KR950018340A - 히드록실아민 및 알카놀아민을 포함하는 수성 스트립핑 조성물 및 그 사용방법 - Google Patents

히드록실아민 및 알카놀아민을 포함하는 수성 스트립핑 조성물 및 그 사용방법 Download PDF

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Publication number
KR950018340A
KR950018340A KR1019940004325A KR19940004325A KR950018340A KR 950018340 A KR950018340 A KR 950018340A KR 1019940004325 A KR1019940004325 A KR 1019940004325A KR 19940004325 A KR19940004325 A KR 19940004325A KR 950018340 A KR950018340 A KR 950018340A
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South Korea
Prior art keywords
coating
stripping
stripping composition
substrate
hydroxylamine
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KR1019940004325A
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English (en)
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이.워드 일
Original Assignee
일 이. 워드
에이씨티 인코포레이티드
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Publication of KR950018340A publication Critical patent/KR950018340A/ko

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
    • C11D3/0005—Other compounding ingredients characterised by their effect
    • C11D3/0073—Anticorrosion compositions
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D9/00—Chemical paint or ink removers
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/22—Organic compounds
    • C11D7/32—Organic compounds containing nitrogen
    • C11D7/3218—Alkanolamines or alkanolimines
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G1/00—Cleaning or pickling metallic material with solutions or molten salts
    • C23G1/14—Cleaning or pickling metallic material with solutions or molten salts with alkaline solutions
    • C23G1/16—Cleaning or pickling metallic material with solutions or molten salts with alkaline solutions using inhibitors
    • C23G1/18—Organic inhibitors
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/42—Stripping or agents therefor
    • G03F7/422—Stripping or agents therefor using liquids only
    • G03F7/425—Stripping or agents therefor using liquids only containing mineral alkaline compounds; containing organic basic compounds, e.g. quaternary ammonium compounds; containing heterocyclic basic compounds containing nitrogen
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D2111/00—Cleaning compositions characterised by the objects to be cleaned; Cleaning compositions characterised by non-standard cleaning or washing processes
    • C11D2111/10—Objects to be cleaned
    • C11D2111/14—Hard surfaces

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Wood Science & Technology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Materials Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Detergent Compositions (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Paints Or Removers (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Biological Depolymerization Polymers (AREA)

Abstract

약 55중량%의 모노에탄올아민, 약 22.5 내지 15 중량%의 히드록실아민 및 물을 포함하는 수성 스트림핑 조성물에 관한 것이다. 이러한 스트립핑 조성물은 금속이온이 실질적으로 재침착되지 않는 낮은 온도에서 포토레지스트, 유기포토레지스트 필름과 결합하거나 별도로 유기, 금속-유기물 무기염, 산화물, 수산화물 또는 복합체로부터의 잔여물을 스트립핑하는데 유용하다.

Description

히드록실아민 및 알카놀아민을 포함하는 수성 스트립핑 조성물 및 그 사용방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음

Claims (8)

  1. a) 약 55 내지 70 중량%의 모노에탄올아민, b) 약 22.5 내지 15 중량%의 히드록실아민, 및 c) 물의 혼합물을 포함하는 수성 스트립핑 조성물.
  2. 제1항에 있어서, 약 62 중량%의 모노에탄올아민, 약 19중량%의 히드록실아민 및 물을 포함하는 스트립핑 조성물.
  3. 제1항에 있어서, 약 10중량% 이하의 부식억제제를 포함하는 스트립핑 조성물.
  4. 제3항에 있어서, 부식억제제가 카놀, 피로갈롤, 안트라닐산, 갈산 및 에스테르로 이루어진 그룹에서 선택되는 것을 특징으로 하는 스트립핑 조성물.
  5. 약 62 중량%의 모노에탄올아민, 약 19중량%의 히드록실아민 및 물로 이루어진 포토레지스트 스트리핑 조성물.
  6. 코팅기판에 제1항에 따른 스트립핑 조성물을 스트립핑 유효량 도포하는 단계, 상기 스트립핑 조성물을 코팅기판상에 스트립핑 유효시간 동안 잔존하게 하는 단계 및 기판으로부터 코팅을 제거하는 단계를 포함하는 코팅기판에서의 코팅물 제거방법.
  7. 코팅기판에 제3항에 따른 스트립핑 조성물을 스트립핑 유효량 도포하는 단계, 상기 스트립핑 조성물을 코팅기판상에 스트립핑 유효시간 동안 잔존하게 하는 단계 및 기판으로부터 코팅을 제거하는 단계를 포함하는 코팅기판에서의 코팅물 제거방법.
  8. 코팅기판에 제5항에 따른 스트립핑 조성물을 스트립핑 유효량 도포하는 단계, 상기 스트립핑 조성물을 코팅기판상에 스트립핑 유효시간 동안 잔존하게 하는 단계 및 기판으로부터 코팅을 제거하는 단계를 포함하는 코팅기판에서의 코팅물 제거방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019940004325A 1993-12-02 1994-03-07 히드록실아민 및 알카놀아민을 포함하는 수성 스트립핑 조성물 및 그 사용방법 KR950018340A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/162,429 1993-12-02
US08/162,429 US5419779A (en) 1993-12-02 1993-12-02 Stripping with aqueous composition containing hydroxylamine and an alkanolamine

Publications (1)

Publication Number Publication Date
KR950018340A true KR950018340A (ko) 1995-07-22

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Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019940004325A KR950018340A (ko) 1993-12-02 1994-03-07 히드록실아민 및 알카놀아민을 포함하는 수성 스트립핑 조성물 및 그 사용방법

Country Status (9)

Country Link
US (1) US5419779A (ko)
EP (1) EP0656405B1 (ko)
JP (1) JPH07325404A (ko)
KR (1) KR950018340A (ko)
AT (1) ATE271105T1 (ko)
DE (1) DE69433895T2 (ko)
ES (1) ES2223044T3 (ko)
SG (1) SG42993A1 (ko)
TW (1) TW349986B (ko)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100366974B1 (ko) * 1999-12-30 2003-01-14 유니켐스 (주) 드라이필름용 박리액 조성물 및 이를 이용한 드라이필름의박리방법

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US5419779A (en) 1995-05-30
EP0656405A2 (en) 1995-06-07
ATE271105T1 (de) 2004-07-15
ES2223044T3 (es) 2005-02-16
EP0656405B1 (en) 2004-07-14
SG42993A1 (en) 1997-10-17
JPH07325404A (ja) 1995-12-12
DE69433895D1 (de) 2004-08-19
DE69433895T2 (de) 2005-07-28
EP0656405A3 (en) 1996-07-03
TW349986B (en) 1999-01-11

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