR (1) KR960005035B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CA (1) CA1328700C (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE3889392T2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
IE (1) IE63705B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
MX (1) MX170825B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
MY (1) MY103752A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
TW (1) TW224166B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6162579A (en) * 1996-04-19 2000-12-19 Corning Incorporated Nitrone compounds as photopolymer polymerization inhibitors and contrast enhancing additives

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3481739A (en) * 1966-04-22 1969-12-02 Horizons Research Inc Increased speed in nonsilver light sensitive systems by incorporating therein organic n-oxides
US4677049A (en) * 1983-09-28 1987-06-30 General Electric Company Spin castable photobleachable layer forming compositions
JPS61121050A (ja) * 1984-11-16 1986-06-09 Fuji Photo Film Co Ltd 新規なフオトレジスト組成物
US4578344A (en) * 1984-12-20 1986-03-25 General Electric Company Photolithographic method using a two-layer photoresist and photobleachable film
JPS6269259A (ja) * 1985-09-24 1987-03-30 Toshiba Corp パタ−ン形成方法
JPH0688961B2 (ja) * 1985-12-30 1994-11-09 マイクロサイ，インコーポレイテッド ニトロン類の製造方法
IE59915B1 (en) * 1986-07-25 1994-04-20 Microsi Inc Contrast enhancement layer compositions, alkylnitrones, and use

Also Published As

Publication number Publication date
EP0301559A3 (en) 1990-05-23
EP0301559A2 (en) 1989-02-01
IE63705B1 (en) 1995-05-31
TW224166B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1994-05-21
CA1328700C (en) 1994-04-19
MY103752A (en) 1993-09-30
DE3889392T2 (de) 1994-11-17
IE882355L (en) 1989-01-31
MX170825B (es) 1993-09-20
DE3889392D1 (de) 1994-06-09
KR890002708A (ko) 1989-04-11
JPH0250162A (ja) 1990-02-20
JPH07109512B2 (ja) 1995-11-22
EP0301559B1 (en) 1994-05-04

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