KR950034661A - 기판용 카세트에 있어서의 사이드레일 및 기판용 카세트 - Google Patents

기판용 카세트에 있어서의 사이드레일 및 기판용 카세트 Download PDF

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Publication number
KR950034661A
KR950034661A KR1019950011239A KR19950011239A KR950034661A KR 950034661 A KR950034661 A KR 950034661A KR 1019950011239 A KR1019950011239 A KR 1019950011239A KR 19950011239 A KR19950011239 A KR 19950011239A KR 950034661 A KR950034661 A KR 950034661A
Authority
KR
South Korea
Prior art keywords
cassette
rib
substrate
groove
side rail
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
KR1019950011239A
Other languages
English (en)
Korean (ko)
Inventor
도시오 이시카와
Original Assignee
도시오 이시카와
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 도시오 이시카와 filed Critical 도시오 이시카와
Publication of KR950034661A publication Critical patent/KR950034661A/ko
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/15—Horizontal carrier comprising wall type elements whereby the substrates are vertically supported, e.g. comprising sidewalls
    • H10P72/155—Horizontal carrier comprising wall type elements whereby the substrates are vertically supported, e.g. comprising sidewalls characterised by a material, a roughness, a coating or the like
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/15—Horizontal carrier comprising wall type elements whereby the substrates are vertically supported, e.g. comprising sidewalls

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Manufacturing Optical Record Carriers (AREA)
KR1019950011239A 1994-05-10 1995-05-09 기판용 카세트에 있어서의 사이드레일 및 기판용 카세트 Withdrawn KR950034661A (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP11968194 1994-05-10
JP94-119681 1994-05-10
JP12566695A JPH0826380A (ja) 1994-05-10 1995-04-27 基板用カセットにおけるサイドレール及び基板用カセット
JP95-125666 1995-04-27

Publications (1)

Publication Number Publication Date
KR950034661A true KR950034661A (ko) 1995-12-28

Family

ID=26457373

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950011239A Withdrawn KR950034661A (ko) 1994-05-10 1995-05-09 기판용 카세트에 있어서의 사이드레일 및 기판용 카세트

Country Status (3)

Country Link
EP (1) EP0682357A2 (enExample)
JP (1) JPH0826380A (enExample)
KR (1) KR950034661A (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3423512B2 (ja) * 1995-11-27 2003-07-07 信越ポリマー株式会社 精密基板用カセットの製造方法および精密基板用カセット
DE19637875C2 (de) 1996-04-17 1999-07-22 Steag Micro Tech Gmbh Anlage zur Naßbehandlung von Substraten
US6039186A (en) * 1997-04-16 2000-03-21 Fluoroware, Inc. Composite transport carrier
EP1004524B1 (en) * 1998-02-06 2014-12-31 Sumco Corporation Sheet support container
US6871741B2 (en) 1998-05-28 2005-03-29 Entegris, Inc. Composite substrate carrier
DE102005028112A1 (de) * 2005-06-13 2006-12-21 Schmid Technology Systems Gmbh Verfahren zur Positionierung und Lageerhaltung von Substraten, insbesondere von dünnen Siliziumwafern nach dem Drahtsägen zu deren Vereinzelung
KR102217674B1 (ko) * 2013-11-29 2021-02-22 삼성디스플레이 주식회사 패널 이송용 트레이
CN106829147B (zh) * 2017-01-17 2018-05-29 武汉华星光电技术有限公司 一种显示面板周转篮具及其使用方法
JP7344681B2 (ja) * 2019-06-18 2023-09-14 株式会社ディスコ ウエーハユニットの飛び出し防止治具
CN113182244B (zh) * 2021-03-29 2022-10-18 江苏亚电科技有限公司 光伏硅片清洗方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3923156A (en) * 1974-04-29 1975-12-02 Fluoroware Inc Wafer basket
JPS59199477A (ja) * 1983-04-25 1984-11-12 住友電気工業株式会社 ウエハ−ボツクス
US4949848A (en) * 1988-04-29 1990-08-21 Fluoroware, Inc. Wafer carrier
US5042671A (en) * 1989-09-20 1991-08-27 International Business Machines Corporation Versatile product carrier

Also Published As

Publication number Publication date
EP0682357A3 (enExample) 1995-12-27
EP0682357A2 (en) 1995-11-15
JPH0826380A (ja) 1996-01-30

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Legal Events

Date Code Title Description
PA0109 Patent application

St.27 status event code: A-0-1-A10-A12-nap-PA0109

R17-X000 Change to representative recorded

St.27 status event code: A-3-3-R10-R17-oth-X000

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

R17-X000 Change to representative recorded

St.27 status event code: A-3-3-R10-R17-oth-X000

PC1203 Withdrawal of no request for examination

St.27 status event code: N-1-6-B10-B12-nap-PC1203

WITN Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid
P22-X000 Classification modified

St.27 status event code: A-2-2-P10-P22-nap-X000

P22-X000 Classification modified

St.27 status event code: A-2-2-P10-P22-nap-X000