JPH0826380A - 基板用カセットにおけるサイドレール及び基板用カセット - Google Patents

基板用カセットにおけるサイドレール及び基板用カセット

Info

Publication number
JPH0826380A
JPH0826380A JP12566695A JP12566695A JPH0826380A JP H0826380 A JPH0826380 A JP H0826380A JP 12566695 A JP12566695 A JP 12566695A JP 12566695 A JP12566695 A JP 12566695A JP H0826380 A JPH0826380 A JP H0826380A
Authority
JP
Japan
Prior art keywords
rib
substrate cassette
groove
partition
side wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12566695A
Other languages
English (en)
Japanese (ja)
Inventor
Toshio Ishikawa
俊雄 石川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP12566695A priority Critical patent/JPH0826380A/ja
Priority to EP95106619A priority patent/EP0682357A2/en
Priority to KR1019950011239A priority patent/KR950034661A/ko
Publication of JPH0826380A publication Critical patent/JPH0826380A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/15—Horizontal carrier comprising wall type elements whereby the substrates are vertically supported, e.g. comprising sidewalls
    • H10P72/155—Horizontal carrier comprising wall type elements whereby the substrates are vertically supported, e.g. comprising sidewalls characterised by a material, a roughness, a coating or the like
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/15—Horizontal carrier comprising wall type elements whereby the substrates are vertically supported, e.g. comprising sidewalls

Landscapes

  • Packaging Frangible Articles (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Manufacturing Optical Record Carriers (AREA)
JP12566695A 1994-05-10 1995-04-27 基板用カセットにおけるサイドレール及び基板用カセット Pending JPH0826380A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP12566695A JPH0826380A (ja) 1994-05-10 1995-04-27 基板用カセットにおけるサイドレール及び基板用カセット
EP95106619A EP0682357A2 (en) 1994-05-10 1995-05-03 Substrate cassette and side rail therefor
KR1019950011239A KR950034661A (ko) 1994-05-10 1995-05-09 기판용 카세트에 있어서의 사이드레일 및 기판용 카세트

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP11968194 1994-05-10
JP6-119681 1994-05-10
JP12566695A JPH0826380A (ja) 1994-05-10 1995-04-27 基板用カセットにおけるサイドレール及び基板用カセット

Publications (1)

Publication Number Publication Date
JPH0826380A true JPH0826380A (ja) 1996-01-30

Family

ID=26457373

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12566695A Pending JPH0826380A (ja) 1994-05-10 1995-04-27 基板用カセットにおけるサイドレール及び基板用カセット

Country Status (3)

Country Link
EP (1) EP0682357A2 (enExample)
JP (1) JPH0826380A (enExample)
KR (1) KR950034661A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8734698B2 (en) 1998-05-28 2014-05-27 Entegris, Inc. Composite substrate carrier
KR20150062605A (ko) * 2013-11-29 2015-06-08 삼성디스플레이 주식회사 패널 이송용 트레이

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3423512B2 (ja) * 1995-11-27 2003-07-07 信越ポリマー株式会社 精密基板用カセットの製造方法および精密基板用カセット
DE19637875C2 (de) 1996-04-17 1999-07-22 Steag Micro Tech Gmbh Anlage zur Naßbehandlung von Substraten
US6039186A (en) * 1997-04-16 2000-03-21 Fluoroware, Inc. Composite transport carrier
EP1004524B1 (en) * 1998-02-06 2014-12-31 Sumco Corporation Sheet support container
DE102005028112A1 (de) * 2005-06-13 2006-12-21 Schmid Technology Systems Gmbh Verfahren zur Positionierung und Lageerhaltung von Substraten, insbesondere von dünnen Siliziumwafern nach dem Drahtsägen zu deren Vereinzelung
CN106829147B (zh) * 2017-01-17 2018-05-29 武汉华星光电技术有限公司 一种显示面板周转篮具及其使用方法
JP7344681B2 (ja) * 2019-06-18 2023-09-14 株式会社ディスコ ウエーハユニットの飛び出し防止治具
CN113182244B (zh) * 2021-03-29 2022-10-18 江苏亚电科技有限公司 光伏硅片清洗方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3923156A (en) * 1974-04-29 1975-12-02 Fluoroware Inc Wafer basket
JPS59199477A (ja) * 1983-04-25 1984-11-12 住友電気工業株式会社 ウエハ−ボツクス
US4949848A (en) * 1988-04-29 1990-08-21 Fluoroware, Inc. Wafer carrier
US5042671A (en) * 1989-09-20 1991-08-27 International Business Machines Corporation Versatile product carrier

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8734698B2 (en) 1998-05-28 2014-05-27 Entegris, Inc. Composite substrate carrier
KR20150062605A (ko) * 2013-11-29 2015-06-08 삼성디스플레이 주식회사 패널 이송용 트레이

Also Published As

Publication number Publication date
EP0682357A3 (enExample) 1995-12-27
EP0682357A2 (en) 1995-11-15
KR950034661A (ko) 1995-12-28

Similar Documents

Publication Publication Date Title
US6036031A (en) Substrate cassette and side rail therefor
US6006919A (en) Storage container for precision substrates and a positioning mechanism therefor and a method of positioning the storage container for precision substrates
US8146623B2 (en) Purge system for a substrate container
US4739882A (en) Container having disposable liners
JPH0826380A (ja) 基板用カセットにおけるサイドレール及び基板用カセット
KR100593217B1 (ko) 기판 수납 용기
JP4206149B2 (ja) ウェハー搬送モジュール
US20020015633A1 (en) Smif pod including independently supported wafer cassette
CN104071464A (zh) 具有气体导引装置的光罩盒
WO2015066484A1 (en) A modular reticle pod system
JP4208303B2 (ja) 精密基板収納容器及びその組立方法
US5296893A (en) Box for an optical stepper reticle
TWI686666B (zh) 基板容器
JP3938233B2 (ja) 密封容器
JP4159946B2 (ja) 基板収納容器
JP2002009142A (ja) 基板収納容器
US20060201848A1 (en) Method for reducing mask precipitation defects
JP2002299428A (ja) 精密基板収納容器及びその製造方法
TWM500982U (zh) 基板收納容器
JP6978554B2 (ja) レチクルポッドおよびその耐摩耗部品
JP4357048B2 (ja) 精密基板収納容器
JP2001298077A (ja) 基板収納容器
JP7810868B1 (ja) 基板ホルダ、めっき装置、及び基板ホルダで基板を保持する方法
JP2000164688A (ja) キャリアカセットおよびそれを用いた半導体装置の製造方法
JP2009224464A (ja) 基板収納容器